Metrology device and phase modulator apparatus therefor comprising a first moving grating and a first compensatory grating element

Patent metadata

Field	Value
Publication number	US-11815675-B2
Application number	US-202017633882-A
Country	US
Kind code	B2
Filing date	Jul 27, 2020
Priority date	Aug 9, 2019
Publication date	Nov 14, 2023
Grant date	Nov 14, 2023

Abstract

Disclosed is a phase modulator apparatus comprises at least a first phase modulator for modulating input radiation, and a metrology device comprising such a phase modulator apparatus. The first phase modulator comprises a first moving grating in at least an operational state for diffracting the input radiation and Doppler shifting the frequency of the diffracted radiation; and a first compensatory grating element comprising a pitch configured to compensate for wavelength dependent dispersion of at least one diffraction order of said diffracted radiation.

First claim

The invention claimed is:

1. A phase modulator apparatus for modulating input radiation, comprising:
at least a first phase modulator comprising:
a first moving grating configured to move in at least an operational state to diffract the input radiation and Doppler shift a frequency of the diffracted radiation; and
a first compensatory grating element comprising a pitch configured to compensate for wavelength dependent dispersion of at least one diffraction order of the diffracted radiation.

2. The phase modulator apparatus of claim 1 , further comprising a first acousto-optical modulator, and wherein the first moving grating comprises a first moving acoustic grating.

3. The phase modulator apparatus of claim 2 , wherein the first acousto-optical modulator comprises an acousto-optical tunable filter.

4. The phase modulator apparatus of claim 1 , wherein the first phase modulator comprises a first optical arrangement to refocus the at least one diffraction order onto the first compensatory grating element.

5. The phase modulator apparatus of claim 1 , wherein the pitch of the first compensatory grating element is matched to a pitch of the first moving grating, the matching thereby compensating for any intervening magnification imposed between the first moving grating and the first compensatory grating element.

6. The phase modulator apparatus of claim 1 , wherein the input radiation comprises a plurality of wavelengths.

7. The phase modulator apparatus of claim 1 , comprising a second moving grating in at least an operational state operable to diffract the radiation output from the first moving grating and Doppler shift the frequency of this diffracted radiation so as to down-shift the frequency of radiation output from the first moving grating.

8. The phase modulator apparatus of claim 7 , wherein at least one diffraction order diffracted by the first moving grating and at least one diffraction order diffracted by the second moving grating, comprise diffraction orders of opposite sign such that an output frequency of radiation output from the phase modulator apparatus comprises a difference of a first frequency used to generate the first moving grating or movement thereof and second frequency used to generate the second moving grating or movement thereof.

9. The phase modulator apparatus of claim 8 , comprising a second acousto-optical modulator operably associated with the second moving grating, the second moving grating comprising a second acoustic grating.

10. The phase modulator apparatus of claim 9 , wherein the difference of the first frequency used to generate the first moving grating and the second frequency used to generate the second moving grating, is less than 1 MHz.

11. The phase modulator apparatus of claim 10 , wherein the diffraction orders of opposite sign comprise a +1 diffraction order and a −1 diffraction order.

12. The phase modulator apparatus of claim 9 , wherein a second frequency is used to generate the second moving grating such that the grating pitch of the second moving grating is matched to that of the first moving grating, the matching compensating for any intervening magnification imposed between the first moving grating and second moving grating, such that the first compensatory grating element comprises the second moving grating.

13. The phase modulator apparatus of claim 9 , comprising a second phase modulator, the second phase modulator comprising:
the second acousto-optical modulator;
a second compensatory grating element; and
a second optical arrangement to refocus at least one diffraction order of the radiation diffracted from the second moving grating onto the second compensatory grating element,
wherein the second compensatory grating element comprises a pitch configured to compensate for wavelength dependent dispersion of the at least one diffraction order diffracted by the second moving grating.

14. The phase modulator apparatus of claim 13 , wherein a grating pitch of the second compensatory grating element is matched to that of the second moving grating, the matching compensating for any intervening magnification imposed between the second moving grating and the second compensatory grating element.

15. The phase modulator apparatus of claim 1 , wherein the Doppler shifting is operable to impose a wavelength independent linearly time varying phase shift on each diffraction order.

Assignees

• Asml Netherlands Bv

Inventors

• Den Boef Arie Jeffrey
• Huisman Simon Reinald

Classifications

• G02B26/06 Primary

  for controlling the phase of light (G02B26/08 takes precedence {, measuring optical phase difference G01J9/00}) · CPC title

• G02F1/113

  Circuit or control arrangements · CPC title

• G03F9/7088

  Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection · CPC title

• G02B26/002 Primary

  the movement or the deformation controlling the frequency of light, e.g. by Doppler effect · CPC title

• G02F1/11 Primary

  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves (acousto-optical deflection G02F1/33) · CPC title