Vibration device

Patent metadata

Field	Value
Publication number	US-11782265-B2
Application number	US-202117376203-A
Country	US
Kind code	B2
Filing date	Jul 15, 2021
Priority date	Apr 27, 2020
Publication date	Oct 10, 2023
Grant date	Oct 10, 2023

Abstract

A vibration device includes a cylindrical body including a cavity, a first opening end surface, and a second opening end surface, a light-transmissive cover directly or indirectly bonded to the first opening end surface of the cylindrical body so as to cover the cavity of the cylindrical body, a piezoelectric body directly or indirectly bonded to the cylindrical body, and a buffer layer provided between at least one of the cylindrical body and the piezoelectric body, and the cylindrical body and the light-transmissive cover. The buffer layer includes an inner end portion on an inner side portion in a direction orthogonal or substantially orthogonal to the axial direction and an outer end portion on an outer side portion in a direction orthogonal or substantially orthogonal to the axial direction. A thickness of the inner end portion is larger than a thickness of the outer end portion.

First claim

What is claimed is:

1. A vibration device comprising:
a cylindrical body including a cavity, a first opening end surface, and a second opening end surface;
a light-transmissive cover directly or indirectly bonded to the first opening end surface of the cylindrical body so as to cover the cavity of the cylindrical body;
a piezoelectric body directly or indirectly bonded to the cylindrical body; and
a buffer layer between at least one of the cylindrical body and the piezoelectric body, and the cylindrical body and the light-transmissive cover; wherein
when a direction connecting the first opening end surface and the second opening end surface of the cylindrical body is defined as an axial direction, the buffer layer includes an inner end portion on an inner side portion in a direction orthogonal or substantially orthogonal to the axial direction and an outer end portion on an outer side portion in a direction orthogonal to the axial direction; and
a thickness of the inner end portion is larger than a thickness of the outer end portion.

2. The vibration device according to claim 1 , wherein the buffer layer has an annular shape.

3. The vibration device according to claim 1 , wherein the buffer layer has a largest thickness at the inner end portion.

4. The vibration device according to claim 1 , wherein the buffer layer includes a portion in which a thickness of the buffer layer increases as the buffer layer extends toward the inner end portion side.

5. The vibration device according to claim 1 , wherein the buffer layer and the cylindrical body are integrated with each other.

6. The vibration device according to claim 1 , wherein
the buffer layer includes a first surface and a second surface;
the first surface is bonded to the cylindrical body;
the second surface includes a portion facing the first surface; and
an arithmetic mean roughness of the second surface is equal to or more than about 0.8 μm and equal to or less than about 6.3 μm.

7. The vibration device according to claim 1 , wherein the cylindrical body is made of metal.

8. The vibration device according to claim 1 , wherein the light-transmissive cover has a disk shape.

9. The vibration device according to claim 1 , wherein the light-transmissive cover is made of light-transmitting plastic, quartz, or glass.

10. The vibration device according to claim 1 , wherein the buffer layer has an annular shape.

11. An imaging device comprising:
the vibration device according to claim 1 ; and
an imaging element in an internal space of the vibration device.

12. The imaging device according to claim 11 , wherein the buffer layer has an annular shape.

13. The imaging device according to claim 11 , wherein the buffer layer has a largest thickness at the inner end portion.

14. The imaging device according to claim 11 , wherein the buffer layer includes a portion in which a thickness of the buffer layer increases as the buffer layer extends toward the inner end portion side.

15. The imaging device according to claim 11 , wherein the buffer layer and the cylindrical body are integrated with each other.

16. The imaging device according to claim 11 , wherein
the buffer layer includes a first surface and a second surface;
the first surface is bonded to the cylindrical body;
the second surface includes a portion facing the first surface; and
an arithmetic mean roughness of the second surface is equal to or more than about 0.8 μm and equal to or less than about 6.3 μm.

17. The imaging device according to claim 11 , wherein the cylindrical body is made of metal.

18. The imaging device according to claim 11 , wherein the light-transmissive cover has a disk shape.

19. The imaging device according to claim 11 , wherein the light-transmissive cover is made of light-transmitting plastic, quartz, or glass.

20. The imaging device according to claim 11 , wherein the buffer layer has an annular shape.

Assignees

• Murata Manufacturing Co

Inventors

• Kitamori Nobumasa

Classifications

• G02B27/0006 Primary

  with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title

• B06B1/0655 Primary

  of cylindrical shape · CPC title

• H04N23/52

  Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements · CPC title

• B06B2201/77

  Atomizers · CPC title

• B06B1/06 Primary

  operating with piezoelectric effect or with electrostriction (piezoelectric or electrostrictive devices per se H10N30/00) · CPC title