Display apparatus and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-11758775-B2
Application number	US-202217844808-A
Country	US
Kind code	B2
Filing date	Jun 21, 2022
Priority date	Mar 29, 2019
Publication date	Sep 12, 2023
Grant date	Sep 12, 2023

Abstract

A display apparatus includes: a substrate including a component area, a display area, and a middle area provided between the component area and the display area; a thin-film transistor arranged in the display area; a display element including a pixel electrode, an intermediate layer, and an opposite electrode, wherein the pixel electrode is electrically connected to the thin-film transistor; a first organic insulating layer, a second organic insulating layer, and a passivation layer sequentially stacked on each other between the thin-film transistor and the pixel electrode; and a groove arranged in the middle area, wherein the groove divides an organic material layer included in the intermediate layer, wherein the groove is provided in multiple layers including an organic layer and an inorganic layer, wherein the organic layer is arranged on the substrate, and the inorganic layer is stacked on the organic layer.

First claim

What is claimed is:

1. A method of manufacturing a display apparatus, the method comprising:
preparing a substrate comprising a component area, a display area, and a middle area provided between the component area and the display area;
forming a thin-film transistor in the display area;
sequentially stacking a first organic insulating layer, a second organic insulating layer, and a passivation layer on the thin-film transistor;
forming a display element on the passivation layer, wherein the display element comprises a pixel electrode, an intermediate layer, and an opposite electrode, wherein the pixel electrode is electrically connected to the thin-film transistor, and wherein the intermediate layer is disposed on the pixel electrode; and
forming a groove in the middle area, wherein the groove divides an organic material layer included in the intermediate layer,
wherein the forming of the groove comprises:
stacking an organic layer on the substrate and patterning an empty space in the organic layer, and
stacking an inorganic layer on the organic layer and patterning an empty space in the inorganic layer, wherein
the forming of the groove comprises removing a part of an inner wall of the organic layer, which forms the patterned empty space of the organic layer, by performing dry etching, wherein, by removing the part of the inner wall of the organic layer, a portion of the inorganic layer extending beyond an edge portion of the organic layer to vertically overlap the patterned empty space of the organic layer is formed.

2. The method of claim 1 , wherein
the performing of the dry etching to remove the part of the inner wall of the organic layer uses oxygen plasma.

3. The method of claim 1 , wherein
the organic layer comprises a first sub-lower layer and a second sub-lower layer, wherein the first sub-lower layer is a same layer as the second organic insulating layer and the second sub-lower layer is a same layer as the first organic insulating layer.

4. The method of claim 3 , wherein
an end of the second sub-lower layer adjacent to the groove is covered by the first sub-lower layer.

5. The method of claim 1 , wherein
the inorganic layer is a same layer as the passivation layer.

6. The method of claim 1 , wherein
further comprising forming a thin-film encapsulation layer covering the display area and the middle area on the substrate.

7. The method of claim 6 , wherein
the thin-film encapsulation layer comprises a first inorganic encapsulation layer, a second inorganic encapsulation layer, and an organic encapsulation layer arranged between the first inorganic encapsulation layer and the second inorganic encapsulation layer.

8. The method of claim 7 , wherein
the first inorganic encapsulation layer covers an inner wall of the groove that partitions the organic layer and the inorganic layer, wherein the organic encapsulation layer fills an inner space of the groove, and wherein the second inorganic encapsulation layer covers an upper surface of the organic encapsulation layer.

9. The method of claim 1 , wherein
the intermediate layer comprises a light-emitting layer, a hole transport layer, and an electron transport layer, wherein the light-emitting layer is disposed between the hole transport layer and the electron transport layer, and
wherein the hole transport layer and the electron transport layer are extended and stacked on the inorganic layer.

10. The method of claim 9 , wherein
at least one of the hole transport layer or the electron transport layer is divided by the groove.

11. The method of claim 1 , wherein the inorganic layer does not extend into the groove.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Jaehak
• Seon Jongbaek
• Shin Juncheol
• Choi Jieun

Classifications

• H10K59/8731 Primary

  multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K59/1201

  Manufacture or treatment · CPC title

• H10K59/124 Primary

  Insulating layers formed between TFT elements and OLED elements · CPC title

• H10K2102/302

  of OLED structures · CPC title