Ring resonator with integrated photodetector for power monitoring

Patent metadata

Field	Value
Publication number	US-11774679-B2
Application number	US-202217582900-A
Country	US
Kind code	B2
Filing date	Jan 24, 2022
Priority date	Mar 29, 2019
Publication date	Oct 3, 2023
Grant date	Oct 3, 2023

Abstract

A ring resonator device includes a passive optical cavity having a circuitous configuration into which is built a photodetector device. The photodetector device includes a first implant region formed within the passive optical cavity that includes a first type of implanted doping material. The photodetector device includes a second implant region formed within the passive optical cavity that includes a second type of implanted doping material, where the second type of implanted doping material is different than the first type of implanted doping material. The photodetector device includes an intrinsic absorption region present within the passive optical cavity between the first implant region and the second implant region. A first electrical contact is electrically connected to the first implant region and to a detecting circuit. A second electrical contact is electrically connected to the second implant region and to the detecting circuit.

First claim

What is claimed is:

1. A photodetector system, comprising:
a ring resonator device having a passive optical cavity;
a photodetector device built into the passive optical cavity of the ring resonator;
a tap-off optical waveguide positioned next to the passive optical cavity of the ring resonator device such that some light will evanescently couple from the passive optical cavity into the tap-off optical waveguide;
a first implant region formed on a first side of the tap-off optical waveguide, the first implant region having a first type of implanted doping material;
a second implant region formed on a second side of the tap-off optical waveguide opposite from the first implant region, the second implant region having a second type of implanted doping material;
an intrinsic absorption region within the tap-off optical waveguide between the first implant region and the second implant region;
a first electrical contact electrically connected to the first implant region, the first electrical contact electrically connected to a detecting circuit; and
a second electrical contact electrically connected to the second implant region, the second electrical contact electrically connected to the detecting circuit,
wherein the detecting circuit is configured to detect a photocurrent caused by photoabsorption-generated charge carriers swept into the first and second implant regions by a charge collection field, and wherein the detecting circuit is configured to use the detected photocurrent in the tap-off optical waveguide in conjunction with the photodetector device built into the passive optical cavity of the ring resonator to measure an optical power within the passive optical cavity of the ring resonator.

2. The photodetector system as recited in claim 1 , wherein the detecting circuit is configured to apply a reverse-bias voltage to the first and second implant regions to create the charge collection field within the intrinsic absorption region within the tap-off optical waveguide between the first and second implant regions.

3. The photodetector system as recited in claim 1 , wherein the tap-off optical waveguide is positioned such that light incoupled into the tap-off optical waveguide from the passive optical cavity of the ring resonator propagates toward the intrinsic absorption region.

4. The photodetector system as recited in claim 3 , wherein the tap-off optical waveguide is linear-shaped.

5. The photodetector system as recited in claim 3 , wherein the tap-off optical waveguide curves around a portion of the passive optical cavity.

6. The photodetector system as recited in claim 3 , wherein the tap-off optical waveguide terminates just past an effective optical coupling region between the tap-off optical waveguide and the passive optical cavity.

7. The photodetector system as recited in claim 3 , wherein the tap-off optical waveguide is configured to limit coupling of light into the tap-off optical waveguide to a fundamental mode of light within the passive optical cavity.

8. The photodetector system as recited in claim 3 , wherein the tap-off optical waveguide is formed of one or more of monocrystalline silicon, polycrystalline silicon, glass, silicon nitride, silicon oxide, and silica.

9. The photodetector system as recited in claim 3 , further comprising:
a cladding material surrounding the passive optical cavity and the tap-off optical waveguide, the cladding material having a different index of optical refraction than each of the passive optical cavity and the tap-off optical waveguide.

10. The photodetector system as recited in claim 1 , wherein the first type of implanted doping material is a p-type doping material and the second type of implanted doping material is an n-type doping material, or wherein the first type of implanted doping material is the n-type doping material and the second type of implanted doping material is the p-type doping material.

11. The photodetector system as recited in claim 1 , wherein the p-type doping material is one or more of boron, gallium, and indium implanted at a concentration within a range extending from about 1E17 atoms/cm 3 to about 1E19 atoms/cm 3 .

12. The photodetector system as recited in claim 1 , wherein the n-type doping material is one or more of phosphorous, arsenic, antimony, bismuth, or lithium implanted at a concentration within a range extending from about 1E17 atoms/cm 3 to about 1E19 atoms/cm 3 .

13. The photodetector system as recited in claim 1 , wherein the first implant region, the second implant region, and the intrinsic absorption region extend through essentially an entire vertical thickness of the tap-off optical waveguide.

14. The photodetector system as recited in claim 1 , wherein the first electrical contact and the second electrical contact are positioned physically separate from the tap-off optical waveguide.

15. The photodetector system as recited in claim 1 , wherein the tap-off optical waveguide has a substantially constant vertical thickness within a range extending from about 30 nanometers to about 300 nanometers.

16. The photodetector system as recited in claim 1 , wherein the tap-off optical waveguide has a substantially constant width within a range extending from about 300 nanometers to about 1 micrometer.

17. A method for detecting optical power in a ring resonator device, comprising:
positioning a tap-off optical waveguide near a passive optical cavity of a ring resonator device such that some light propagating within the passive optical cavity will evanescently couple into the tap-off optical waveguide;
having a first photodetector device built into the passive optical cavity of the ring resonator device;
having a second photodetector device coupled to the tap-off optical waveguide, the second photodetector device including a first implant region formed on a first side of the tap-off optical waveguide, and a second implant region formed on a second side of the tap-off optical waveguide opposite from the first implant region, the first implant region including a first type of implanted doping material, the second implant region including a second type of implanted doping material, the second type of implanted doping material different than the first type of implanted doping material, the second photodetector device including an intrinsic absorption region within the tap-off optical waveguide between the first implant region and the second implant region, the second photodetector device including a first electrical contact electrically connected to the first implant region, and a second electrical contact electrically connected to the second implant region;
electrically connecting the first electrical contact to a detecting circuit;
electrically connecting the second electrical contact to the detecting circuit;
operating the detecting circuit to apply a reverse-bias voltage to the first and second implant regions of the second photodetector device to create a charge collection field within the intrinsic absorption region between the first and second implant regions; and
operating the detecting circuit to detect a photocurrent caused by photoabsorption-generated charge carriers swept into the first and second implant regions by the charge collection field; and
operating the detecting circuit to use the detected photocurrent in conjunction with another photocurrent detected by the first photodetector device to measure an optical power within the passive optical cavity of the ring resonator device.

18. The method as recited in claim 17 , wherein the tap-off optical

Assignees

• Ayar Labs Inc

Inventors

• Bhargava Pavan
• Fini john
• Van Orden Derek
• Sun Chen
• Wade Mark

Classifications

• H10F77/413

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title

• H10F30/223

  the potential barrier being a PIN barrier · CPC title

• G02B6/2934 Primary

  Fibre ring resonators, e.g. fibre coils · CPC title

• G01J1/0425

  using optical fibers · CPC title

• G01J1/44

  Electric circuits {(for command of an exposure part G03B7/02)} · CPC title