Methods to fabricate chamber component holes using laser drilling

Patent metadata

Field	Value
Publication number	US-11819948-B2
Application number	US-202117392248-A
Country	US
Kind code	B2
Filing date	Aug 2, 2021
Priority date	Oct 14, 2020
Publication date	Nov 21, 2023
Grant date	Nov 21, 2023

Abstract

Embodiments of a method of forming one or more holes in a substrate for use as a process chamber component are provided herein. In some embodiments, a method of forming one or more holes in a substrate for use as a process chamber component include forming the one or more holes in the substrate with one or more laser drills using at least one of a percussion drilling, a trepanning, or an ablation process, wherein each of the one or more holes have an aspect ratio of about 1:1 to about 50:1, and wherein the substrate is a component for gas delivery or fluid delivery.

First claim

The invention claimed is:

1. A method of forming one or more holes through a substrate for use as a process chamber component, comprising:
using one or more laser drills to drill the substrate from a first side of the substrate to a first location between the first side and a second side of the substrate to form one or more rough holes partially through the substrate, wherein the first location is a location after which drilling speed via the one or more laser drills would be less than a threshold drilling speed; and
using the one or more laser drills to drill the substrate from the second side to at least the first location to form the one or more holes through the substrate, wherein each of the one or more holes have an aspect ratio of about 30:1 to about 50:1, and wherein the substrate is a component for gas delivery or fluid delivery.

2. The method of claim 1 , wherein the substrate is drilled using at least one of a percussion drilling process, a trepanning process, or an ablation process.

3. The method of claim 1 , wherein the first location is about halfway between the first side and the second side.

4. The method of claim 1 , wherein the first location is about 4 to about 6 mm from the first side.

5. The method of claim 1 , wherein the substrate has a thickness of about 8 mm to about 12 mm.

6. The method of claim 1 , further comprising:
rotating the substrate after drilling the substrate from the first side so that the second side of the substrate faces the one or more laser drills; and
aligning the one or more laser drills with a location of the one or more rough holes prior to drilling the substrate from the second side.

7. The method of claim 1 , wherein the one or more laser drills comprise a single laser drill or a single array of laser drills.

8. The method of claim 1 , wherein drilling the substrate from the second side comprises finishing the one or more rough holes to form the one or more holes, wherein finishing the one or more rough holes comprises at least one of reducing a roughness of the one or more rough holes, increasing a roundness of the one or more rough holes, increasing a diameter of the one or more rough holes, or making the one or more rough holes more uniform in diameter with respect to each other.

9. A method of forming one or more holes through a substrate for use as a process chamber component, comprising:
placing the substrate on a substrate support;
using one or more laser drills to drill the substrate from a first side of the substrate to a first location between the first side and a second side of the substrate to form a one or more rough holes partially through the substrate, wherein the first location is less than 8 mm from the first side, and wherein the first location is a location after which drilling speed via the one or more laser drills would be less than a threshold drilling speed;
rotating the substrate along an elongate axis of the substrate support so that the second side of the substrate faces the one or more laser drills; and
using the one or more laser drills to drill the substrate from the second side to at least the first location to form the one or more holes through the substrate, wherein each of the one or more holes have an aspect ratio of about 30:1 to about 50:1 and wherein the substrate is a component for gas delivery or fluid delivery.

10. The method of claim 9 , wherein drilling the substrate from the second side comprises using a percussion drilling process or an ablation process with a pulse duration of about 1.0 nanosecond or less with a pulse energy of about 1.0 to about 8.0 millijoules.

11. The method of claim 9 , wherein the substrate has a thickness of about 8 mm to about 12 mm.

12. The method of claim 9 , further comprising directing a purge gas to the one or more holes while forming the one or more holes.

13. The method of claim 9 , wherein the threshold drilling speed is about 0.1 mm per second or faster.

14. The method of claim 9 , wherein the one or more holes extend at an angle of incidence relative to a vertical axis of the substrate between about zero degrees to about ninety degrees.

15. The method of claim 9 , wherein the substrate is made of silicon, silicon carbide, aluminum, nickel, molybdenum, or a ceramic material.

Assignees

• Applied Materials Inc

Inventors

• Agarwal Sumit
• Franklin Timothy Joseph
• Sommers Joseph F

Classifications

• B23K26/382 Primary

  by boring · CPC title

• B23K26/0624

  using ultrashort pulses, i.e. pulses of 1 ns or less · CPC title

• B23K26/14

  using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor (B23K26/12 takes precedence) · CPC title