Electromechanical resonators based on metal-chalcogenide nanotubes

Patent metadata

Field	Value
Publication number	US-11757428-B2
Application number	US-202217853987-A
Country	US
Kind code	B2
Filing date	Jun 30, 2022
Priority date	Dec 27, 2016
Publication date	Sep 12, 2023
Grant date	Sep 12, 2023

Abstract

This invention provides electromechanical resonators based on metal chalcogenide nanotubes. The invention further provides methods of fabrication of electromechanical resonators and methods of use of such electromechanical resonators.

First claim

The invention claimed is:

1. A method of fabrication of an electromechanical resonator, said method comprising:
providing a substrate;
applying at least a first pad and a second pad onto said substrate such that said pads are not in contact with each other;
applying at least one metal-chalcogenide nanotube onto said pads such that a first region of said nanotube is in contact with said first pad and a second region of said nanotube is in contact with said second pad;
applying a pedal on top of said nanotube, such that said pedal is in contact with said nanotube, wherein said pedal is of a rectangular shape and is attached to said nanotube such that the longer dimension of said rectangle is positioned perpendicular to the longer dimension of said nanotube; and wherein said rectangular pedal is positioned asymmetrically with respect to said nanotube; and
removing a substrate surface layer underneath said nanotube, thus suspending said nanotube over said substrate.

2. The method of claim 1 , wherein said substrate comprises Si coated by SiO 2 .

3. The method of claim 1 , wherein said pads comprise chromium layer coated by gold layer.

4. The method of claim 1 , wherein the step of applying said pads comprises photolithography and metal deposition.

5. The method of claim 1 , wherein the step of applying at least one metal-chalcogenide nanotube, comprises dry dispersion of said nanotube.

6. The method of claim 1 , wherein the step of removing a substrate surface layer underneath said nanotube comprises etching said substrate layer using hydrofluoric acid (HF).

7. The method of claim 6 , wherein said etching is followed by critical point drying (CPD).

8. The method of claim 1 , wherein following said step of removing a substrate surface layer, said pedal is suspended over said substrate.

9. The method of claim 1 , further comprising fabricating at least one electrode on said substrate.

Assignees

• Yeda Res & Dev
• B G Negev Technologies And Applications Ltd At Ben Gurion Univ

Inventors

• Tenne Reshef
• Joselevich Ernesto
• DIVON Yiftach
• Levi Roi
• Yaakobovitz Assaf
• Yudilevich Dan

Classifications

• B82B1/002 Primary

  Devices comprising flexible or deformable elements · CPC title

• H03H3/0072 Primary

  of microelectro-mechanical resonators or networks (micromembranes or microbeams B81B2203/01; manufacture of microstructural devices in general B81C) · CPC title

• H03H9/2463 Primary

  Clamped-clamped beam resonators · CPC title

• B81B2201/0271

  Resonators; ultrasonic resonators · CPC title

• H03H2009/02519

  Torsional · CPC title