Position sensing circuit for an electrostatically driven MEMS device

Patent metadata

Field	Value
Publication number	US-11820649-B2
Application number	US-202117187206-A
Country	US
Kind code	B2
Filing date	Feb 26, 2021
Priority date	May 18, 2018
Publication date	Nov 21, 2023
Grant date	Nov 21, 2023

Abstract

The present disclosure relates to a system for detecting movement of a microelectromechanical system (MEMS) device. The system uses a drive voltage signal source for generating a low frequency drive voltage signal for driving the MEMS device. An excitation signal source may be used for generating an excitation signal which is also applied to the MEMS device. The excitation signal has a frequency which is above a physical response capability of the MEMS device, such that operation of the MEMS device is not significantly affected by the excitation signal. A sensing impedance is used to help generate a signal which is responsive to the capacitance of the MEMS device. The capacitance of the MEMS device changes in response to movement of the MEMS device. An output subsystem is provided which responds to changes sensed by the sensing impedance, and which produces an output voltage signal. A filter filters the output voltage signal to produce a filtered output voltage signal. The filtered output voltage signal is indicative of a position of the MEMS device.

First claim

What is claimed is:

1. A system for detecting movement of a microelectromechanical system (MEMS) device, comprising:
a drive voltage signal source for generating a low frequency drive voltage signal;
an excitation signal source for generating a high frequency excitation signal and applying the excitation signal to the MEMS device, the excitation signal having a frequency selected to be above a physical response capability of the MEMS device, such that operation of the MEMS device is not significantly affected by the excitation signal;
an amplifier configured to receive both the low frequency drive voltage signal from the drive voltage signal source and the excitation signal from the excitation signal source, and to superimpose the low frequency drive voltage signal and the excitation signal to generate a Vin signal for driving the MEMS device;
a sensing impedance which will produce a signal responsive to a capacitance of the MEMS device when driven by the Vin signal, the capacitance of the MEMS device changing in response to physical movement of the MEMS device;
an output subsystem responsive to the signal generated by the sensing impedance, and producing an output voltage signal; and
a filter for filtering the output voltage signal to produce a filtered output voltage signal which is indicative of a position of the MEMS device.

2. The system of claim 1 , wherein the sensing impedance comprises a sensing resistor.

3. The system of claim 2 , wherein the sensing resistor is in series with the MEMS device.

4. The system of claim 2 , wherein the output subsystem includes a differential amplifier for amplifying a signal obtained from the sensing resistor to create the output voltage signal.

5. The system of claim 4 , wherein the output subsystem further includes:
a first resistor divider network in communication with a first voltage signal present on a first side of the sensing resistor, a first input of the differential amplifier configured to receive the first voltage signal; and
a second resistor divider network in communication with a second voltage signal present on a second side of the sensing resistor, and a second input of the differential amplifier configured to receive the second voltage signal; and
the differential amplifier configured to amplify a difference between the first and second voltage signals.

6. The system of claim 1 , wherein the sensing impedance comprises a sensing capacitor.

7. The system of claim 4 , wherein the sensing capacitor is in parallel with the MEMS device.

8. The system of claim 1 , wherein the sensing impedance comprises a sensing inductor.

9. The system of claim 8 , wherein the sensing impedance is in series with the MEMS device.

10. The system of claim 1 , wherein the filter is configured to remove a signal component associated with the excitation signal, to produce the filtered output voltage signal.

11. The system of 10 , wherein the filter further includes a peak-detect filter responsive to an output of the filter for detecting an amplitude peak of the filtered output voltage signal.

12. The system of claim 11 , wherein the filter further includes a low pass filter responsive to an output from the peak-detect filter, for smoothing the filtered output voltage signal.

13. A system for detecting movement of a microelectromechanical system (MEMS) device, comprising:
a drive voltage signal source for generating a drive voltage signal for driving the MEMS device;
a modulation voltage signal source for generating a modulation signal, the modulation signal having a frequency selected to be above a physical response capability of the MEMS device, such that operation of the MEMS device is not significantly affected by the modulation signal;
a capacitor voltage divider network formed by a first capacitor coupled in series with the modulation voltage signal source, and a capacitance of the MEMS device representing a second capacitor, the capacitance of the MEMS device changing in response to physical movement of the MEMS device;
an output component coupled in parallel with the second capacitor, and producing an output voltage signal;
a filter for removing the drive voltage signal from the output voltage signal;
wherein the output voltage signal read across the output component is indicative of a position of the MEMS device; and
wherein a change in a ratio of voltage drops across the first and second capacitors is used to help form the output voltage.

14. The system of claim 13 , wherein the output component is a resistor.

15. The system of claim 13 , wherein the filter is configured to isolate the modulation signal.

16. The system of claim 15 , wherein the high pass filter is formed by a filtering capacitor in series with the output resistor.

17. The system of claim 16 , wherein the filtering capacitor operates to block a DC high voltage associated with the drive voltage signal.

18. The system of claim 13 , wherein the modulation voltage signal source has a modulation frequency of 100 KHz.

19. The system of claim 13 , wherein:
the first capacitor and the second capacitor forming the capacitor voltage divider network have capacitance values such that the first capacitor has a capacitance value which is less than about 10 times a value of capacitance of the second capacitor;
the system further including:
a current limiting resistor coupled in series with the voltage drive signal source; and

at least one of an electronic controller and an electronic measurement subsystem configured to receive the output voltage signal from the output component and to interpret the output voltage signal to determine a position of the MEMS device based on the output voltage signal; and
wherein the drive voltage signal source produces a drive voltage of about 100 Vdc, and the modulation voltage signal source produces a voltage of about 5 Vdc with a modulation frequency of about 100 KHz.

20. A method for detecting movement of a microelectromechanical system (MEMS) device, comprising:
generating a low frequency drive voltage signal using a drive voltage signal source;
generating a high frequency excitation signal using an excitation signal source, the excitation signal having a frequency selected to be above a physical response capability of the MEMS device, such that operation of the MEMS device is not significantly affected by the excitation signal;
using an amplifier configured to receive both the low frequency drive voltage signal from the drive voltage signal source and the excitation signal from the excitation signal source, and to superimpose the low frequency drive voltage signal and the excitation signal to generate a Vin signal for driving the MEMS device;
applying the Vin signal to the MEMS device to drive the MEMS device;
using an impedance to generate a signal in relation to a capacitance of the MEMS device, a capacitance of the MEMS device changing in response to physical movement of the MEMS device as the MEMS device is driven by the Vin signal, and causing a change;
using the signal generated by the impedance to help generate an output voltage signal in relation to sensed changes in the capacitance of the MEMS device the MEMS;
filtering the output voltage signal to produce a filtered output voltage signal; and
wherein the filtered output voltage signal is indicative of a position of the MEMS device.

21. The method of claim 20 , wherein using an impedance to sense changes in a capacitance of the MEMS device comprises using at least one of a capa

Assignees

• L Livermore Nat Security Llc

Inventors

• Panas Robert Matthew
• Corral Princess
• Hunter Steven L
• Paul Phillip Harris

Classifications

• B81B3/0086 Primary

  Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage · CPC title

• B81B7/008 Primary

  MEMS characterised by an electronic circuit specially adapted for controlling or driving the same (B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00) · CPC title

• G01D5/24

  by varying capacitance · CPC title

• B81B2207/03

  Electronic circuits for micromechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting · CPC title

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title