Cobalt complex, method for manufacturing same, and method for manufacturing cobalt-containing thin film

Patent metadata

Field	Value
Publication number	US-11753429-B2
Application number	US-201917292819-A
Country	US
Kind code	B2
Filing date	Nov 8, 2019
Priority date	Nov 12, 2018
Publication date	Sep 12, 2023
Grant date	Sep 12, 2023

Abstract

To provide a cobalt complex which is liquid at room temperature, useful for producing a cobalt-containing thin film under conditions without using an oxidizing gas.A cobalt complex represented by the following formula (1):wherein L1 and L2 represent a unidentate amide ligand of the following formula (A), a bidentate amide ligand of the following formula (B) or a hetero atom-containing ligand of the following formula (C):wherein R1 and R2 represent a C1-6 alkyl group or a tri(C1-6 alkyl)silyl group, and the wave line represents a binding site to the cobalt atom;wherein R3 represents a tri(C1-6 alkyl)silyl group, R4 and R5 represent a C1-4 alkyl group, and X represents a C1-6 alkylene group;wherein R6 and R8 represent a C1-6 alkyl group, R7 represents a hydrogen atom or a C1-4 alkyl group, Y represents an oxygen atom or NR9, Z represents an oxygen atom or NR10, and R9 and R10 independently represent a C1-6 alkyl group.

First claim

The invention claimed is:

1. A cobalt complex represented by the following formula (1):

wherein L 1 and L 2 which are different from each other represent a unidentate amide ligand represented by the following formula (A), a bidentate amide ligand represented by the following formula (B) or a hetero atom-containing ligand represented by the following formula (C), wherein the cobalt complex is a liquid at room temperature,
wherein L 1 is represented by the formula (A) or (C), and L 2 is represented by the formula (B):

wherein R 1 and R 2 independently represent a C 1-6 alkyl group or a tri(C 1-6 alkyl)silyl group, and the wave line represents a binding site to the cobalt atom;

wherein R 3 represents a tri(C 1-6 alkyl)silyl group, R 4 and R 5 independently represent a C 1-4 alkyl group, and X represents a C 1-6 alkylene group;

wherein R 6 and R 8 independently represent a C 1-6 alkyl group, R 7 represents a hydrogen atom or a C 1-4 alkyl group, Y represents an oxygen atom or NR 9 , Z represents an oxygen atom or NR 10 , and R 9 and R 10 independently represent a C 1-6 alkyl group.

2. The cobalt complex according to claim 1 , which is represented by the following formula (1AB):

wherein R 1 and R 2 are as defined for R 1 and R 2 in the above formula (A), and R 3 , R 4 , R 5 and X are as defined for R 3 , R 4 , R 5 and X in the above formula (B).

3. The cobalt complex according to claim 2 , wherein R 1 , R 2 and R 3 are a tri(C 1-4 alkyl)silyl group, R 4 and R 5 are a methyl group or an ethyl group, and X is a C 1-4 alkylene group.

4. The cobalt complex according to claim 2 , wherein R 1 , R 2 and R 3 are a trimethylsilyl group, R 4 and R 5 are a methyl group or an ethyl group, and X is a C 1-4 alkylene group.

5. A cobalt complex represented by the following formula (1AC):

wherein the cobalt complex is a liquid at room temperature,
wherein R 1 and R 2 independently represent a C 1-6 alkyl group or a tri(C 1-6 alkyl)silyl group; and
wherein R 6 and R 8 independently represent a C 1-6 alkyl group, R 7 represents a hydrogen atom or a C 1-4 alkyl group, Y represents an oxygen atom or NR 9 , Z represents an oxygen atom or NR 10 and R 9 and R 10 independently represent a C 1-6 alkyl group.

6. The cobalt complex according to claim 5 , wherein R 1 and R 2 are a tri(C 1-4 alkyl)silyl group, R 6 and R 8 are a methyl group, R 7 is a hydrogen atom, Y is NR 9 , Z is NR 10 and R 9 and R 10 are a C 1-4 alkyl group.

7. The cobalt complex according to claim 5 , wherein R 1 and R 2 are a trimethylsilyl group, R 6 and R 8 are a methyl group, R 7 is a hydrogen atom, Y is NR 9 , Z is NR 10 , and R 9 and R 10 are a C 1-4 alkyl group.

8. The cobalt complex according to claim 1 , which is represented by the following formula (1BC):

wherein R 3 , R 4 , R 5 and X are as defined for R 3 , R 4 , R 5 and X in the above formula (B), and R 6 , R 7 , R 8 , Y and Z are as defined for R 6 , R 7 , R 8 , Y and Z in the above formula (C).

9. The cobalt complex according to claim 8 , wherein R 3 is a tri(C 1-4 alkyl)silyl group, R 4 and R 5 are a methyl group or an ethyl group, X is a C 1-4 alkylene group, R 6 and R 8 are a C 1-4 alkyl group, R 7 is a hydrogen atom, and Y and Z are an oxygen atom.

10. The cobalt complex according to claim 8 , wherein R 3 is a trimethylsilyl group, R 4 and R 5 are a methyl group or an ethyl group, X is a C 1-4 alkylene group, R 6 and R 8 are a C 1-4 alkyl group, R 7 is a hydrogen atom, and Y and Z are an oxygen atom.

11. A method for producing a cobalt complex represented by the following formula (1AB), which comprises reacting a bisamide complex represented by the following formula (2) and an aminoalkylamine represented by the following formula (3):

wherein R 1 and R 2 independently represent a C 1-6 alkyl group or a tri(C 1-6 alkyl)silyl group, D represents a neutral ligand, and n represents 0 or 1;

wherein R 3 represents a tri(C 1-6 alkyl)silyl group, R 4 and R 5 independently represent a C 1-6 alkyl group, and X represents a C 1-6 alkylene group;

wherein R 1 and R 2 are as defined for R 1 and R 2 in the above formula (2), R 3 , R 4 , R 5 and X are as defined for R 3 , R 4 , R 5 and X in the above formula (3).

12. A method for producing the cobalt complex of claim 5 , which comprises reacting a bisamide complex represented by the following formula (2) and a hetero atom-containing compound represented by the following formula (4) to provide the complex represented by the formula (1AC) of claim 5 :

wherein R 1 and R 2 independently represent a C 1-6 alkyl group or a tri(C 1-6 alkyl)silyl group, D represents a neutral ligand, and n represents 0 or 1:

wherein R 6 and R 8 independently represent a C 1-6 alkyl group, R 7 represents a hydrogen atom or a C 1-4 alkyl group, Y represents an oxygen atom or NR 9 , Z represents an oxygen atom or NR 10 , and R 9 and R 10 independently represent a C 1-6 alkyl group.

13. A method for producing a cobalt complex represented by the following formula (1BC), which comprises reacting a cobalt complex represented by the following formula (1AB) and a hetero atom-containing compound represented by the following formula (4):

wherein R 1 and R 2 independently represent a C 1-6 alkyl group or a tri(C 1-6 alkyl)silyl group, R 3 represents a tri(C 1-6 alkyl)silyl group, R 4 and R 5 independently represent a C 1-4 alkyl group, and X represents a C 1-6 alkylene group;

wherein R 6 and R 8 independently represent a C 1-6 alkyl group, R 7 represents a hydrogen atom or a C 1-4 alkyl group, Y represents an oxygen atom or NR 9 , Z represents an oxygen atom or NR 10 and R 9 and R 10 independently represent a C 1-6 alkyl group;

wherein R 3 , R 4 , R 5 and X are as defined for R 3 , R 4 , R 5 and X in the above formula (1AB), and R 6 , R 7 , R 8 , Y and Z are as defined for R 6 , R 7 , R 8 , Y and Z in the above formula (4).

1

Assignees

• Tosoh Corp
• Sagami Chem Res Inst

Inventors

• Oike Hiroyuki
• Hayakawa Teppei
• Yamamoto Yuki
• Furukawa Taishi
• Tada Ken-Ichi

Classifications

• C07C49/14

  Acetylacetone, i.e. 2,4-pentanedione · CPC title

• C23C16/4485

  by evaporation without using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title

• C07C49/12

  Ketones containing more than one keto group · CPC title

• C23C16/18

  from metallo-organic compounds · CPC title

• C23C16/45553

  characterized by the use of precursors specially adapted for ALD · CPC title