Bi-polar border region in piezoelectric device

Patent metadata

Field	Value
Publication number	US-11784628-B2
Application number	US-202217933958-A
Country	US
Kind code	B2
Filing date	Sep 21, 2022
Priority date	Dec 14, 2018
Publication date	Oct 10, 2023
Grant date	Oct 10, 2023

Abstract

An acoustic device includes a foundation structure and a transducer provided over the foundation structure. The foundation structure includes a piezoelectric layer between a top electrode and a bottom electrode. The piezoelectric layer has an active portion within an active region of the transducer, and a bi-polar border portion within a border region of the transducer. The piezoelectric material in the active portion has a first polarization. The bi-polar border portion has a first sub-portion and a second sub-portion, which resides either above or below the first sub-portion. The piezoelectric material in the first sub-portion has the first polarization, and the piezoelectric material in the second sub-portion has a second polarization, which is opposite the first polarization.

First claim

What is claimed is:

1. A piezoelectric device comprising:
a foundation structure; and
a transducer over the foundation structure and comprising:
a bottom electrode;
a piezoelectric layer over the bottom electrode and comprising a piezoelectric material; and
a top electrode over the piezoelectric layer, wherein:
the piezoelectric layer has an active portion within an active region of the transducer, and a bi-polar border portion within a border region of the transducer;
the piezoelectric material in the active portion has a first polarization;
the bi-polar border portion comprises a first sub-portion and a second sub-portion that is either over or under the first sub-portion;
the piezoelectric material in the first sub-portion has the first polarization, and the piezoelectric material in the second sub-portion has a second polarization, which is opposite the first polarization; and
an outer portion of the piezoelectric layer has only one of the first polarization and the second polarization.

2. The piezoelectric device of claim 1 further comprising a first inversion layer between the first sub-portion and the second sub-portion.

3. The piezoelectric device of claim 2 wherein the first inversion layer provides mass loading within the border region.

4. The piezoelectric device of claim 3 further comprising a border ring within the border region and over the piezoelectric layer wherein the border ring provides mass loading.

5. The piezoelectric device of claim 1 further comprising a border ring within the border region and over the piezoelectric layer wherein the border ring provides mass loading.

6. The piezoelectric device of claim 1 wherein the piezoelectric material is formed from a compound comprising a metal element and a non-metal element.

7. The piezoelectric device of claim 6 wherein the metal element is a group III element and the non-metal element is a group V element.

8. The piezoelectric device of claim 1 wherein the piezoelectric material comprises aluminum nitride (AlN) doped with a transition metal comprising at least one of scandium, erbium, magnesium, and hafnium.

9. The piezoelectric device of claim 1 wherein the outer portion is within an outside region such that the border region is between the outside region and the active region.

10. The piezoelectric device of claim 1 wherein the piezoelectric material in the outer portion has the first polarization.

11. The piezoelectric device of claim 1 wherein the foundation structure comprises a substrate and a reflector, which comprises a plurality of reflector layers, over the substrate, such that the device is a solidly mounted resonator-based bulk acoustic wave resonator.

12. The piezoelectric device of claim 1 wherein the foundation structure comprises a substrate that provides an air gap below the transducer, such that the device is a film bulk acoustic resonator (FBAR).

13. The piezoelectric device of claim 1 wherein the bi-polar border portion comprises at least two additional sub-portions either over or under the first sub-portion and the second sub-portion, the at least two additional sub-portions alternating between the first polarization and the second polarization.

14. The piezoelectric device of claim 1 wherein a ratio of a thickness of the first sub-portion to a thickness of the second sub-portion is between 0.7:1.0 and 1.3:1.0.

15. A method for forming a piezoelectric device comprising:
providing a foundation structure;
forming a bottom electrode over the foundation structure;
forming a lower portion of a piezoelectric layer over the bottom electrode and through an outside region, a border region, and an active region, wherein the active region is inside of the border region and the border region is inside of the outside region;
within the border region, forming an inversion layer over the lower portion of the piezoelectric layer;
forming an upper portion of the piezoelectric layer over the inversion layer and through the outside region, the border region, and the active region, wherein:
the lower portion of the piezoelectric layer below the inversion layer and within the border region has a first polarization;
the upper portion of the piezoelectric layer over the inversion layer and within the border region has a second polarization, which is opposite that of the first polarization; and
an outer portion of the piezoelectric layer in the outside region has only one of the first polarization and the second polarization; and

forming a top electrode over the upper portion of the piezoelectric layer.

16. The method of claim 15 wherein the active region and the outer portion of the piezoelectric layer have the first polarization.

17. The method of claim 15 wherein the piezoelectric device is a solidly mounted resonator-based bulk acoustic wave resonator or a film bulk acoustic resonator (FBAR).

18. A wireless device comprising,
one or more piezoelectric devices, wherein at least one or more piezoelectric devices comprises:
a foundation structure; and
a transducer over the foundation structure and comprising:
a bottom electrode;
a piezoelectric layer over the bottom electrode and comprising a piezoelectric material; and
a top electrode over the piezoelectric layer, wherein:
the piezoelectric layer has an active portion within an active region of the transducer, and a bi-polar border portion within a border region of the transducer;
the piezoelectric material in the active portion has a first polarization such that the active region is unipolar;
the bi-polar border portion comprises a first sub-portion and a second sub-portion that is either over or under the first sub-portion; and
the piezoelectric material in the first sub-portion has the first polarization, and the piezoelectric material in the second sub-portion has a second polarization, which is opposite the first polarization.

19. The wireless device of claim 18 wherein an outer portion of the piezoelectric layer has only one of the first polarization and the second polarization, and the outer portion is within an outside region such that the border region is between the outside region and the active region.

20. The wireless device of claim 18 wherein the at least one piezoelectric device is a solidly mounted resonator-based bulk acoustic wave resonator or a film bulk acoustic resonator (FBAR).

Assignees

• Qorvo Us Inc

Inventors

• Sadhu Jyothi Swaroop
• Rothemund Ralph
• Tajic Alireza

Classifications

• H10N30/063

  Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts · CPC title

• H10N30/072

  by laminating or bonding of piezoelectric or electrostrictive bodies · CPC title

• H10N30/704

  based on piezoelectric or electrostrictive films or coatings · CPC title

• H03H9/17 Primary

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• H03H7/0161

  Bandpass filters (H03H7/12 takes precedence) · CPC title