Apparatus for fluidized-bed chemical vapour deposition

Patent metadata

Field	Value
Publication number	US-11802336-B2
Application number	US-202118003444-A
Country	US
Kind code	B2
Filing date	Jun 21, 2021
Priority date	Jul 1, 2020
Publication date	Oct 31, 2023
Grant date	Oct 31, 2023

Abstract

The present disclosure relates to an apparatus for fluidised-bed chemical vapour deposition from a gaseous phase allowing the temperature of the fluidised bed to be stabilised during the deposition and also to an associated method for its implementation, the apparatus being characterised in that it comprises a porous thermal insulator present in an inlet zone and configured to be passed through by the gaseous phase, said porous thermal insulator having an effective thermal conductivity at 20° C. less than or equal to 3.5 W·m-1·K-1.

First claim

The invention claimed is:

1. An apparatus for fluidised-bed chemical vapour deposition, comprising at least:
a reactor comprising a treatment zone in which the fluidised-bed chemical vapour deposition is intended to be carried out from a gaseous phase, an inlet zone through which the gaseous phase is intended to be introduced into the treatment zone and an outlet zone through which the gaseous phase is intended to be removed from the treatment zone,
a heating system configured to heat the treatment zone, and
a cooling system configured to cool the inlet zone,
wherein the apparatus further comprises a porous thermal insulator present in the inlet zone and configured to be passed through by the gaseous phase, said porous thermal insulator having an effective thermal conductivity at 20° C. less than or equal to 3.5 W·m −1 ·K −1 , a porosity of the thermal insulator having a tortuous shape.

2. The apparatus according to claim 1 , wherein the porous thermal insulator has an effective thermal conductivity at 20° C. less than or equal to 0.42 W·m −1 ·K −1 .

3. The apparatus according to claim 1 , wherein the material forming the porous thermal insulator has a thermal conductivity at 20° C. less than or equal to 40 W·m −1 ·K −1 .

4. The apparatus according to claim 1 , wherein the porous thermal insulator is a granular bed.

5. The apparatus according to claim 1 , wherein the volume pore ratio of the porous thermal insulator is greater than 26%.

6. A method for coating particles using an apparatus according to claim 1 , comprising at least:
introducing the gaseous phase into the treatment zone through the inlet zone and the porous thermal insulator,
depositing a coating on the particles present in the fluidised-bed chemical vapour deposition treatment zone from the gaseous phase introduced, and
recovering, after depositing of the coating, the coated particles.

7. The method according to claim 6 , wherein the gaseous phase has a thermal conductivity at 20° C. less than or equal to 0.04 W·m −1 ·K −1 .

8. The method according to claim 6 , wherein the porous thermal insulator is a granular bed; and
after the deposition of the coating, a mixture of coated particles and grains from the granular bed are recovered, and in which the coated particles are separated from said grains.

9. An apparatus for fluidised-bed chemical vapour deposition, comprising at least:
a reactor comprising a treatment zone in which the fluidised-bed chemical vapour deposition is intended to be carried out from a gaseous phase, an inlet zone through which the gaseous phase is intended to be introduced into the treatment zone and an outlet zone through which the gaseous phase is intended to be removed from the treatment zone,
a heating system configured to heat the treatment zone, and
a cooling system configured to cool the inlet zone,
wherein the apparatus further comprises a porous thermal insulator present in the inlet zone and configured to be passed through by the gaseous phase, said porous thermal insulator having an effective thermal conductivity at 20° C. less than or equal to 3.5 W·m −1 ·K −1 , wherein the porous thermal insulator is a granular bed.

Assignees

• Safran Ceram
• Centre Nat Rech Scient
• Univ Bordeaux

Inventors

• El Mansouri Amine
• Bertrand Nathalie Dominique
• Couthures Sébastien
• Guette Alain Jean-Michel

Classifications

• C23C16/442 Primary

  using fluidised bed process · CPC title

• C23C16/26

  Deposition of carbon only · CPC title

• C23C16/4411

  Cooling of the reaction chamber walls (C23C16/45572 takes precedence) · CPC title

• C23C16/4417

  Methods specially adapted for coating powder · CPC title

• C23C16/46

  characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) · CPC title