Bandpass charged particle energy filtering detector for charged particle tools

Patent metadata

Field	Value
Publication number	US-11749495-B2
Application number	US-202117494784-A
Country	US
Kind code	B2
Filing date	Oct 5, 2021
Priority date	Oct 5, 2021
Publication date	Sep 5, 2023
Grant date	Sep 5, 2023

Abstract

Methods and systems for detecting charged particles from a specimen are provided. One system includes a first repelling mesh configured to repel charged particles from a specimen having an energy lower than a first predetermined energy and a second repelling mesh configured to repel the charged particles that pass through the first repelling mesh and have an energy that is lower than a second predetermined energy. The system also includes a first attracting mesh configured to attract the charged particles that pass through the first repelling mesh, are repelled by the second repelling mesh, and have an energy that is higher than the first predetermined energy and lower than the second predetermined energy. The system further includes a first detector configured to generate output responsive to the charged particles that pass through the first attracting mesh.

First claim

What is claimed is:

1. A system configured to detect charged particles from a specimen, comprising:
a first repelling mesh positioned in a path of charged particles from a specimen and configured to repel the charged particles having an energy that is lower than a first predetermined energy;
a second repelling mesh configured to repel the charged particles that pass through the first repelling mesh and have an energy that is lower than a second predetermined energy;
a first attracting mesh configured to attract the charged particles that pass through the first repelling mesh, are repelled by the second repelling mesh, and have an energy that is higher than the first predetermined energy and lower than the second predetermined energy;
a first detector configured to generate output responsive to the charged particles that pass through the first attracting mesh; and
a computer subsystem configured to systematically alter potentials applied to the first repelling mesh, second repelling mesh, and first attracting mesh to thereby systematically alter the first and second predetermined energies, to compare the output generated by the first detector for at least two of the systematically altered potentials, and to select the potentials applied to the first repelling mesh, second repelling mesh, and first attracting mesh for a process performed on the specimen based on results of comparing the output.

2. The system of claim 1 , wherein the first repelling mesh, the second repelling mesh, and the first attracting mesh form a triangular energy band cavity.

3. The system of claim 1 , wherein the first repelling mesh, the second repelling mesh, and the first attracting mesh form at least a portion of a square energy band cavity.

4. The system of claim 1 , wherein the first repelling mesh, the second repelling mesh, the first attracting mesh, and an electrode block form a square energy band cavity, and wherein the second repelling mesh and the electrode block have the same potential.

5. The system of claim 1 , further comprising a second detector configured to detect the charged particles that pass through the second repelling mesh.

6. The system of claim 1 , wherein the first detector is grounded.

7. The system of claim 1 , wherein the first detector is biased with a positive voltage.

8. The system of claim 1 , wherein the first detector is biased with a voltage that is tunable.

9. The system of claim 1 , wherein the first detector is biased with a voltage, and wherein the first attracting mesh shields the space between the first repelling mesh, the second repelling mesh, and the first attracting mesh from an electrical field from the detector.

10. The system of claim 1 , further comprising a deflector configured to alter a position of the path of the charged particles from the specimen before the charged particles reach the first repelling mesh.

11. The system of claim 10 , further comprising a focusing lens configured to focus the charged particles from the deflector and to collimate the charged particles having an energy that is higher than the first predetermined energy and lower than the second predetermined energy to pass through the first repelling mesh.

12. The system of claim 11 , further comprising differential potential electrodes surrounding the path of the charged particles between the focusing lens and the first repelling mesh.

13. The system of claim 12 , wherein the differential potential electrodes are configured for reducing formation of a lensing field between the focusing lens and the first repelling mesh.

14. The system of claim 1 , wherein an energy band between the first and second predetermined energies is equal to an energy band of 0 eV to 50 eV.

15. The system of claim 1 , wherein an energy band between the first and second predetermined energies is equal to an energy band of Em-100 eV, and wherein Em is a maximum emitting charged particle energy from the specimen.

16. The system of claim 1 , wherein an energy band between the first and second predetermined energies is equal to an energy band of 50 eV-Em, and wherein Em is a maximum emitting charged particle energy from the specimen.

17. The system of claim 1 , wherein the first and second predetermined energies are selected based on a type of defects to be detected on the specimen based on the output generated by the first detector.

18. The system of claim 1 , wherein the first and second predetermined energies are selected based on a type of the charged particles to be detected from the specimen.

19. The system of claim 1 , wherein an energy band between the first and second predetermined energies corresponds to energies of only secondary charged particles from the specimen, and wherein the computer subsystem is further configured to detect surface or voltage contrast defects on the specimen based on the output generated by the first detector.

20. The system of claim 1 , wherein an energy band between the first and second predetermined energies corresponds to energies of only elastic backscattering charged particles from the specimen, and wherein the computer subsystem is further configured to detect high aspect ratio or materials contrast defects on the specimen based on the output generated by the first detector.

21. The system of claim 1 , wherein an energy band between the first and second predetermined energies corresponds to energies of only inelastic backscattering charged particles from the specimen, and wherein the computer subsystem is further configured to detect buried defects on the specimen based on the output generated by the first detector.

22. The system of claim 21 , further comprising a third repelling mesh configured to repel the charged particles that pass through the second repelling mesh and have an energy that is lower than a third predetermined energy; a second attracting mesh configured to attract the charged particles that pass through the second repelling mesh, are repelled by the third repelling mesh, and have an energy that is higher than the second predetermined energy and lower than the third predetermined energy; and a second detector configured to generate output responsive to the charged particles that pass through the second attracting mesh.

23. The system of claim 22 , further comprising a fourth repelling mesh configured to repel the charged particles that pass through the third repelling mesh and have an energy that is lower than a fourth predetermined energy; a third attracting mesh configured to attract the charged particles that pass through the third repelling mesh, are repelled by the fourth repelling mesh, and have an energy that is higher than the third predetermined energy and lower than the fourth predetermined energy; and a third detector configured to generate output responsive to the charged particles that pass through the third attracting mesh.

24. The system of claim 23 , further comprising a fifth repelling mesh configured to repel the charged particles that pass through the fourth repelling mesh and have an energy that is lower than a fifth predetermined energy; a fourth attracting mesh configured to attract the charged particles that pass through the fourth repelling mesh, are repelled by the fifth repelling mesh, and have an energy that is higher than the fourth predetermined energy and lower than the fifth predetermined energy; and a fourth detector configured to generate output responsive to the charged particles that pass thro

Assignees

• Kla Corp

Inventors

• Jiang Youfei
• Steigerwald Michael

Classifications

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/24485

  Energy spectrometers · CPC title

• H01J2237/2448

  Secondary particle detectors · CPC title

• H01J2237/24475

  Scattered electron detectors · CPC title

• H01J2237/053

  electrostatic · CPC title