Particle removing assembly and method of servicing assembly

Patent metadata

Field	Value
Publication number	US-11779967-B2
Application number	US-202017132940-A
Country	US
Kind code	B2
Filing date	Dec 23, 2020
Priority date	Feb 27, 2020
Publication date	Oct 10, 2023
Grant date	Oct 10, 2023

Abstract

An apparatus includes a wafer stage and a particle removing assembly. The wafer stage includes a cup adjacent to a wafer chuck. The particle removing assembly is configured to remove contaminant particles from the cup. In some embodiments, the particle removing assembly comprises a flexible ejecting member that includes one or more elongated tubes, a front tip, and a cleaning tip adapter configured to attach the front tip to each of the one or more elongated tubes. The front tip includes front openings and lateral openings from which pressurized cleaning material are introduced onto an unreachable area of the cup to remove the contaminant particles from the cup.

First claim

What is claimed is:

1. A method of cleaning a cup in a wet process apparatus, the method comprising:
providing a wet process apparatus comprises:
a cup adjacent to a wafer chuck within a chamber; and
a particle removing assembly configured to remove contaminant material from the cup; wherein the particle removing assembly comprises:
a nozzle configured to eject pressurized cleaning material onto a dummy wafer, wherein the pressurized cleaning material is reflected off the dummy wafer to an unreachable area introduced by a curvature of the cup by rotating force; and
a drying nozzle;

ejecting the pressurized cleaning material through the nozzle of the particle removing assembly;
rinsing the unreachable area of the cup with the ejected pressurized cleaning material; and
drying, by the drying nozzle, the unreachable area of the cup.

2. The method of claim 1 , further including:
monitoring the contaminant material at the unreachable area of the cup.

3. The method of claim 1 , further including:
adjusting a configurable parameter of the particle removing assembly.

4. The method of claim 1 , wherein the pressurized cleaning material is at least one of de-ionized water (DIW) and an organic solvent.

5. The method of claim 1 , wherein the wafer chuck holds and rotates the dummy wafer at a predetermined rotational speed.

6. The method of claim 1 , wherein the drying nozzle is an adjustable pattern nozzle.

7. The method of claim 6 , wherein the adjustable pattern nozzle rotates at a constant spin speed between 900 round-per-minute (rpm) and 2500 rpm, while the dummy wafer stands still.

8. The method of claim 6 , wherein the adjustable pattern nozzle stands still, while the dummy wafer rotates.

9. The method of claim 6 , wherein the adjustable pattern nozzle rotates at a non-linearly increasing spin speed between 900 rpm and 2500 rpm.

10. The method of claim 6 , wherein the adjustable pattern nozzle blows a pressurized air stream at a flow rate between 10 liter/min and 100 liter/min to dry the unreachable area of the cup.

11. The method of claim 6 , wherein the adjustable pattern nozzle is positioned at a height between 1 mm and 3 mm above a center of the wafer.

12. The method of claim 6 , wherein the adjustable pattern nozzle comprises a pulsation insert and a directional insert to generate various patterns of a pressurized air stream.

13. The method of claim 12 , wherein the pulsation insert is configured to generate a pulsation and oscillation of the pressurized air stream by inserting a mechanical device into the adjustable pattern nozzle.

14. The method of claim 12 , wherein the directional insert is configured to change a two-dimensional direction and three-dimensional rotation of the pressurized air stream by inserting a mechanical device into the adjustable pattern nozzle.

15. The method of claim 6 , wherein the adjustable pattern nozzle comprises an extendable nozzle.

16. The method of claim 1 , wherein the nozzle ejects the pressurized cleaning material in a flow rate between 1000 cc/min and 2000 cc/min.

17. The method of claim 1 , wherein an automatic cup-cleaning operation is triggered based on the monitored contaminant material at the unreachable area of the cup.

18. The method of claim 1 , wherein the rinsing the unreachable area of the cup comprises ejecting a rinsing fluid from the nozzle and onto an upper surface of the dummy wafer.

19. A method of cleaning a cup in a wet process apparatus, comprising:
providing a wet process apparatus comprising:
the cup adjacent to a wafer chuck within a chamber; and
a particle removing assembly configured to remove contaminant material from the cup, wherein the particle removing assembly comprises a nozzle configured to eject pressurized cleaning material onto a dummy wafer, and wherein the pressurized cleaning material is reflected off the dummy wafer to an unreachable area introduced by a curvature of the cup by rotating force;

ejecting the pressurized cleaning material through the nozzle of the particle removing assembly; and
rinsing the unreachable area of the cup with the ejected pressurized cleaning material.

20. A method of cleaning a cup adjacent to a wafer chuck within a chamber, the method comprising:
providing a particle removing assembly comprising a dispensing nozzle configured to eject pressurized cleaning material onto a dummy wafer, wherein the pressurized cleaning material is reflected off the dummy wafer to an unreachable area introduced by a curvature of the cup by rotating force to remove contaminant material from the unreachable area of the cup;
ejecting the pressurized cleaning material through the dispensing nozzle; and
rinsing the unreachable area of the cup with the ejected pressurized cleaning material.

Assignees

• Taiwan Semiconductor Mfg Co Ltd
• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Wu Meng-Hsueh
• Kuo Fang Yu
• Liu kai yu
• Wu Yu-Chun
• Huang Jao
• Chen wei-yi

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• B08B9/0813 Primary

  by the force of jets or sprays · CPC title

• H01L21/67051

  Electricity · mapped topic

• B08B3/02

  Cleaning by the force of jets or sprays · CPC title