Spin-on compositions comprising an inorganic oxide component and an alkynyloxy substituted spin-on carbon component useful as hard masks and filling materials with improved shelf life

Patent metadata

Field	Value
Publication number	US-11767398-B2
Application number	US-202017423528-A
Country	US
Kind code	B2
Filing date	Feb 20, 2020
Priority date	Feb 22, 2019
Publication date	Sep 26, 2023
Grant date	Sep 26, 2023

Abstract

The present invention relates to a composition comprising; components a) b) and d); wherein, component a) is a metal compound having the structure (I), component b) is a spin on high carbon polymer, having a polymer backbone comprising mono-cyclic aromatic hydrocarbon, fused-ring ring hydrocarbon moieties, or mixtures of these, having a wt. % of carbon from about 81 wt. % to about 94 wt. %, which is soluble to at least about 5 wt. % in a spin casting solvent, and wherein at least one, of said mono-cyclic aromatic hydrocarbon or said fused-ring ring hydrocarbon moieties, present in said spin on high carbon polymer, is functionalized with at least one alkynyloxy moiety of structure (VIII), and component d) is a spin casting solvent. The present invention further relates to using this composition in methods for manufacturing electronic devices through either the formation of a patterned films of high K material comprised of a metal oxide on a semiconductor substrate, or through the formation of patterned metal oxide comprised layer overlaying a semiconductor substrate which may be used to selectively etch the semiconductor substrate with a fluorine plasma.

First claim

We claim:

1. A spin on high carbon polymer comprising a repeat unit of structure (XII), wherein fAr is a fused aromatic ring and Ra 1 , Ra 2 , Ra 3 , R 16 and R 17 are each independently hydrogen or a C 1 to C 4 alkyl;

2. The spin on high carbon polymer of claim 1 , wherein fAr is a group comprising 2-8 fused aromatic rings.

3. The spin on high carbon polymer of claim 1 , wherein fAr is anthracene.

4. The spin on high carbon polymer of claim of claim 1 , wherein said repeat unit has structure (XIIc):

5. A spin on high carbon polymer comprising repeat units, selected from the group consisting of repeat units having structures (XIII), (XIIIa), (XIIIb), (XIIIc), and (XIIId), and mixtures thereof,

wherein fAr is a fused aromatic ring and Ra 1 , Ra 2 , Ra 3 , R 16 and R 17 are each independently selected from the group of hydrogen and a C 1 to C 4 alkyl.

6. The spin on high carbon polymer of claim 5 , wherein said spin on high carbon polymer comprising repeat units, selected from the group consisting of repeat units having structures (XIIIe), (XIIIf), (XIIIg), (XIIIh), and (XIIIi), and mixtures thereof,

wherein fAr is a fused aromatic ring and Ra 1 , Ra 2 , Ra 3 , R 16 and R 17 are each independently selected from the group of hydrogen and a C 1 to C 4 alkyl.

7. A spin on high carbon polymer is a spin on high carbon polymer comprising repeat units having structures (XIV),

wherein Ra 1 , Ra 2 and Ra 3 are each independently selected from the group of hydrogen and a C 1 to C 4 alkyl.

8. The spin on high carbon polymer of claim 7 , wherein Ra 1 , Ra 2 and Ra 3 are hydrogen.

Assignees

• Merck Patent Gmbh

Inventors

• Rahman M Dalil
• Sekito Takashi

Classifications

• H10P14/6922 Primary

  the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC · CPC title

• C08G61/02 Primary

  Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes · CPC title

• B05D1/005

  Spin coating · CPC title

• B05D3/0254

  After-treatment · CPC title

• C08G61/12

  Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule · CPC title