Time-of-flight charged particle spectroscopy
US-2018151329-A1 · May 31, 2018 · US
US11830718B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11830718-B2 |
| Application number | US-202016830646-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 26, 2020 |
| Priority date | Mar 27, 2019 |
| Publication date | Nov 28, 2023 |
| Grant date | Nov 28, 2023 |
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Official abstract text for this publication.
A spectroscopy device including: an electron source arranged to emit a flux of electrons towards a sample, a pulsed photon source emitting photon pulses towards the sample, at least one spectrometer for receiving a flux of electrons originating from the sample, at least one electron detector; and at least one deflector, between the electron source and the at least one electron detector, synchronized with the pulsed photon source to allow or prevent the passage of electrons emitted by the electron source, towards the electron detector.
Opening claim text (preview).
The invention claimed is: 1. A spectroscopy device, comprising: an electron source arranged to emit a flux of electrons towards a sample; a pulsed photon source emitting photon pulses towards said sample; at least one spectrometer for energetically dispersing a flux of electrons originating from the sample; at least one electron detector; at least one deflector between the electron source and the at least one electron detector, synchronized with said pulsed photon source to allow the passage of electrons emitted by said electron source towards said at least one electron detector in an open state of the at least one deflector and prevent the passage of electrons emitted by said electron source, towards said at least one electron detector in a closed state of the at least one deflector; and synchronization electronics arranged to synchronize the at least one deflector with the photon source, wherein the synchronization electronics are configured to send command signals to place the at least one deflector in the open state and in the closed state. 2. The device according to claim 1 , wherein the electron source is arranged to emit a continuous flux of electrons. 3. The device according to claim 1 , further comprising at least one upstream deflector positioned between the sample and the electron source. 4. The device according to claim 3 , further comprising: at least one downstream deflector. 5. The device according to claim 4 , wherein the at least one upstream deflector has an open duration greater than the open duration of the at least one downstream deflector. 6. The device according to claim 1 , further comprising at least one downstream deflector positioned between the sample and the at least one electron detector. 7. The device according to claim 1 , wherein the at least one deflector is a magnetic, electrostatic, photo-initiated deflector or a radiofrequency cavity. 8. The device according to claim 7 , further comprising several detectors positioned downstream of the spectrometer. 9. The device according to claim 1 , wherein the at least one electron detector has controllable exposure. 10. The device according to claim 1 , wherein the synchronization electronics are arranged to synchronize the at least one controllable electron detector with the photon source and/or the at least one deflector. 11. The device according to claim 1 , wherein the photon source is a pulsed laser source. 12. The device according to claim 1 , wherein the photon source is wavelength-tunable. 13. The device according to claim 1 , further comprising a moveable sample support.
with electrons, e.g. electron impact ionisation, electron attachment (H01J49/145 takes precedence) · CPC title
by applying a resonant excitation voltage · CPC title
Ion deflecting means, e.g. ion gates · CPC title
Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge · CPC title
Energy spectrometers · CPC title
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