Chemical mechanical polishing apparatus using a magnetically coupled pad conditioning disk

Patent metadata

Field	Value
Publication number	US-11766758-B2
Application number	US-202117159376-A
Country	US
Kind code	B2
Filing date	Jan 27, 2021
Priority date	Jan 27, 2021
Publication date	Sep 26, 2023
Grant date	Sep 26, 2023

Abstract

A chemical mechanical polishing (CMP) apparatus includes a polishing pad located on a top surface of a platen configured to rotate around a vertical axis passing through the platen, a wafer carrier configured to hold a substrate on a bottom surface thereof and to press the substrate on a top surface of the polishing pad, a slurry dispenser configured to dispense slurry over the top surface of the polishing pad, and a pad conditioning unit comprising a pad conditioning disk and a conditioning head configured to hold the pad conditioning disk. The conditioning head includes an electromagnet and the pad conditioning disk comprises a first ferromagnetic material portion configured to be attracted to the electromagnet when the electromagnet is energized.

First claim

What is claimed is:

1. A chemical mechanical polishing (CMP) apparatus comprising:
a polishing pad located on a top surface of a platen configured to rotate around a vertical axis passing through the platen;
a wafer carrier configured to hold a substrate on a bottom surface thereof and to press the substrate on a top surface of the polishing pad;
a slurry dispenser configured to dispense slurry over the top surface of the polishing pad; and
a pad conditioning unit comprising a pad conditioning disk and a conditioning head configured to hold the pad conditioning disk, wherein the conditioning head comprises an electromagnet and the pad conditioning disk comprises a first ferromagnetic material portion configured to be attracted to the electromagnet when the electromagnet is energized, wherein the conditioning head comprises a cylindrical cavity that contains an outer screw thread on an inner sidewall thereof, wherein the pad conditioning disk comprise an inner screw thread as an outermost laterally protruding structure of the pad conditioning disk, and wherein the inner screw thread is configured to fit the outer screw thread.

2. The CMP apparatus of claim 1 , wherein the electromagnet comprises:
a ferromagnetic core comprising a second ferromagnetic material; and
a conductive coil that is wound around the ferromagnetic core.

3. The CMP apparatus of claim 2 , further comprising:
a pad conditioner arm attached to the pad conditioning unit; and
a conditioner pivot pillar structure attached to the pad conditioner arm, wherein the pad conditioning unit and the pad conditioner arm are configured to rotate around a vertical axis passing through the conditioner pivot pillar structure.

4. The CMP apparatus of claim 3 , further comprising a direct current power supply unit configured to provide a direct current to the conductive coil to energize the electromagnet.

5. The CMP apparatus of claim 1 , wherein the first ferromagnetic material portion comprises a permanent magnet having a shape of a cylindrical disk.

6. The CMP apparatus of claim 1 , wherein:
an upper portion of the pad conditioning disk is configured to fit into the cylindrical cavity.

7. The CMP apparatus of claim 6 , further comprising a contact switch located at a top portion of the cylindrical cavity and configured to detect physical contact with a top surface of the pad conditioning disk.

8. The CMP apparatus of claim 7 , further comprising a process controller electrically connected to the contact switch and configured to generate an alarm when the contact switch detects absence of physical contact between the contact switch and the top surface of the pad conditioning disk.

9. The CMP apparatus of claim 1 , wherein the conditioning head comprises:
a stator unit that is attached to a pad conditioner arm and configured to be stationary relative to the pad conditioner arm and including the electromagnet; and
a rotor unit that is configured to rotate relative to the stator unit and attached to the pad conditioning disk.

10. A method of manufacturing a chemical mechanical polishing (CMP) apparatus, the method comprising:
disposing a polishing pad on a top surface of a platen that is configured to rotate around a vertical axis passing through the platen;
disposing a wafer carrier over the top surface of the platen, wherein the wafer carrier is configured to hold a substrate on a bottom surface thereof and to press the substrate onto the top surface of the polishing pad;
disposing a slurry dispenser configured to dispense slurry over the top surface of the polishing pad;
attaching a pad conditioning disk to a conditioning head, wherein the pad conditioning disk comprises a first ferromagnetic material portion and the conditioning head comprises an electromagnet configured to generate a magnetic field that attracts the first ferromagnetic material portion, whereby a pad conditioning unit including the conditioning head and the pad conditioning disk is formed; and
disposing the pad conditioning unit over the top surface of the platen,
wherein:
the conditioning head comprises a cylindrical cavity;
the conditioning head comprises a contact switch located at a top portion of the cylindrical cavity and configured to detect physical contact with the pad conditioning disk; and
the method comprises fitting an upper portion of the pad conditioning disk into the cylindrical cavity and moving the pad conditioning disk upward until the contact switch detects physical contact with the pad conditioning disk.

11. The method of claim 10 , further comprising:
attaching a pad conditioner arm to the pad conditioning unit; and
attaching a conditioner pivot pillar structure to the pad conditioner arm, wherein the pad conditioning unit and the pad conditioner arm are configured to rotate around a vertical axis passing through the conditioner pivot pillar structure.

12. The method of claim 10 , wherein:
the conditioning head comprises an outer screw thread located at a periphery of the cylindrical cavity;
the pad conditioning disk comprises an inner screw thread configured to fit the outer screw thread; and
the method comprises turning the pad conditioning disk until the pad conditioning disk contacts the contact switch.

13. The method of claim 10 , wherein the conditioning head comprises:
a stator unit that is attached to a pad conditioner arm and configured to be stationary relative to the pad conditioner arm and including the electromagnet; and
a rotor unit that is configured to rotate relative to the stator unit, wherein the pad conditioning disk is attached to the rotor unit.

14. A method of operating a chemical mechanical polishing (CMP) apparatus, comprising:
providing a CMP apparatus comprising:
a polishing pad located on a top surface of a platen configured to rotate around a vertical axis passing through the platen,
a wafer carrier facing a top surface of the polishing pad,
a slurry dispenser configured to dispense slurry over the top surface of the polishing pad, and
a conditioning head comprising an electromagnet; and

attaching a pad conditioning disk to the conditioning head, wherein the pad conditioning disk comprises a first ferromagnetic material portion configured to be attracted to the electromagnet when the electromagnet is energized,

wherein:
the conditioning head comprises a cylindrical cavity;
the method comprises fitting an upper portion of the pad conditioning disk into the cylindrical cavity;
the conditioning head comprises a contact switch located at a top portion of the cylindrical cavity; and
the method comprises moving the pad conditioning disk up the cylindrical cavity until the contact switch detects physical contact with a top surface of the pad conditioning disk.

15. The method of claim 14 , further comprising:
attaching a substrate upside down on a bottom surface of the wafer carrier such that a front side of the substrate faces the top surface of the polishing pad; and
polishing the front side of the substrate by rotating the wafer carrier and the substrate while the platen rotates and while the slurry is present on the top surface of the polishing pad.

16. The method of claim 14 , further comprising:
energizing the electromagnet by passing electrical current through a conductive coil of the electromagnet; and
conditioning the polishing pad by inducing contact between the pad conditioning disk and the polishing pad while the polishing pad rotates around the vertical axis passing through the platen and while the electromagnet is energized.

17.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Ho Wen-Pin
• Jheng Ren-Hao
• Cheng S P

Classifications

• B24B37/042 Primary

  operating processes therefor · CPC title

• B24B37/20

  Lapping pads for working plane surfaces · CPC title

• B24B37/10 Primary

  for single side lapping · CPC title

• B24B37/30

  for single side lapping of plane surfaces · CPC title

• B24B37/34

  Accessories · CPC title