Displacement detection device and torque sensor

Patent metadata

Field	Value
Publication number	US-11815416-B2
Application number	US-202118008227-A
Country	US
Kind code	B2
Filing date	Jun 7, 2021
Priority date	Jun 12, 2020
Publication date	Nov 14, 2023
Grant date	Nov 14, 2023

Abstract

A displacement detection device and a torque sensor include a movable part that is connected to a first member and to a second member and that changes a gap along with displacement of the second member with respect to the first member in a prescribed direction; and a detection part (detection circuit) that, on the basis of the change in the gap detects displacement of the second member with respect to the first member in the prescribed direction, wherein the movable part is configured to make the amount of N change in the gap greater than the amount of displacement of the second member with respect to the first member in the prescribed direction.

First claim

The invention claimed is:

1. A displacement detection device configured to detect displacement of a second member relative to a first member in a predetermined direction, the displacement detection device comprising:
a movable portion connected to the first member and the second member and configured to change a gap in accordance with the displacement of the second member relative to the first member in the predetermined direction; and
a detection unit configured to detect the displacement of the second member relative to the first member in the predetermined direction, based on a change in the gap,
wherein
the movable portion is configured
to make an amount of the change in the gap larger than an amount of the displacement of the second member relative to the first member in the predetermined direction,
to make the gap larger as the first member and the second member separate from each other, and
to make the gap smaller as the first member and the second member come close to each other.

2. The displacement detection device according to claim 1 , further comprising:
two movable bodies included in the movable portion; and
a pair of opposing electrodes including a first electrode attached to one of the movable bodies and a second electrode attached to another of the movable bodies and facing the first electrode, the pair of opposing electrodes forming the gap between the first electrode and the second electrode,
wherein the detection unit is a detection circuit configured to detect the displacement of the second member relative to the first member in the predetermined direction, based on a change in a capacitance value of the opposing electrodes caused by the change in the gap.

3. The displacement detection device according to claim 2 , wherein
each of the movable bodies is an elastic member including bent portions or curved portions, and
the gap is changed by elastic deformation of the bent portions or the curved portions.

4. The displacement detection device according to claim 3 , wherein each of the movable bodies includes:
a holding portion that is interposed between two of the bent portions and is parallel to the predetermined direction, the holding portion being configured to hold the first electrode or the second electrode;
a first inclined portion interposed between one of the bent portions and the first member and inclined with respect to the predetermined direction; and
a second inclined portion interposed between another of the bent portions and the second member and inclined with respect to the predetermined direction, and
wherein the bent portions are elastically deformed in accordance with the displacement of the second member relative to the first member in the predetermined direction, and an inclination angle of the first inclined portion and an inclination angle of the second inclined portion with respect to the predetermined direction are changed, whereby the gap is changed.

5. The displacement detection device according to claim 4 , wherein
the inclination angle of the first inclined portion and the inclination angle of the second inclined portion with respect to the predetermined direction are less than 45 degrees.

6. The displacement detection device according to claim 1 , wherein
a direction in which the gap changes intersects with the predetermined direction.

7. The displacement detection device according to claim 2 , wherein
the two movable bodies are two rotary members that intersect with each other at an intermediate point and that are rotatably connected to each other at the intermediate point,
the first member is connected to one end portion of the one of the movable bodies, the first electrode is attached to another end portion of the one movable body, and a distance from the intermediate point to the first electrode is longer than a distance from the intermediate point to the first member,
the second member is connected to one end portion of the other of the movable bodies, the second electrode is attached to another end portion of the other movable body, and a distance from the intermediate point to the second electrode is longer than a distance from the intermediate point to the second member, and
the gap changes according to a principle of leverage in which the intermediate point serves as a fulcrum, the first member and the second member serve as points of effort, and the first electrode and the second electrode serve as points of load.

8. The displacement detection device according to claim 7 , wherein
a direction in which the gap changes coincides with the predetermined direction.

9. A torque sensor comprising the displacement detection device according to claim 1 , the torque sensor further comprising:
an inner ring and an outer ring; and
an elastically deformable body connected to the inner ring and the outer ring, wherein in the elastically deformable body, rigidity in a torque direction is smaller than rigidity in directions other than the torque direction, the torque direction being a direction in which the outer ring rotates relative to the inner ring,
wherein the inner ring is the first member, and
the outer ring is the second member.

10. The torque sensor according to claim 9 , wherein
a direction in which the gap changes coincides with an axial direction of the inner ring and the outer ring.

11. The torque sensor according to claim 9 , wherein
the displacement detection device is provided separately from the inner ring, the outer ring, and the elastically deformable body.

Assignees

• Fanuc Corp

Inventors

• Wakabayashi Kazuki

Classifications

• G01L3/14 Primary

  wherein the torque-transmitting element is other than a torsionally-flexible shaft · CPC title

• G01L1/142 Primary

  using capacitors · CPC title

• G01L3/1442

  involving electrostatic means · CPC title