Short-travel nanoscale motion stage and method for measuring thermally-related hysteresis data

Patent metadata

Field	Value
Publication number	US-11831256-B2
Application number	US-202217676888-A
Country	US
Kind code	B2
Filing date	Feb 22, 2022
Priority date	Feb 25, 2021
Publication date	Nov 28, 2023
Grant date	Nov 28, 2023

Abstract

A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.

First claim

What is claimed is:

1. A short-travel nanoscale motion stage, comprising two foundation frames, a stage moving component, two inchworm motors, two two-pole electromagnets, two measuring systems, and an aerostatic guideway wherein the two foundation frames refer to a left foundation frame and a right foundation frame; the two two-pole electromagnets refer to a left two-pole electromagnet and a right two-pole electromagnet; each of the two measuring systems comprises an eddy current sensor and a hall sensor;
a stator unit of the left two-pole electromagnet and stator units of the two inchworm motors are fixed on a right side surface of the left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of the stage moving component; an active unit of the right two-pole electromagnet is fixed on a right side surface of the stage moving component, and a stator unit of the right two-pole electromagnet is fixed on a left side surface of the right foundation frame; the stage moving component is fixedly mounted on a guide sleeve of the aerostatic guideway, and the stage moving component is guided by a guide spindle of the aerostatic guideway to move at degrees of freedom along X and Rz axes; each of the stator unit of the left two-pole electromagnet and the stator unit of the right two-pole electromagnet has-aft the eddy current sensor and the hall sensor fixed therein to measure a magnetic flux of the two-pole electromagnet and a displacement of the stage moving component at degrees of freedom along the X and Rz axes.

2. The short-travel nanoscale motion stage according to claim 1 , further comprising two water cooling systems, wherein each of the two water cooling systems comprises a cooling liquid inlet/outlet opening and a water-cooled plate; the cooling liquid inlet/outlet opening is formed in each of the left foundation frame and the right foundation frame; the water-cooled plates are arranged on four sides within electromagnet stator housings of the two two-pole electromagnets; the cooling liquid inlet/outlet opening is communicated with corresponding electromagnet stator housing; and the water cooler is communicated with the corresponding cooling liquid inlet/outlet opening.

3. The short-travel nanoscale motion stage according to claim 1 , wherein the stator unit of the left two-pole electromagnet is fixed at a central position of the right side surface of the left foundation frame; and the stator units of the two inchworm motors are respectively fixed at front and rear sides of the right side surface of the left foundation frame and distributed symmetrically about the stator unit of the left two-pole electromagnet.

4. The short-travel nanoscale motion stage according to claim 1 , wherein the active unit of the left two-pole electromagnet and the active unit of the right two-pole electromagnet are respectively fixed at central positions of the left and right side surfaces of the stage moving component; and the actives of the two inchworm motors are respectively fixed at front and rear sides of the left side surface of the stage moving component and distributed symmetrically about the active unit of the left two-pole electromagnet and the active unit of the right two-pole electromagnet.

5. The short-travel nanoscale motion stage according to claim 2 , wherein a fixture is fixed on the left side surface of the right foundation frame and a force sensor is fixed on the fixture.

6. The short-travel nanoscale motion stage according to claim 5 , further comprising an electrical control system, wherein the electrical control system comprises an upper computer, a data bus, a motion controller, a first power amplifier, a second power amplifier, a temperature controller, and a signal acquisition board;
the upper computer exchanges data with the motion controller, the temperature controller and the signal acquisition board through the data bus to exchange internal information in real time; the motion controller controls the two inchworm motors through the first power amplifier; the motion controller controls the two two-pole electromagnets through the second power amplifier; the signal acquisition board acquires and transfers position information acquired by the eddy current sensors and force information acquired by the force sensor, and feeds back the acquired information to the upper computer; and the upper computer performs data processing.

7. A method for measuring thermally-related hysteresis data of the short-travel nanoscale motion stage according to claim 6 , comprising:
temperature setting: giving an instruction by the upper computer and setting the temperature of the two-pole electromagnets by the temperature controller;
displacing: energizing the two inchworm motors to move the stage moving component to a desired position through the motion controller and the first power amplifier;
fixing by the fixture: fixing the stage moving component at the desired position by using the fixture;
data acquisition: giving an instruction by the upper computer, controlling, by the motion controller, the current of the coils of the two two-pole electromagnets to change at different frequencies and amplitudes, and measuring, by the force sensor, attractive forces of the two-pole electromagnets under corresponding conditions; acquiring, by the signal acquisition board, data involved in process of current changing and transferring the data to the upper computer for storage; and monitoring and adjusting an operating temperature of the motion stage through the temperature controller coordinating with the water cooling systems, ensuring that the temperature of the motion stage is maintained at a set value in a motion process;
data computing: labeling and storing the acquired data by the upper computer to obtain a set of measurement results; and
repeating above steps to complete current-force data acquisition under different temperature and displacement conditions in the motion process of the motion stage, and finally tabulating the data.

Assignees

• Harbin Inst Technology

Inventors

• Liu Yang
• Miao Qian
• Cui Ning

Classifications

• H02N2/062 Primary

  Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis · CPC title

• G01D5/142

  using Hall-effect devices (measuring magnetic variables using Hall-effect or other galvanomagnetic devices G01R33/06) · CPC title

• G01D5/20

  by varying inductance, e.g. by a movable armature · CPC title

• G05D23/1917

  using digital means · CPC title

• H02N2/023 Primary

  Inchworm motors · CPC title