Halogen free syntheses of aminosilanes by catalytic dehydrogenative coupling

Patent metadata

Field	Value
Publication number	US-11780859-B2
Application number	US-202217665282-A
Country	US
Kind code	B2
Filing date	Feb 4, 2022
Priority date	Sep 27, 2013
Publication date	Oct 10, 2023
Grant date	Oct 10, 2023

Abstract

Compounds and method of preparation of Si—X and Ge—X compounds (X═N, P, As and Sb) via dehydrogenative coupling between the corresponding unsubstituted silanes and amines (including ammonia) or phosphines catalyzed by metallic catalysts is described. This new approach is based on the catalytic dehydrogenative coupling of a Si—H and a X—H moiety to form a Si—X containing compound and hydrogen gas (X═N, P, As and Sb). The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The —Si—X products produced by dehydrogenative coupling are inherently halogen free. Said compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si-containing films.

First claim

We claim:

1. A method for the synthesis of diisopropylaminodisilane comprising the steps of:
a) contacting diisopropylamine and disilane in the presence of a transition metal catalyst forming a reaction mixture;
b) maintaining the reaction mixture at a temperature between about 0° C. to about 300° C.;
c) allowing the reaction to proceed to form diisopropylaminodisilane; and
d) separating the diisopropylaminodisilane from the reaction mixture.

2. The method of claim 1 , further comprising a step of adding a solvent to the reaction mixture.

3. The method of claim 1 , wherein the transition metal catalyst is selected from the group consisting of Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Y, Zr, Nb, Mo, Tc, Ru, Rh, Pd, Ag, Cd, La, Hf, Ta, W, Re, Os, Ir, Pt, Au, Hg, Yb, U, and combinations thereof.

4. The method of claim 3 , wherein the transition metal catalyst is selected from the group consisting of Ru, Pd, Rh, Ir, Fe, Ni, Pt, Cr, Cu, Au, and combinations thereof.

5. The method of claim 4 , wherein the transition metal catalyst is selected from the group consisting of Rh, Pd, Ru, Pt, and combinations thereof.

6. The method of claim 5 , wherein the transition metal catalyst comprises Ru, Pd, Ru on a carbon support, or Pd on a MgO support.

7. The method of claim 1 , wherein the transition metal catalyst is affixed to a support comprising alumina, MgO, zeolites, carbon, Monolith cordierite, diatomaceous earth, silica gel, silica/alumina, ZrO and/or TiO2.

8. The method of claim 1 , further comprising a step of adding a catalyst promoter to the reaction.

9. The method of claim 2 , wherein the solvent comprises a solvent component selected from the group consisting of C5 to C20 linear, branched or cyclic alkanes; alkenes; chloroalkanes; arenes; heterocycles; and mixtures thereof.

10. The method of claim 2 , wherein the solvent comprises n-octadecane.

Assignees

• Air Liquide

Inventors

• Sanchez Antonio
• Itov Gennadiy
• Zhang Peng
• Stephens Matthew
• Khandelwal Manish

Classifications

• H10P14/6687

  the compound comprising silicon and nitrogen · CPC title

• H10P14/20

  of semiconductor materials · CPC title

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/6681

  the precursor containing a compound comprising Si · CPC title

• C07F7/025 Primary

  without C-silicon linkages · CPC title