Negative photosensitive composition and pattern formation method
US-2018095366-A1 · Apr 5, 2018 · US
US11809078B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11809078-B2 |
| Application number | US-201816769361-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 29, 2018 |
| Priority date | Dec 6, 2017 |
| Publication date | Nov 7, 2023 |
| Grant date | Nov 7, 2023 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A purpose of the present invention is to provide a photosensitive resin composition which retains satisfactory image resolution and gives cured objects reduced in wet-heat dissolution or contamination and having satisfactory wet-heat adhesiveness. The photosensitive resin composition of the present invention comprises: (A) a cationic photopolymerization initiator which comprises a salt of a cation with an anion represented by formula (1) (wherein R 1 to R 4 each independently represent a C1 −18 alkyl or C 6-14 aryl group, provided that at least one of R 1 to R 4 represents a C 6-14 aryl group); and (B) an epoxy compound. R 1 to R 4 may be each independently either a phenyl group having one or more perfluoroalkyl groups as substituents or a phenyl group having one or more fluorine atoms as substituents. R 1 to R 4 may be each independently a pentafluorophenyl or bis(trifluoromethyl)phenyl group.
Opening claim text (preview).
The invention claimed is: 1. A photosensitive resin composition comprising a cationic photopolymerization initiator (A) and an epoxy compound (B), wherein: the cationic photopolymerization initiator (A) comprises a salt composed of an anion represented by a following formula (1) and a cation, wherein R 1 to R 4 each independently denotes an alkyl group having 1 to 18 carbon atom(s) or an aryl group having 6 to 14 carbon atoms, and at least one of R 1 to R 4 denotes the aryl group having 6 to 14 carbon atoms; and the epoxy resin (B) includes an epoxy compound (b-2) represented by a following formula (3), wherein R 6 each independently denotes an alkyl group having 2 to 4 carbon atom(s), or a trifluoromethyl group, R 7 denotes a hydrogen atom, and m is an average repetition number and denotes a real number in a range of from 1 to 30; and/or an epoxy compound (b-9) represented by a following formula (15), wherein R 13 each independently denotes a hydrogen atom or an alkyl group having 1 to 4 carbon atom(s), and s is an average repetition number and denotes a real number in a range of from 0 to 30; and the epoxy resin (B) optionally includes one or two or more kinds of epoxy compounds selected from a group consisting of: an epoxy compound (b-3) represented by a following formula (4), wherein R 8 each independently denotes a hydrogen atom or an alkyl group having 1 to 4 carbon atom(s), and n is an average repetition number and denotes a real number in a range of from 0 to 30; one or more kinds of epoxy compounds (b-4) selected from a group consisting of epoxy compounds represented by following formulae (5) to (7), wherein, in the formula (6), R 9 each independently denotes a hydrogen atom or a glycidyl group, and, in the formula (7), R 10 each independently denotes a hydrogen atom or a glycidyl group; an epoxy compound (b-5) that is a co-condensation product of a compound represented by following formula (8) and/or formula (9), and a compound represented by following formula (10) and/or formula (11); an epoxy compound (b-6) represented by a following formula (12) wherein R 12 each independently denotes an alkyl group having 2 to 4 carbon atom(s), and p is an average repetition number and denotes a real number in a range of from 0 to 10; an epoxy compound (b-7) represented by a following formula (13), wherein q is an average repetition number and denotes a real number in a range of from 0 to 5; and an epoxy compound (b-10) represented by a following formula (16), wherein t, u and v each is an average repetition number and denotes a real number satisfying a relation of 2≤t+u+v≤60. 2. The photosensitive resin composition according to claim 1 , wherein R 1 to R 4 each independently denotes a phenyl group having a perfluoroalkyl group as a substituent or a phenyl group having a fluorine atom as a substituent. 3. The photosensitive resin composition according to claim 2 , wherein R 1 to R 4 each independently denotes a pentafluorophenyl group or a bis(trifluoromethyl)phenyl group. 4. The photosensitive resin composition according to claim 1 , wherein the cationic photopolymerization initiator (A) comprises the salt composed of the anion represented by the formula (1) and the cation having an iodine atom or a sulfur atom. 5. A dry film resist comprising the photosensitive resin composition according to claim 1 between substrates. 6. A cured product of the photosensitive resin composition according to claim 1 . 7. The photosensitive resin composition according to claim 2 , wherein the cationic photopolymerization initiator (A) comprises the salt composed of the anion represented by the formula (1) and the cation having an iodine atom or a sulfur atom. 8. The photosensitive resin composition according to claim 3 , wherein the cationic photopolymerization initiator (A) comprises the salt composed of the anion represented by the formula (1) and the cation having an iodine atom or a sulfur atom. 9. A dry film resist comprising the photosensitive resin composition according to claim 2 between substrates. 10. A dry film resist comprising the photosensitive resin composition according to claim 3 between substrates. 11. A dry film resist comprising the photosensitive resin composition according to claim 4 between substrates. 12. A dry film resist comprising the photosensitive resin composition according to claim 7 between substrates. 13. A dry film resist comprising the photosensitive resin composition according to claim 8 between substrates. 14. A cured product of the photosensitive resin composition according to claim 2 . 15. A cured product of the photosensitive resin composition according to claim 3 . 16. A cured product of the photosensitive resin composition according to claim 4 . 17. A cured product of the photosensitive resin composition according to claim 7 . 18. A cured product of the photosensitive resin composition according to claim 8 . 19. A cured product of the dry film resist according to claim 5 . 20. A cured product of the dry film resist according to claim 9 . 21. A cured product of the dry film resist according to claim 10 . 22. A cured product of the dry film resist according to claim 11 . 23. A cured product of the dry film resist according to claim 12 . 24. A cured product of the dry film resist according to claim 13 . 25. A photosensitive resin composition comprising a cationic photopolymerization initiator (A) and an epoxy compound (B), wherein: the cationic photopolymerization initiator (A) comprises a salt composed of an anion represented by a following formula (1) and a cation, wherein R 1 to R 4 each independently denotes an alkyl group having 1 to 18 carbon atom(s) or an aryl group having 6 to 14 carbon atoms, and at least one of R 1 to R 4 denotes the aryl group having 6 to 14 carbon atoms; and the epoxy resin (B) includes an epoxy compound (b-9)
Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021) · CPC title
of metal (B32B15/01 takes precedence) · CPC title
comprising aluminium or copper {(B32B15/016 and B32B15/017 take precedence)} · CPC title
comprising glass as the main or only constituent of a layer, next to another layer of a specific {material} · CPC title
Layered products essentially comprising ceramics, e.g. refractory products · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.