Resist composition and resist pattern forming method
US-2018224742-A1 · Aug 9, 2018 · US
US11795256B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11795256-B2 |
| Application number | US-202118003424-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 23, 2021 |
| Priority date | Jun 29, 2020 |
| Publication date | Oct 24, 2023 |
| Grant date | Oct 24, 2023 |
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A production method for a cyclic olefin copolymer which is capable of efficiently producing a cyclic olefin copolymer by copolymerizing monomers including a norbornene monomer and ethylene while suppressing the formation of a polyethylene-like impurity, and a catalyst composition for the copolymerization of a norbornene monomer and ethylene. Monomers including a norbornene monomer and ethylene are polymerized in the presence of a metal-containing catalyst, and the metal-containing catalyst has a structure in which a nitrogen atom is bonded to a transition metal of Group 4 of the periodic table and an atom of Group 15 of the periodic table.
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The invention claimed is: 1. A method for producing a cyclic olefin copolymer comprising a structural unit derived from a norbornene monomer and a structural unit derived from ethylene, the method comprising: charging at least the norbornene monomer and the ethylene as monomers into a polymerization vessel, and polymerizing the monomers in the polymerization vessel in presence of a metal-containing catalyst, the metal-containing catalyst having a structure in which a nitrogen atom is bonded to a transition metal of Group 4 of periodic table and an atom of Group 15 of periodic table, wherein the metal-containing catalyst is a metal-containing compound represented by formula (a1): wherein in the formula (a1), M represents Ti, Zr or Hf, X represents an organic substituent having 1 to 20 carbon atoms and optionally containing a heteroatom, or a halogen atom, L 1 represents a group represented by formula (ala) or (a1b): wherein in the formula (a1a), R a1 to R a5 are identical to or different from one another, and each independently represent a hydrogen atom, an organic substituent having 1 to 20 carbon atoms and optionally containing a heteroatom, or an inorganic substituent, two groups adjacent on the 5-membered ring of R a1 to R a5 are optionally bonded to each other to form a ring, wherein in the formula (a1b), R a6 to R a8 are identical to or different from one another, and each independently represent a hydrogen atom, an organic substituent having 1 to 20 carbon atoms and optionally containing a heteroatom, or an inorganic substituent, two groups selected from R a6 to R a8 are optionally bonded to each other to form a ring, wherein the organic substituent as R a6 to R a8 in the formula (a1b) is a group selected from an alkyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, an aliphatic acyl group having 2 to 20 carbon atoms, a benzoyl group, an α-naphthylcarbonyl group, a β-naphthylcarbonyl group, an aromatic hydrocarbon group having 6 to 20 carbon atoms, an aralkyl group having 7 to 20 carbon atoms, a trialkylsilyl group having 3 to 20 carbon atoms, a monosubstituted amino group substituted with a hydrocarbon group having 1 to 20 carbon atoms, and a disubstituted amino group substituted with a hydrocarbon group having 1 to 20 carbon atoms, and L 2 represents the group represented by the formula (a1b)), and wherein the norbornene monomer is one or more selected from a norbornene and a substituted norbornene represented by formula (I): wherein in the formula (I), R 1 to R 8 are identical to or different from one another, and are selected from the group consisting of a hydrogen atom, a halogen atom, and an alkyl group having 1 to 20 carbon atoms, R 9 to R 12 are identical to or different from one another, and are selected from the group consisting of a hydrogen atom, a halogen atom, an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group, an unsubstituted aromatic hydrocarbon group, and an aralkyl group, R 9 and R 10 or R 11 and R 12 are not taken together to form a divalent hydrocarbon group, R 9 or R 10 and R 11 or R 12 optionally form a ring with each other, the ring that R 9 or R 10 and R 11 or R 12 form is not a ring having a double bond, n represents 0 or a positive integer, when n is two or more, R 5 to R 8 are identical to or different from each other in the respective repeating units, and when n is 0, at least one of R 1 to R 4 and R 9 to R 12 is not a hydrogen atom. 2. The method for producing a cyclic olefin copolymer according to claim 1 , wherein the atom of Group 15 of the periodic table is a phosphorus atom. 3. The method for producing a cyclic olefin copolymer according to claim 1 , wherein the transition metal of Group 4 of the periodic table is Ti. 4. The method for producing a cyclic olefin copolymer according to claim 1 , wherein the polymerizing of the monomers is performed in the presence of the metal-containing catalyst and a co-catalyst. 5. The method for producing a cyclic olefin copolymer according to claim 4 , wherein the co-catalyst comprises at least one of an aluminoxane and a borate compound. 6. The method for producing a cyclic olefin copolymer according to claim 1 , wherein the polymerizing of the monomers is performed in the presence of a hydrocarbon solvent. 7. The method for producing a cyclic olefin copolymer according to claim 1 , wherein a DSC curve obtained in measurement of a sample of the cyclic olefin copolymer according to a method defined in JIS K7 121 using a differential scanning calorimeter in a nitrogen atmosphere under a condition of a rate of temperature increase of 20° C./min shows no peak of a melting point assigned to a polyethylene-like impurity in a range of 100° C. to 140° C.
having one carbon-to-carbon double bond · CPC title
Organic solvent · CPC title
an alkali metal bound to oxygen · CPC title
Inorganic compounds · CPC title
selected from titanium, zirconium, hafnium, vanadium, niobium or tantalum · CPC title
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