Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body
US-2020407279-A1 · Dec 31, 2020 · US
US11834377B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11834377-B2 |
| Application number | US-202017110559-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 3, 2020 |
| Priority date | Dec 8, 2016 |
| Publication date | Dec 5, 2023 |
| Grant date | Dec 5, 2023 |
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The use of magnesium oxide, reactive alumina and aluminium oxide as a base provides for a new erosion-resistant material upon sintering.
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The invention claimed is: 1. A powder comprising (in % by weight): from 96.0% to 99.9% of aluminum oxide; and reactive magnesium oxide in an amount of from 0.1% to 4.0%, to form spinel with the aluminum oxide present, the reactive magnesium functioning as a temporary binder phase; wherein aluminum oxide is present as tabular alumina. 2. The powder as claimed in claim 1 , wherein the reactive magnesium oxide has a citric acid activity of from 10 seconds to 250 seconds. 3. The powder as claimed in claim 1 , wherein the tabular alumina has at least three different particle size fractions. 4. The powder as claimed in claim 1 , wherein the tabular alumina has a maximum particle size of up to 10 mm. 5. The powder as claimed in claim 1 , wherein no silicon oxide is present in the powder. 6. The powder as claimed in claim 1 , wherein no silicon compounds are present in the powder. 7. A powder comprising (in % by weight): from 96.0% to 99.9% of aluminum oxide; and reactive magnesium oxide in an amount of from 0.1% to 4.0%, to form spinel with the aluminum oxide present, the reactive magnesium functioning as a temporary binder phase; wherein aluminum oxide is present as reactive alumina to reduce a water content, and the reactive alumina is used in a proportion from 10% by weight to 25% by weight in a total mix. 8. The powder as claimed in claim 7 , wherein the reactive alumina has at least two different particle size fractions. 9. The powder as claimed in claim 7 , wherein no silicon oxide is present in the powder. 10. The powder as claimed in claim 7 , wherein no silicon compounds are present in the powder.
Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4) · CPC title
Magnesium oxides or oxide-forming salts thereof · CPC title
based on aluminium oxide · CPC title
Composites · CPC title
Transition aluminas, e.g. delta or gamma aluminas · CPC title
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