Wireless self-powered gas sensor based on electromagnetic oscillations triggered by external forces and fabrication method thereof

Patent metadata

Field	Value
Publication number	US-11802859-B2
Application number	US-202017120239-A
Country	US
Kind code	B2
Filing date	Dec 13, 2020
Priority date	Dec 12, 2019
Publication date	Oct 31, 2023
Grant date	Oct 31, 2023

Abstract

The disclosure relates to a wireless self-powered gas sensor based on electromagnetic oscillations triggered by external forces and its fabrication method. The sensor includes a gas test chamber, a first friction layer, a second friction layer, an interdigital electrode, a gas-sensitive material, an air inlet, an air outlet and leads. The gas sensor of the disclosure is an integrated detection system of “environmental energy collection—wireless energy transmission—active spontaneous detection” that can be driven simultaneously only by external mechanical movement, and can work independently without external power supply. The first friction layer and the second friction layer are arranged outside the gas test chamber. The frictional motion will not interfere with the flow field of the test chamber and the gas molecule absorption and desorption, which ensures the stability of gas detection to the greatest extent.

First claim

What is claimed is:

1. A device, comprising:
an energy harvesting component; and
a gas sensing component;

wherein
the gas sensing component comprises a gas test chamber, an interdigital electrode comprising gaps, and an acrylic substrate; the gas test chamber comprises an air inlet on one side and an air outlet on the other side; the interdigital electrode is disposed on the acrylic substrate and the acrylic substrate is disposed on a bottom of the gas test chamber; the gaps between the adjacent interdigital electrode are filled with a gas-sensitive material; two ends of the interdigital electrode are respectively connected to a first lead wire and a second lead wire; and
the energy harvesting component comprises a first friction layer and a second friction layer; the second friction layer is disposed above the first friction layer and aligned with an outer surface of the gas test chamber; the first friction layer and the second friction layer have the same cross-sectional area as the gas test chamber; the first friction layer is a grating structure and comprises a negative friction material; the second friction layer comprises a positive friction material; and the grating structure is parallel to, and has identical characteristic parameters as, the electrode of interdigital electrodes.

2. The device of claim 1 , wherein the solid part of the grating structure in the first friction layer has the same width as the interdigital electrode.

3. The device of claim 1 , wherein the grating structure in the first friction layer is parallel to the electrode in the interdigital electrode and the following characteristic parameters are identical for these two configurations; the length of the grating structure is A, the width of the whole grating structure is B, the width of the transmittance part of the grating structure is C in the longitudinal direction, the width of the solid part of the grating structure is D in the transverse direction, with a duty ratio of 0 . 5 ; the length of the entire interdigital electrode is E, the width of the entire interdigital electrode is F, the longest distance between the two adjacent interdigital electrodes is G in the direction of the width of the interdigital electrode, and the crosswise width of each comb electrode in the fork finger electrode is H. A=E, B=F, C=G, D=H.

4. The device of claim 1 , wherein the gas-sensitive material is an organic polymer, or a metal oxide, or an inorganic material that is sensitive to the target gas.

5. The device of claim 1 , wherein the gas-sensitive material is composed of one or more materials selected from polyaniline, polyvinyl oxide, polyimide, sodium polystyrene sulfonate, polyimide, chitosan, and graphene oxide.

6. The device of claim 1 , wherein the first friction layer is a first polymer film, and the second friction layer is a second polymer film; and the first polymer film has a stronger electron affinity than the second polymer film and thus the ability to attract electrons from the second polymer film.

7. The device of claim 1 , wherein the first friction layer is selected from teflon, polyfluoroethylene, polyvinyl chloride or polyimide with a thickness of 10-50 μm; and the second friction layer is made of nylon, polyurethane or magnesium fluoride and has a thickness of 10-50 μm.

8. A method for preparation of the device of claim 1 , the method comprising:
1) cleaning and drying two pieces of polymer films;
2) cutting a first polymer film into grating structure by laser as a first polymer film; cutting a second piece into a rectangular structure as a second polymer film; wherein the first polymer film and the second polymer film are utilized together as triboelectric materials; and an electron affinity of the first polymer film is stronger than that of the second polymer film;
3) preparing the interdigital electrode through spin coating, spray coating, drop coating, sol gel, self-assembly or chemical vapor deposition; developing a gas-sensitive structure by depositing the gas-sensitive material between adjacent electrodes of the interdigital electrode in combination with a lift-off process;
4) using a laser cutting machine to cut a plexiglass plate and assembling the gas test chamber; attaching the second polymer film to the outer surface of a top of the gas test chamber as the second friction layer; placing the first polymer film above the second polymer film as the first friction layer, wherein both sides of the gas test chamber are integrated air inlet and air outlet; and placing the gas-sensitive structure at the bottom of the gas test chamber to form a self-driven gas sensor; and
5) connecting the two ends of the interdigital electrode to a test port of a current measuring instrument through a lead.

Assignees

• Univ Electronic Sci & Tech China

Inventors

• Su yuanjie
• Gong Qichen
• Chen Yanmeng
• Xie Guangzhong
• Tai Huiling
• Du Xiaosong
• Jiang Yadong

Classifications

• G01N33/0059 Primary

  Avoiding interference of a gas with the gas to be measured · CPC title

• G01N27/12

  of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid {, for detecting components in the fluid} · CPC title

• G01N27/122

  Circuits particularly adapted therefor, e.g. linearising circuits · CPC title

• G01N27/125

  Composition of the body, e.g. the composition of its sensitive layer · CPC title

• G01N33/0027

  concerning the detector · CPC title