Photoelectric conversion device having an attenuating member that attenuates a guided light

Patent metadata

Field	Value
Publication number	US-11830900-B2
Application number	US-202117334219-A
Country	US
Kind code	B2
Filing date	May 28, 2021
Priority date	Jun 4, 2020
Publication date	Nov 28, 2023
Grant date	Nov 28, 2023

Abstract

Provided is a back illuminated photoelectric conversion device including a semiconductor substrate that has a first area that is not light-shielded by a light shielding layer, a second area that is light-shielded by the light shielding layer and in which a second pixel is arranged, and a third area that is arranged between the first area and the second area in a plan view. An attenuating member that attenuates a guided light entering the first area and propagating to the second area with the semiconductor substrate as a waveguide is arranged in the third area.

First claim

What is claimed is:

1. A photoelectric conversion device comprising:
a semiconductor substrate that has a first face and a second face;
a plurality of pixels that are arranged in a plurality of rows and a plurality of columns on the semiconductor substrate;
a light shielding layer that is arranged so as to cover a part of the first face of the semiconductor substrate; and
a wiring layer that is arranged on a side of the second face with respect to the semiconductor substrate,
wherein the plurality of pixels includes a first pixel that outputs a pixel signal based on an incident light from a side of the first face and a second pixel that outputs a reference signal of a black level,
wherein the semiconductor substrate has a first area that is not light-shielded by the light shielding layer, a second area that is light-shielded by the light shielding layer and in which the second pixel is arranged, and a third area that is arranged between the first area and the second area in a plan view,
wherein an attenuating member that attenuates a guided light entering the first area and propagating to the second area with the semiconductor substrate as a waveguide is arranged in the third area, and
wherein the first area is arranged closer to an outer periphery of the semiconductor substrate than the second area in the plan view.

2. The photoelectric conversion device according to claim 1 , wherein the first pixel is not arranged in any of the first area, the second area, and the third area.

3. The photoelectric conversion device according to claim 1 , wherein a length of the attenuating member is longer than that of one pixel among the plurality of pixels in a direction parallel to the first face and the second face of the semiconductor substrate.

4. The photoelectric conversion device according to claim 1 , wherein a material of the semiconductor substrate contains silicon as a primary component.

5. The photoelectric conversion device according to claim 1 , wherein the attenuating member is a light absorbing member that absorbs the guided light.

6. The photoelectric conversion device according to claim 5 , wherein a material of the light absorbing member contains tungsten as a primary component.

7. The photoelectric conversion device according to claim 5 , wherein the light absorbing member is arranged on the side of the second face with respect to the semiconductor substrate.

8. The photoelectric conversion device according to claim 5 , wherein the light absorbing member is arranged between the second face and the wiring layer.

9. The photoelectric conversion device according to claim 5 , wherein the light absorbing member is arranged on the side of the first face with respect to the semiconductor substrate.

10. The photoelectric conversion device according to claim 5 , wherein the light absorbing member is arranged between the first face and the light-shielding layer.

11. The photoelectric conversion device according to claim 9 , wherein a material of the light absorbing member is different from a material of the light-shielding layer.

12. The photoelectric conversion device according to claim 5 , wherein a distance between the light absorbing member and the semiconductor substrate is equal to or less than 100 nanometers.

13. The photoelectric conversion device according to claim 5 , wherein a distance between the light absorbing member and the semiconductor substrate is equal to or less than 80 nanometers.

14. The photoelectric conversion device according to claim 5 , wherein a distance between the light absorbing member and the semiconductor substrate is equal to or less than 70 nanometers.

15. The photoelectric conversion device according to claim 5 , wherein a distance between the light absorbing member and the semiconductor substrate is equal to or less than 50 nanometers.

16. The photoelectric conversion device according to claim 5 , wherein a distance between the light absorbing member and the semiconductor substrate is equal to or less than 40 nanometers.

17. The photoelectric conversion device according to claim 5 , wherein a distance between the light absorbing member and the semiconductor substrate is equal to or less than 20 nanometers.

18. The photoelectric conversion device according to claim 5 , wherein a distance between the light absorbing member and the semiconductor substrate is equal to or less than 10 nanometers.

19. The photoelectric conversion device according to claim 5 , wherein a length of the light absorbing member is equal to or greater than 15 micrometers in a direction parallel to the first face and the second face of the semiconductor substrate.

20. The photoelectric conversion device according to claim 5 , wherein a length of the light absorbing member is equal to or greater than 30 micrometers in a direction parallel to the first face and the second face of the semiconductor substrate.

21. The photoelectric conversion device according to claim 5 , wherein a length of the light absorbing member is equal to or greater than 45 micrometers in a direction parallel to the first face and the second face of the semiconductor substrate.

22. The photoelectric conversion device according to claim 1 , wherein the attenuating member is a diffraction grating that diffracts the guided light outside the semiconductor substrate.

23. The photoelectric conversion device according to claim 22 , wherein the diffraction grating is constituted by trenches arranged at a predetermined pitch on the first face or the second face of the semiconductor substrate.

24. The photoelectric conversion device according to claim 23 , wherein a depth of the trenches is equal to or greater than 200 nanometers.

25. The photoelectric conversion device according to claim 22 , wherein the diffraction grating is constituted by a polysilicon arranged at a predetermined pitch on the first face or the second face of the semiconductor substrate.

26. The photoelectric conversion device according to claim 22 , wherein the diffraction grating is constituted by a metal layer arranged at a predetermined pitch on the first face or the second face of the semiconductor substrate.

27. The photoelectric conversion device according to claim 26 , wherein a material of the metal layer contains tungsten.

28. The photoelectric conversion device according to claim 22 , wherein a length of the diffraction grating is equal to or greater than 35 micrometers in a direction parallel to the first face and the second face of the semiconductor substrate.

29. The photoelectric conversion device according to claim 22 , wherein a length of the diffraction grating is equal to or greater than 70 micrometers in a direction parallel to the first face and the second face of the semiconductor substrate.

30. The photoelectric conversion device according to claim 22 , wherein a length of the diffraction grating is equal to or greater than 105 micrometers in a direction parallel to the first face and the second face of the semiconductor substrate.

31. The photoelectric conversion device according to claim 1 ,
wherein the plurality of pixels further includes a third pixel that does not output any of the pixel signal and the reference signal, and
wherein the third pixel is arranged in the third area.

32. A photoelectric conversion system

Assignees

• Canon Kk

Inventors

• Nagatomo Yasuhiro

Classifications

• H10F39/8063

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