3d-printed polishing pad for chemical-mechanical planarization (cmp)
US-2016354896-A1 · Dec 8, 2016 · US
US11806929B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11806929-B2 |
| Application number | US-202218091816-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 30, 2022 |
| Priority date | Mar 31, 2015 |
| Publication date | Nov 7, 2023 |
| Grant date | Nov 7, 2023 |
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A method of three-dimensional (3D) printing includes applying a solution to a channel. The solution includes a plurality of anisotropic particles suspending in the solution. Acoustic waves are applied to the channel. The frequency of the acoustic waves is configured to organize the plurality of anisotropic particles into one or more columns of organized anisotropic particles. The channel is connected to a printhead and a waste outlet. The solution comprising the one or more columns of organized anisotropic particles is deposited on a substrate via the printhead outlet.
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The invention claimed is: 1. A three-dimensional (3D) printing method, the method comprising: applying a solution having a plurality of anisotropic particles suspended in the solution to a channel, wherein the channel is connected to a printhead outlet and a waste outlet; applying acoustic waves to the channel, wherein a frequency of the acoustic waves is selected to organize the plurality of anisotropic particles into one or more columns of organized anisotropic particles; and depositing the solution comprising the one or more columns of the organized anisotropic particles onto a substrate via the printhead outlet. 2. The method of claim 1 , further including: providing a 3D printer, comprising: an acoustophoresis device, wherein the channel is disposed within the acoustophoresis device, and a printhead connected to the channel of the acoustophoresis device, the printhead including the printhead outlet. 3. The method of claim 2 , wherein the 3D printer further comprises a first piezoelectric device adhered to a surface of the acoustophoresis device, wherein the first piezoelectric device applies first acoustic waves to the channel. 4. The method of claim 3 , wherein the 3D printer further comprises a second piezoelectric device adhered to the surface of the acoustophoresis device, wherein the second piezoelectric device applies second acoustic waves to the channel, the first acoustic waves having a different frequency than the second acoustic waves. 5. The method of claim 4 , wherein applying the acoustic waves to the channel includes applying the first acoustic waves to extract a high concentration of anisotropic particles from the solution and applying the second acoustic waves to order the extracted anisotropic particles into a desired configuration. 6. The method of claim 1 , wherein the acoustic waves are configured to orient the anisotropic particles along a long axis of the anisotropic particles in a direction of flow of the solution. 7. The method of claim 1 , wherein the solution provided to the waste outlet has a lower concentration of anisotropic particles than the solution provided to the printhead outlet. 8. The method of claim 1 , wherein the one or more columns of the organized anisotropic particles are aligned with the printhead outlet. 9. The method of claim 1 , wherein the plurality of anisotropic particles are rod-shaped, defined by a length and a diameter, wherein the length is greater than the diameter. 10. The method of claim 1 , wherein the plurality of anisotropic particles are bow-tie shaped, defined by a width, a height, and a length, wherein the height is greater than the length and wherein the length is greater than the width. 11. The method of claim 1 , wherein the plurality of anisotropic particles are rectangular, defined by a width, a height, and a length, wherein the height is greater than the length and wherein the length is greater than the width. 12. The method of claim 1 , wherein an output of the channel is bifurcated such that the anisotropic particles organized into the one or more columns of the organized anisotropic particles located in a center of the channel are directed to a first outlet and particles located outside of the center of the channel are directed to a second outlet. 13. The method of claim 1 , further including: photocuring the one or more columns of the organized anisotropic particles to preserve ordering and orientation of the one or more columns of the organized anisotropic particles prior to the one or more columns of the organized anisotropic particles reaching the printhead outlet. 14. The method of claim 1 , further including: thermally curing the one or more columns of the organized anisotropic particles to preserve ordering and orientation of the one or more columns of the organized anisotropic particles prior to the one or more columns of the organized anisotropic particles reaching the printhead outlet. 15. A three-dimensional (3D) printing method, the method comprising: providing a 3D printer, the 3D printer including: an acoustophoresis device having a first inlet, a first outlet, and a channel defined between the first inlet and the first outlet, a first piezoelectric device adhered to a surface of the acoustophoresis device, and a printhead connected to the first outlet of the acoustophoresis device; delivering a solution to the first inlet, the solution comprising anisotropic particles; generating first acoustic waves with the first piezoelectric device; organizing the anisotropic particles into one or more columns with the first acoustic waves; and delivering the one or more columns of the anisotropic particles to the printhead. 16. The method of claim 15 , wherein the acoustophoresis device further includes a waste outlet. 17. The method of claim 16 , wherein organizing the anisotropic particles into the one or more columns with the first acoustic waves includes removing an excess solution to the waste outlet. 18. The method of claim 15 , wherein the acoustophoresis device further includes a second piezoelectric device adhered to the surface of the acoustophoresis device, wherein the second piezoelectric device is configured to generate second acoustic waves having a different frequency from the first acoustic waves. 19. The method of claim 18 further including: applying the first acoustic waves to a first stage of the acoustophoresis device; and applying the second acoustic waves to a second stage of the acoustophoresis device. 20. The method of claim 15 , further including: depositing the solution comprising ordered anisotropic particles onto a substrate via the first outlet.
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Auxiliary operations or equipment, e.g. for material handling · CPC title
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