Apparatus for thermal control of tubing assembly and associated methods

Patent metadata

Field	Value
Publication number	US-11768011-B2
Application number	US-202016818990-A
Country	US
Kind code	B2
Filing date	Mar 13, 2020
Priority date	Mar 31, 2015
Publication date	Sep 26, 2023
Grant date	Sep 26, 2023

Abstract

Tubing structures are connected to each other to form a tubing assembly having one or more fluid pathways from a fluid entrance to a fluid exit. A heating device is bonded to the tubing structures along a length of the tubing assembly. The heating device has a flexibility to follow along one or more bends present along the length of the tubing assembly. The heating device includes one or more heater traces embedded within an encasing material. The encasing material is thermally conductive and electrically insulative. The one or more heater traces are formed of a material that generates heat in the presence of an electrical current. The heating device has a continuous and unbroken structure along the length of the tubing assembly. An encapsulation layer of thermal insulating material is disposed over the tubing assembly and covers the heating device.

First claim

What is claimed is:

1. A heating device, comprising:
an encasing material that is thermally conductive and electrically insulative, the encasing material having a serpentine shape that is substantially rectangularly bounded, such that the heating device has the serpentine shape along a length of the heating device; and
at least one heater trace embedded within the encasing material, the at least one heater trace formed of a material that generates heat in the presence of an electrical current.

2. The heating device as recited in claim 1 , wherein the encasing material is flexible.

3. The heating device as recited in claim 1 , wherein the encasing material includes polyimide.

4. The heating device as recited in claim 1 , wherein the at least one heater trace is formed from an alloy comprising at least one metal, wherein a metal of the at least one metal is selected from a group consisting of copper, iron, nickel, chromium, aluminum, molybdenum, tungsten, manganese, and cobalt.

5. The heating device as recited in claim 1 , wherein the heating device is configured in a cut-to-length manner.

6. The heating device as recited in claim 1 , wherein the heating device is configured as a contiguous plurality of unit cut lengths, each unit cut length including heater trace access locations for respective electrical connection to each of the at least one heater trace.

7. The heating device as recited in claim 6 , wherein the unit cut lengths are configured to enable cutting of a length of the heating device to fit a length of a plurality of tubing structures in their connected configuration.

8. The heating device as recited in claim 1 , wherein the serpentine shape of the encasing material increases an amount of the at least one heater trace present per unit length of the heating device.

9. The heating device as recited in claim 1 , wherein the serpentine shape of the encasing material enables flexibility of the heating device.

10. The heating device as recited in claim 1 , wherein the serpentine shape of the encasing material is formed by regularly spaced slits located at opposing sides of the heating device in an alternating manner along the length of the heating device.

11. The heating device as recited in claim 10 , wherein the regularly spaced slits are configured to enable flexibility of the heating device.

12. The heating device as recited in claim 10 , wherein adjacently positioned slits of the regularly spaced slits along the length of the heating device include a first slit and a second slit, the first slit extending across the heating device from a first side of the heating device, the second slit extending across the heating device from a second side of the heating device.

13. The heating device as recited in claim 12 , wherein a portion of the first slit extends past a portion of the second slit.

14. The heating device as recited in claim 12 , wherein the first and second slits extend across the heating device in a substantially parallel manner.

15. The heating device as recited in claim 14 , wherein a portion of the first slit extends past a portion of the second slit.

16. The heating device as recited in claim 1 , wherein the at least one heater trace is two heater traces.

17. The heating device as recited in claim 16 , wherein the two heater traces are positioned in a substantially parallel relationship to each other along the serpentine shape of the encasing material.

18. The heating device as recited in claim 17 , further comprising:
a bridging wire electrically connected to each of the two heater traces at a first end of the heating device;
a first electrical lead electrically connected to a first of the two heater traces at a second end of the heating device; and
a second electrical lead electrically connected to a second of the two heater traces at the second end of the heating device, the first and second electrical leads configured for respective connection to positive and negative terminals of an electrical power supply.

19. The heating device as recited in claim 18 , wherein the heating device is a first heating device, wherein the first electrical lead is connected to a first of two heater traces of a second heating device, the second heating device configured in a same manner as the first heating device, and wherein the second electrical lead is electrically connected to a second of the two heater traces of the second heating device.

20. The heating device as recited in claim 17 , wherein the serpentine shape of the encasing material is formed by a plurality of slits, wherein each adjacently positioned pair of slits of the plurality of slits along the length of the heating device includes a first slit and a second slit, the first slit extending across the heating device from a first side of the heating device, the second slit extending across the heating device from a second side of the heating device, wherein a portion of the first slit extends past a portion of the second slit, and wherein the two heater traces are routed between the first slit and the second slit.

Assignees

• Lam Res Corp

Inventors

• Leeser Karl F

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3411

  involving loading and unloading of wafers · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0461

  characterised by the presence of two or more transfer chambers · CPC title

• F24H1/102 Primary

  with resistance · CPC title