Vacuum pump and leak detector

Patent metadata

Field	Value
Publication number	US-11754081-B2
Application number	US-202217699317-A
Country	US
Kind code	B2
Filing date	Mar 21, 2022
Priority date	Jun 2, 2021
Publication date	Sep 12, 2023
Grant date	Sep 12, 2023

Abstract

A vacuum pump comprises: a rotor rotatable in a predetermined rotation direction; and a case housing the rotor; and a fixed component arranged facing an inner wall of the case. A clearance is formed between the inner wall of the case and the fixed component, and a groove allowing communication between the clearance and an exhaust path in the case is formed at either the inner wall of the case or the fixed component.

First claim

What is claimed is:

1. A vacuum pump comprising: a rotor rotatable in a predetermined rotation direction; and
a case housing the rotor; and
a fixed component arranged directly adjacent to and facing an inner wall of the case,
wherein a clearance is formed between the inner wall of the case and the fixed component, and
a groove allowing communication between the clearance and an exhaust path in the case is formed at either the inner wall of the case or the fixed component, wherein walls of the groove and the inner wall of the case or fixed component in which the groove is not formed define a discharge path which allows gas accumulated in the clearance to be discharged to the exhaust path.

2. A vacuum pump comprising:
a rotor rotatable in a predetermined rotation direction; and
a case housing the rotor; and
a fixed component arranged facing an inner wall of the case,
wherein a clearance is formed between the inner wall of the case and the fixed component,
a groove allowing communication between the clearance and an exhaust path in the case is formed at either the inner wall of the case or the fixed component,
the case has a step having a surface extending in a radial direction and a surface extending in an axial direction, and the fixed component has a step having a surface extending in the radial direction and a surface extending in the axial direction, and
the step of the case and the step of the fixed component are fitted in each other such that the clearance is formed between the step of the case and the step of the fixed component.

3. A vacuum pump comprising:
a rotor rotatable in a predetermined rotation direction; and
a case housing the rotor; and
a fixed component arranged facing an inner wall of the case,
wherein a clearance is formed between the inner wall of the case and the fixed component,
a groove allowing communication between the clearance and an exhaust path in the case is formed at either the inner wall of the case or the fixed component, and
the fixed component is a magnet holder holding a permanent magnet of a permanent magnet magnetic bearing.

4. The vacuum pump according to claim 3 , wherein
the groove is formed at the magnet holder.

5. The vacuum pump according to claim 4 , wherein
the magnet holder has a beam extending in a radial direction from a center and an outer ring portion connected to the beam on an outer peripheral side thereof and contacting the case, and
the groove is formed at a portion of the outer ring portion connected to the beam.

6. The vacuum pump according to claim 1 , wherein
the groove is formed at the case.

Assignees

• Shimadzu Corp

Inventors

• Nishimura Taiki

Classifications

• F04D19/042 Primary

  Turbomolecular vacuum pumps · CPC title

• F04D27/001 Primary

  Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring · CPC title

• F04D29/522

  especially adapted for elastic fluid pumps · CPC title

• G01M3/04

  by detecting the presence of fluid at the leakage point · CPC title

• F04D19/048

  comprising magnetic bearings · CPC title