Split electrode design for a transducer

Patent metadata

Field	Value
Publication number	US-11819361-B2
Application number	US-202016870929-A
Country	US
Kind code	B2
Filing date	May 9, 2020
Priority date	Dec 13, 2019
Publication date	Nov 21, 2023
Grant date	Nov 21, 2023

Abstract

An ultrasonic transducer device comprises a piezoelectric micromachined ultrasonic transducer (PMUT), a transmitter with first and second differential outputs, and a controller. The PMUT includes a membrane layer. A bottom electrode layer, comprising a first bottom electrode and a second bottom electrode, is disposed above the membrane layer. The piezoelectric layer is disposed above the bottom electrode layer. The top electrode layer is disposed above the piezoelectric layer and comprises a segmented center electrode disposed above a center of the membrane layer and a segmented outer electrode spaced apart from the segmented center electrode. The controller, responsive to the PMUT being placed in a transmit mode, is configured to couple the first and second segments of the bottom electrode layer with ground, couple the first output of the transmitter with the segments of the segmented center electrode, and couple the second output with the segments of the segmented outer electrode.

First claim

What is claimed is:

1. An ultrasonic transducer device comprising:
a piezoelectric micromachined ultrasonic transducer comprising:
a membrane layer;
a bottom electrode layer disposed above and coupled with the membrane layer and comprising a first bottom electrode and a second bottom electrode, wherein the first bottom electrode and the second bottom electrode are substantially equal in surface area;
a piezoelectric layer disposed above and coupled with the bottom electrode layer and comprising a first piezoelectric portion disposed above the first bottom electrode and a second piezoelectric portion disposed above the second bottom electrode; and
a top electrode layer disposed above and coupled with the piezoelectric layer and comprising a segmented center electrode disposed above a center of the membrane layer and a segmented outer electrode spaced apart from the segmented center electrode, wherein the segmented outer electrode is disposed away from the center of the membrane layer in a ring around the segmented center electrode, wherein a first segment of the segmented outer electrode and a first segment of the segmented center electrode are disposed above the first bottom electrode, wherein a second segment of the segmented outer electrode and a second segment of the segmented center electrode are disposed above the second bottom electrode, and wherein individual segments of the segmented center electrode and individual segments of the segmented outer electrode are all substantially equal in surface area;

a drive transmitter comprising a first output and a second output, wherein the first output and the second output are differential; and
a controller, responsive to the piezoelectric micromachined ultrasonic transducer being placed in a transmit mode, configured to electrically couple the first and second segments of the bottom electrode layer with ground, electrically couple the first output with the segments of the segmented center electrode, and to electrically couple the second output with the segments of the segmented outer electrode.

2. The ultrasonic transducer device of claim 1 , further comprising:
a signal generator coupled to an input of the drive transmitter and configured to generate and provide a repeating waveform on the input.

3. The ultrasonic transducer device of claim 1 , further comprising:
a charge pump coupled to the drive transmitter and configured to provide charge for amplifying an input to the drive transmitter.

4. The ultrasonic transducer device of claim 1 , wherein the controller is configured to control a signal gain of the ultrasonic transducer device by controlling the coupling of the first and second bottom electrodes to ground.

5. The ultrasonic transducer device of claim 1 , further comprising:
a front end amplifier comprising a first input and a second input, wherein the first input and the second input are differential; and
wherein, responsive to the piezoelectric micromachined ultrasonic transducer being switched from the transmit mode to a receive mode, the controller is configured to decouple the first and second bottom electrodes from ground, decouple the first and second outputs from the piezoelectric micromachined ultrasonic transducer, couple the first input with the first segment of the segmented outer electrode, couple the first segment of the segmented center electrode with ground, couple the second input with a second segment of the segmented center electrode, and couple the second segment of the segmented outer electrode with ground.

6. The ultrasonic transducer device of claim 5 , wherein in response to the piezoelectric micromachined transducer being placed in the receive mode:
the first segment of the segmented outer electrode, the piezoelectric layer, and the first segment of the segmented center electrode form a first pair of series capacitors such that voltage received at the first input is substantially doubled by substantially halving a first capacitance associated with the first segment of the segmented center electrode; and
the second segment of the segmented outer electrode, the piezoelectric layer, and the second segment of the segmented center electrode form a second pair of series capacitors such that voltage received at the second input is substantially doubled by substantially halving a second capacitance associated with the second segment of the segmented center electrode.

7. The ultrasonic transducer device of claim 1 , wherein, in response to the piezoelectric micromachined ultrasonic transducer being switched from a transmit mode to a receive mode, the controller is configured to decouple the first and second bottom electrodes from ground following a ringdown period of the piezoelectric micromachined ultrasonic transducer.

8. The ultrasonic transducer device of claim 7 , wherein the ringdown period is at least as long as a transmit period immediately preceding the piezoelectric micromachined ultrasonic transducer being switched from the transmit mode to the receive mode.

9. The ultrasonic transducer device of claim 1 , wherein:
when, during operation, segments of the segmented center electrode present a concave surface disposed toward the membrane layer, segments of the segmented outer electrode present a convex surface oriented toward the membrane layer.

10. The ultrasonic transducer device of claim 1 , wherein:
the first piezoelectric portion and the second piezoelectric portion are substantially equal in surface area.

11. The ultrasonic transducer device of claim 1 , wherein:
the segmented center electrode is disposed above a portion of the piezoelectric layer in which a Laplacian of an out-of-plane displacement in the piezoelectric layer has a positive sign in a given displaced shape; and
the segmented outer electrode is disposed above a second portion of the piezoelectric layer in which a Laplacian of the out-of-plane displacement in the piezoelectric layer has a negative sign in the same given displaced shape.

12. The ultrasonic transducer device of claim 1 , wherein:
the segmented center electrode is disposed above a portion of the piezoelectric layer in which a sum of the normal components of an in-plane strain in the piezoelectric layer has a positive sign in a given displaced shape; and
the segmented outer electrode is disposed above a second portion of the piezoelectric layer in which a sum of the normal components of the in-plane strain in the piezoelectric layer has a negative sign in the same given displaced shape.

13. A piezoelectric micromachined transducer comprising:
a membrane layer;
a bottom electrode layer disposed above and coupled with the membrane layer and comprising a first bottom electrode and a second bottom electrode, wherein the first bottom electrode and the second bottom electrode are substantially equal in surface area;
a piezoelectric layer disposed above and coupled with the bottom electrode layer and comprising a first piezoelectric portion disposed above the first bottom electrode and a second piezoelectric portion disposed above the second bottom electrode, wherein the first piezoelectric portion and the second piezoelectric portion are substantially equal in surface area; and
a top electrode layer disposed above and coupled with the piezoelectric layer and comprising a segmented center electrode disposed above a center of the membrane layer and a segmented outer electrode spaced apart from the segmented center electrode, wherein the segmented outer electrode is disposed away from the center of the membrane layer in a ring around the segmented center electrode, wherein a first segment of the segmented outer electrode and a fir

Assignees

• Invensense Inc

Inventors

• Goericke Fabian T
• Przybyla Richard J
• Eovino Benjamin E

Classifications

• A61B8/4483 Primary

  characterised by features of the ultrasound transducer · CPC title

• B06B1/0688

  with foil-type piezoelectric elements, e.g. PVDF · CPC title

• G01N29/2437

  Piezoelectric probes · CPC title

• G01S7/521

  Constructional features · CPC title

• H10N30/87

  Electrodes or interconnections, e.g. leads or terminals · CPC title