Droplet generator for lithographic apparatus, euv source and lithographic apparatus
US-2018364580-A1 · Dec 20, 2018 · US
Apparatus for high pressure connection
US11774012B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11774012-B2 |
| Application number | US-201917270658-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 12, 2019 |
| Priority date | Sep 18, 2018 |
| Publication date | Oct 3, 2023 |
| Grant date | Oct 3, 2023 |
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- Title
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Abstract
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A conduit suitable for use in a high temperature, high pressure environment, the conduit having an elongate portion made of a first refractory metal and a fitting portion made of a second refractory metal attached to an axial end of the elongate portion. The attachment may be made by welding and the second refractory metal may have a greater yield strength than the first refractory metal.
First claim
Opening claim text (preview).
What is claimed is: 1. Apparatus comprising: a conduit portion made of a first refractory metal; and a fitting portion attached to an axial end of the conduit portion, the fitting portion being made of a second refractory metal having greater yield strength than the first refractory metal. 2. Apparatus as claimed in claim 1 wherein the fitting portion is welded to an axial end of the conduit portion. 3. Apparatus as claimed in claim 1 wherein the first refractory metal comprises TaW2.5. 4. Apparatus as claimed in claim 1 wherein the second refractory metal comprises TaW10. 5. Apparatus as claimed in claim 1 wherein the fitting portion has a circularly asymmetric cross section. 6. Apparatus comprising: a conduit portion comprising TaW2.5; and a fitting portion welded to an axial end of the conduit portion, the fitting portion comprising TaW10. 7. An EUV light source target material delivery system adapted to deliver target material to an irradiation region of an EUV light source, the target material delivery system comprising: a target material reservoir; a conduit in fluid communication with said target material reservoir; and a nozzle assembly in fluid communication with said conduit, wherein the conduit comprises a conduit portion made of a first refractory metal; and at least one fitting portion attached to an axial end of the conduit portion, the at least one fitting portion being made of a second refractory having a greater yield strength than the first refractory metal. 8. The EUV light source target material delivery system as claimed in claim 7 wherein the at least one fitting portion is welded to an axial end of the conduit portion. 9. The EUV light source target material delivery system as claimed in claim 7 wherein the first refractory metal comprises TaW2.5. 10. The EUV light source target material delivery system as claimed in claim 7 wherein the second refractory metal comprises TaW10. 11. A method of making a conduit comprising the steps of: providing an elongate conduit portion made of a first refractory metal; providing a fitting portion attached to an axial end of the elongate conduit portion, the fitting portion comprising a second refractory metal having a greater yield strength than the first refractory metal; and attaching the fitting portion to the elongate conduit portion. 12. A method as claimed in claim 11 wherein the step of attaching the fitting portion to the elongate conduit portion comprises welding the fitting portion to the elongate conduit portion. 13. A method as claimed in claim 11 wherein the first refractory metal comprises TaW2.5. 14. A method as claimed in claim 11 wherein the second refractory metal comprises TaW10. 15. A method as claimed in claim 11 wherein the fitting portion has a circularly asymmetric cross section.
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- What does patent US11774012B2 cover?
- A conduit suitable for use in a high temperature, high pressure environment, the conduit having an elongate portion made of a first refractory metal and a fitting portion made of a second refractory metal attached to an axial end of the elongate portion. The attachment may be made by welding and the second refractory metal may have a greater yield strength than the first refractory metal.
- Who is the assignee on this patent?
- Asml Netherlands Bv
- What technology area does this patent fall under?
- Primary CPC classification F16L13/02. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Oct 03 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).