X-ray analyzer and X-ray analysis method

Patent metadata

Field	Value
Publication number	US-11808718-B2
Application number	US-202117521404-A
Country	US
Kind code	B2
Filing date	Nov 8, 2021
Priority date	Mar 3, 2021
Publication date	Nov 7, 2023
Grant date	Nov 7, 2023

Abstract

An X-ray analyzer has a configuration including an X-ray source, an X-ray detector configured to detect an X-ray irradiated from the X-ray source, a rotary stage (stage) disposed between the X-ray source and the X-ray detector, and configured to hold an imaging target, and a light irradiation mechanism configured to irradiate light coaxially with an X-ray optical axis of the X-ray irradiated from the X-ray source to project a shadow of the imaging target onto a position of the X-ray detector.

First claim

What is claimed is:

1. An X-ray analyzer comprising:
an X-ray source;
an X-ray detector configured to detect an X-ray irradiated from the X-ray source;
a stage disposed between the X-ray source and the X-ray detector, and configured to hold an imaging target; and
a visible light irradiation mechanism configured to irradiate visible light coaxially with an X-ray optical axis of the X-ray irradiated from the X-ray source to project a shadow image of the imaging target onto a position of the X-ray detector.

2. The X-ray analyzer according to claim 1 , wherein the shadow image of the imaging target projected by the light irradiated from the light irradiation mechanism indicates an area constituted by an X-ray transmission image of the imaging target formed by the X-ray irradiated from the X-ray source.

3. The X-ray analyzer according to claim 1 , wherein the light irradiation mechanism includes: a light source configured to irradiate visible light; and a reflection plate configured to reflect the light irradiated from the light source coaxially with the X-ray optical axis to irradiate the imaging target with the light.

4. The X-ray analyzer according to claim 3 , wherein a marker member is disposed between the reflection plate and the imaging target.

5. The X-ray analyzer according to claim 1 , wherein the X-ray analyzer is an X-ray CT apparatus.

6. An X-ray analysis method comprising:
irradiating an imaging target held on a stage with an X-ray from an X-ray source;
detecting the X-ray transmitted through the imaging target on an X-ray detector to analyze the imaging target; and
irradiating light from a light irradiation mechanism coaxially with an X-ray optical axis of the X-ray irradiated from the X-ray source to project a shadow image of the imaging target onto a position of the X-ray detector so as to visually confirm from the shadow image of the imaging target whether the imaging target is included in an imaging visual field range formed by the X-ray.

7. The X-ray analyzer according to claim 1 , comprising a marker member, including an outer marker and a cross-shaped inner marker inside the outer marker, disposed between the light irradiation source and the imaging target and configured to project a shadow image of the marker member on the X-ray detector.

8. The X-ray analyzer according to claim 1 , wherein the light source is installed at a position where the size of a shadow of the imaging target to be formed and the X-ray transmission image of the imaging target to be formed by the X-ray irradiated from the X-ray source to the imaging target become the same size.

Assignees

• Shimadzu Corp

Inventors

• Harada Daisuke
• Keyaki Yasuyuki

Classifications

• G01N23/046 Primary

  using tomography, e.g. computed tomography [CT] · CPC title