Method of forming one or more sliders

Patent metadata

Field	Value
Publication number	US-11749301-B2
Application number	US-202117401081-A
Country	US
Kind code	B2
Filing date	Aug 12, 2021
Priority date	Sep 22, 2020
Publication date	Sep 5, 2023
Grant date	Sep 5, 2023

Abstract

The present disclosure includes methods of using a sacrificial, protective head overcoat during the manufacture of sliders. In some embodiments, the final trailing edge topography of the transducer devices is formed before applying the sacrificial, protective head overcoat. In some embodiments, the final trailing edge topography of the transducer devices is formed after removing the sacrificial, protective head overcoat.

First claim

What is claimed is:

1. A method of forming one or more sliders, wherein the method comprises:
a) providing a substrate comprising one or more slider intermediates, wherein each slider intermediate has an air bearing surface and comprises a transducer region, wherein the transducer region comprises one or more transducer devices;
b) forming a final trailing edge topography in the transducer region;
c) after the forming, applying a sacrificial protective head overcoat to cover the air bearing surface, wherein the sacrificial protective head overcoat comprises at least one sacrificial protective head overcoat layer;
d) after applying the sacrificial protective head overcoat, patterning the air bearing surface of each slider intermediate to form an air bearing pattern;
e) after the patterning, removing the sacrificial protective head overcoat to expose the final trailing edge topography; and
f) after removing the sacrificial protective head overcoat, applying one or more final protective head overcoat layers to cover each final trailing edge topography and air bearing pattern and form the one or more sliders.

2. The method of claim 1 , wherein the forming comprises milling the substrate to remove a material from each slider intermediate in a lapping direction.

3. The method of claim 2 , wherein the milling removes the material at a depth in the lapping direction from 10 to 60 angstroms.

4. The method of claim 1 , wherein applying the sacrificial protective head overcoat comprises:
i) applying a first, sacrificial protective head overcoat layer to cover each air bearing surface; and
ii) applying a second, sacrificial protective head overcoat layer to cover the first, sacrificial protective head overcoat layer, wherein the second, sacrificial protective head overcoat layer has a different composition than the first, sacrificial protective head overcoat layer.

5. The method of claim 4 , wherein the first, sacrificial protective head overcoat layer has a thickness from 5 to 30 angstroms.

6. The method of claim 4 , wherein the first, sacrificial protective head overcoat layer comprises a material that forms an amorphous oxide when exposed to oxygen.

7. The method of claim 6 , wherein the material is chosen from silicon, nickel, chromium, titanium, tungsten, niobium, tantalum, hafnium, yttrium, and combinations thereof.

8. The method of claim 4 , wherein the second, sacrificial protective head overcoat layer has a thickness from 10 to 30 angstroms.

9. The method of claim 4 , wherein the second, sacrificial protective head overcoat layer comprises a diamond-like carbon material.

10. The method of claim 1 , wherein removing the sacrificial protective head overcoat comprises exposing the sacrificial protective head overcoat to oxygen plasma under conditions to remove at least a portion of the sacrificial protective head overcoat.

11. The method of claim 1 , wherein removing the sacrificial protective head overcoat comprises ion milling at least a portion of the sacrificial protective head overcoat to remove the at least a portion of the sacrificial protective head overcoat.

12. The method of claim 1 , wherein the one or more final protective head overcoat layers comprise:
a) a first protective head overcoat layer comprising a material chosen from amorphous silicon, an amorphous carbide, an amorphous nitride, an amorphous oxide, and combinations thereof, wherein the first protective head overcoat layer has a thickness of 6 angstroms or less; and
b) a second protective head overcoat layer comprising diamond-like carbon, wherein the second protective head overcoat layer has thickness from 10 to 20 angstroms, and wherein the first protective head overcoat layer underlies the second protective head overcoat layer.

13. The method of claim 1 , wherein the one or more transducer devices are chosen from at least one electromagnetic writer device, at least one magnetoresistive reader device, and combinations thereof.

14. A method of forming one or more sliders, wherein the method comprises:
a) providing a substrate comprising one or more slider intermediates, wherein each slider intermediate has an air bearing surface and comprises a transducer region, wherein the transducer region comprises one or more transducer devices;
b) a first milling to remove a material from each slider intermediate in a lapping direction, wherein the milling removes the material at a depth in the lapping direction of 15 angstroms or less;
c) after the first milling, applying a sacrificial protective head overcoat to cover the air bearing surface, wherein the sacrificial protective head overcoat comprises at least one sacrificial protective head overcoat layer;
d) after applying the sacrificial protective head overcoat, patterning the air bearing surface to form an air bearing pattern;
e) after the patterning, removing the sacrificial protective head overcoat;
f) a second milling to remove a material from each slider intermediate in the lapping direction to form a final trailing edge topography in the transducer region; and
g) after the second milling, applying one or more final protective head overcoat layers to cover each final trailing edge topography and air bearing pattern and form the one or more sliders.

15. The method of claim 14 , wherein the at least one sacrificial protective head overcoat layer has a thickness from 5 to 30 angstroms.

16. The method of claim 15 , wherein the at least one sacrificial protective head overcoat layer comprises a material chosen from a diamond-like carbon material, a silicon dioxide material, and combinations thereof.

17. The method of claim 16 , wherein removing the at least one sacrificial protective head overcoat layer comprises exposing the at least one sacrificial protective head overcoat layer to oxygen plasma under conditions to remove the at least one sacrificial protective head overcoat layer.

18. The method of claim 14 , wherein the second milling removes the material at a depth in the lapping direction from 10 to 50 angstroms.

19. The method of claim 14 , wherein the one or more transducer devices are chosen from at least one electromagnetic writer device, at least one magnetoresistive reader device, and combinations thereof.

20. The method of claim 14 , wherein the one or more final protective head overcoat layers comprises:
a) a first protective head overcoat layer comprising a material chosen from an amorphous silicon, an amorphous carbide, an amorphous nitride, an amorphous oxide, and combinations thereof, wherein the first protective head overcoat layer has a thickness of 6 angstroms or less; and
b) a second protective head overcoat layer comprising a diamond-like carbon material, wherein the second protective head overcoat layer has thickness from 10 to 20 angstroms, and wherein the first protective head overcoat layer underlies the second protective head overcoat layer.

Assignees

• Seagate Technology Llc

Inventors

• Bergerud Amy Jo
• Boyne Andrew Joseph
• Buettner Daniel Richard
• Wierman Kurt W
• Hoehn Joel W

Classifications

• G11B5/3169 Primary

  Working or finishing the interfacing surface of heads, e.g. lapping of heads · CPC title

• G11B5/3116 Primary

  Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks (G11B5/3113, G11B5/245 take precedence) · CPC title

• G11B5/4826

  Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive (G11B5/484 takes precedence; details of head housings or structures G11B5/10, G11B5/127; adjustment relative to the record carrier G11B5/56) · CPC title