System using pixelated faraday sensor

Patent metadata

Field	Value
Publication number	US-11810754-B2
Application number	US-202117546667-A
Country	US
Kind code	B2
Filing date	Dec 9, 2021
Priority date	Dec 9, 2021
Publication date	Nov 7, 2023
Grant date	Nov 7, 2023

Abstract

A system and method for optimizing a ribbon ion beam in a beam line implantation system is disclosed. The system includes a calibration sensor disposed in the beam line after the mass analyzer. The calibration sensor is able to measure both the total current of the ribbon ion beam, as well as provide information about its vertical position. Information from the calibration sensor can then be utilized by a controller to adjust various parameters to improve the density as well as the vertical position. In some embodiments, the calibration sensor may include a plurality of Faraday sensors, where, both the total current and the vertical position of the ion beam can be determined. Furthermore, the focus of the ion beam can be estimated based on the distribution of the current in the height direction.

First claim

What is claimed is:

1. A beamline ion implantation system, comprising:
an ion source to generate ions;
extraction optics disposed proximate the ion source to extract the ions from the ion source;
a mass analyzer to receive the ions from the ion source;
a mass resolving device disposed after an output of the mass analyzer;
a collimator disposed after the mass resolving device; and
a calibration sensor, that is introduced into a path of the ions after the mass resolving device and before the collimator, wherein the calibration sensor comprises two or more Faraday sensors arranged in a height direction, and a current collected by each of the two or more Faraday sensors is used to provide information about a total current and a position of the ions in the height direction, wherein the beamline ion implantation system is tuned based on the position of the ions in the height direction.

2. The beamline ion implantation system of claim 1 , wherein the calibration sensor provides information about a focus of the ions in the height direction.

3. The beamline ion implantation system of claim 1 , wherein the calibration sensor provides information about a height of the ions.

4. The beamline ion implantation system of claim 1 , further comprising a controller wherein the controller tunes at least one of the extraction optics and the mass analyzer based on information regarding the position of the ions in the height direction from the calibration sensor.

5. The beamline ion implantation system of claim 4 , further comprising at least one quadrupole lens disposed between the ion source and the mass resolving device, wherein the controller tunes the at least one quadrupole lens based on information regarding the position of the ions in the height direction from the calibration sensor.

6. The beamline ion implantation system of claim 1 , wherein the calibration sensor comprises an outer Faraday sensor having a slot in a center in the height direction and an inner Faraday sensor disposed behind the slot.

7. The beamline ion implantation system of claim 6 , wherein the information about the position of the ions in the height direction comprises a ratio of current collected by the inner Faraday sensor to the total current collected by the calibration sensor.

8. The beamline ion implantation system of claim 1 , wherein the calibration sensor comprises a plurality of Faraday sensors stacked in the height direction, wherein an inner Faraday sensor is sandwiched between at least one outer Faraday sensor on each side in the height direction.

9. The beamline ion implantation system of claim 8 , wherein the information about the position of the ions in the height direction comprises a ratio of current collected by the inner Faraday sensor to the total current collected by the calibration sensor.

10. A beamline ion implantation system, comprising:
an ion source to generate ions;
extraction optics disposed proximate the ion source to extract the ions from the ion source;
a mass analyzer to receive the ions from the ion source;
a mass resolving device disposed after an output of the mass analyzer to create a small beam;
a collimator disposed after the mass resolving device to receive the small beam and create an ion beam that impacts a workpiece;
a calibration sensor, that is introduced into a path of the ions after the mass resolving device and before the collimator, wherein the calibration sensor comprises two or more Faraday sensors arranged in a height direction, and a current collected by each of the two or more Faraday sensors is used to provide information about a total current and a position of the small beam in a height direction; and
a controller, wherein the controller is configured to determine one or more characteristics of the small beam based on the information from the calibration sensor, where the one or more characteristics comprise a height of the small beam, the position of the small beam in the height direction and a focus of the small beam and is configured to tune the beam line ion implantation system based on at least one of the one or more characteristics.

11. The beamline ion implantation system of claim 10 , wherein the calibration sensor comprises an outer Faraday sensor having a slot in a center in the height direction and an inner Faraday sensor disposed behind the slot.

12. The beamline ion implantation system of claim 11 , wherein the controller determines the height of the small beam by moving the extraction optics so that the small beam moves in the height direction, and wherein the height is determined based on positions of the extraction optics at which the inner Faraday sensor collects current.

13. The beamline ion implantation system of claim 11 , wherein the controller determines the focus of the ions in the height direction using a ratio of current collected by the inner Faraday sensor to the total current collected by the calibration sensor.

14. The beamline ion implantation system of claim 10 , wherein the calibration sensor comprises a plurality of Faraday sensors stacked in the height direction, wherein an inner Faraday sensor is sandwiched between at least one outer Faraday sensor on each side in the height direction.

15. The beamline ion implantation system of claim 14 , wherein the controller determines the height of the small beam based on which Faraday sensors collect current.

16. The beamline ion implantation system of claim 14 , wherein the controller determines the position of the small beam in the height direction based on which Faraday sensor collect a maximum amount of current.

17. The beamline ion implantation system of claim 14 , wherein the controller determines the focus of the small beam in the height direction based on a ratio of current collected by the inner Faraday sensor to the total current collected by the calibration sensor.

18. The beamline ion implantation system of claim 10 , wherein the controller tunes at least one of the extraction optics and the mass analyzer based on information regarding the position of the ions in the height direction from the calibration sensor.

Assignees

• Applied Materials Inc

Inventors

• Hermanson Eric D
• Clay Nevin
• Cucchetti Antonella
• Layne Philip
• Mahalingam Sudhakar
• Simmons Michael

Classifications

• H01J2237/24578

  Spatial variables, e.g. position, distance · CPC title

• H01J2237/24514

  Beam diagnostics including control of the parameter or property diagnosed (H01J2237/30472 takes precedence) · CPC title

• H01J2237/2446

  Position sensitive detectors · CPC title

• H01J2237/24405

  Faraday cages · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title