Fluidic carbon nanotube device

Patent metadata

Field	Value
Publication number	US-11826754-B2
Application number	US-202016752482-A
Country	US
Kind code	B2
Filing date	Jan 24, 2020
Priority date	Jan 25, 2019
Publication date	Nov 28, 2023
Grant date	Nov 28, 2023

Abstract

Fluidic and electrofluidic devices comprising carbon nanotubes and methods of making and using the same are provided. The carbon nanotubes may be densely bundled to span an aperture in a substrate. A polymeric coating over the substrate may contain reservoir(s) etched therein, the reservoir(s) in fluid connectivity with the carbon nanotubes. X-rays may be directed through the aperture and fluid-filled carbon nanotubes with x-ray analysis providing data on fluid structure and dynamics inside the carbon nanotubes.

First claim

What is claimed is:

1. A fluidic device comprising:
a substrate comprising a first face and a second face, which is opposite to the first face and is separated from the first face by a distance defining a thickness;
a first aperture through the substrate;
a first plurality of equi-length hollow carbon nanotubes (CNTs) arranged in parallel to each other and within ten degrees of parallel to the first face of the substrate, each CNT comprising an open input end and an open output end; adjacent CNTs in contact with one another, wherein:
the first plurality of CNTs is a t×w array, wherein t, which represents a number of CNTs arranged in a first direction perpendicular to the first face of the substrate, is 1 CNTs to about 5,000 CNTs, and w, which represents a number of CNTs arranged in a second direction parallel to the first face of the substrate, is about 10 CNTs to about 50,000 CNTs;
a density of CNTs in the first plurality of CNTs is from about 5×10 10 CNTs-cm −2 to about 5×10 12 CNTs-cm −2 ; and
the input ends are flush with each other;

wherein from about 0.1% to 100% of the CNTs of the first plurality of CNTs span the first aperture.

2. The fluidic device of claim 1 , further comprising:
a d th aperture through the substrate,
a d th plurality of equi-length hollow carbon nanotubes (CNTs) arranged in parallel to each other and parallel to the first surface of the substrate, each CNT comprising an open input end and an open output end; adjacent CNTs in contact with one another, wherein:
the d th plurality of CNTs is a t d ×w d array, wherein t d , which represents a number of CNTs arranged in the d th plurality of CNTs in the first direction perpendicular to the first face of the substrate, is from 1 CNT to about 5,000 CNTs and w d , which represents a number of CNTs arranged in the d th plurality of CNTs in the second direction parallel to the first face of the substrate, is about 10 CNTs to about 50,000 CNTs;
each d th plurality of CNTs has a density of CNTs independently selected from about 5×10 10 CNTs-cm −2 to about 5×10 12 CNTs-cm −2 ;
the input ends of each d th plurality of CNTs are flush with each other; and
wherein from about 0.1% to 100% of the CNTs of the d th plurality of CNTs span the d th aperture, wherein the percentage of CNTs in each d th plurality of CNTs spanning the d th aperture is selected independently of the percentage of CNTs in any other plurality of CNTs spanning their respective aperture;
wherein d is from 2 to about 500.

3. The fluidic device of claim 1 , wherein the first face of the substrate comprises a first electrode and a second electrode, which is parallel to the first electrode, wherein the first and the second electrode are oriented in the second direction, wherein at least one of the first electrode or the second electrode is in contact with the first plurality of CNTs.

4. The fluidic device of claim 1 , wherein the first face of the substrate comprises a reservoir containing a fluid, wherein the reservoir is fluidically connected to the input ends or the output ends of the CNTs of the first plurality of CNTs.

5. The fluidic device of claim 4 , wherein the volume capacity of the reservoir is from about 0.1 μl to about 3 μl.

6. The fluidic device of claim 1 , wherein the first face of the substrate comprises an electrically insulating layer.

7. The fluidic device of claim 1 , wherein a characteristic dimension of the first aperture comprising at least one of a diameter of the first aperture or a length of the first aperture is from about 0.1 to about 1,000 μm.

8. The fluidic device of claim 1 , further comprising a polymer coating over the CNTs, substrate, and optionally reservoirs.

9. The fluidic device of claim 1 , wherein an inner volume of the first plurality of CNTs contain a fluid.

10. The fluidic device of claim 9 , further comprising an energy source configured to direct an energy beam through the first aperture on the first plurality of CNTs and one or more X-ray beam detectors configured to detect the energy beam after scattering from the first plurality of CNTs.

11. The fluidic device of claim 1 , wherein the length of the CNTs in the first plurality of CNTs is between about 0.1 to about 1,000 μm.

12. A method of forming a fluidic device comprising:
forming a first aperture though a substrate comprising a first face and a second face, which is opposite to the first face is separated from the first face by a distance defining a thickness;
depositing on the first face of the substrate a plurality of equi-length, hollow carbon nanotubes (CNTs) arranged in parallel to each other and substantially perpendicular to the first face of the substrate; and
realigning the plurality of CNTs, parallel to the first face of the substrate over the aperture.

13. The method of claim 12 , wherein the realigning comprises rolling a cylindrical rolling pin on the first face of the substrate towards the aperture over the plurality of CNTs arranged in parallel to each other and within ten degrees of perpendicular to the first face of the substrate.

14. A method using the device of claim 1 , comprising:
directing an energy beam through the first aperture in the substrate on the first plurality of CNTs, wherein an inner volume of the first plurality of CNTs contains a fluid; and
detecting the energy beam after scattering from the first plurality of CNTs.

Assignees

• L Livermore Nat Security Llc

Inventors

• Meshot Eric R
• Buchsbaum Steven Field
• Fornasiero Francesco

Classifications

• B01L3/502715 Primary

  characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces · CPC title

• B01L3/502707

  characterised by the manufacture of the container or its components · CPC title

• C01B32/168 Primary

  After-treatment · CPC title

• G01N23/201

  by measuring small-angle scattering · CPC title

• B01L2200/12

  Specific details about manufacturing devices · CPC title