Display device, method for forming a pattern and method for manufacturing display device

Patent metadata

Field	Value
Publication number	US-11740526-B2
Application number	US-202217713715-A
Country	US
Kind code	B2
Filing date	Apr 5, 2022
Priority date	Oct 30, 2019
Publication date	Aug 29, 2023
Grant date	Aug 29, 2023

Abstract

A display device includes a thin film transistor on a base substrate and a signal wiring electrically connected to the thin film transistor. The signal wiring includes a main conductive layer including copper, and a capping layer including titanium the capping layer overlapping a portion of an upper surface of the main conductive layer. The signal wiring has a taper angle in a range of about 70° to about 90°. A thickness of the capping layer is in a range of about 100 Å to about 300 Å, and a thickness of the main conductive layer is in a range of about 1,000 Å to about 20,000 Å.

First claim

What is claimed is:

1. A display device, comprising:
a thin film transistor disposed on a base substrate; and
a signal wiring electrically connected to the thin film transistor, the signal wiring including:
a main conductive layer including copper; and
a capping layer including titanium directly on the main conductive layer, the capping layer overlapping at least a portion of an upper surface of the main conductive layer, wherein

the signal wiring has a taper angle in a range of about 70° to about 90°,
a thickness of the capping layer is in a range of about 100 Å to about 300 Å, and
a thickness of the main conductive layer is in a range of about 1,000 Å to about 20,000 Å.

2. The display device of claim 1 , wherein the signal wiring includes an adhesion-improving layer including at least one of titanium, molybdenum and tungsten and disposed directly below the main conductive layer.

3. The display device of claim 2 , wherein a thickness of the adhesion-improving layer is in a range of about 50 Å to about 500 Å.

4. The display device of claim 2 , wherein the signal wiring is disposed directly on an ohmic contact layer that reduces a contact resistance with a source or drain electrode of the thin film transistor.

5. The display device of claim 1 , wherein the capping layer overlaps an entire upper surface of the main conductive layer.

6. A display device comprising:
a thin film transistor disposed on base substrate; and
a signal wiring electrically connected to the thin film transistor, the signal wiring including:
a main conductive layer including copper; and
a capping layer including titanium directly on the main conductive layer, the capping layer overlapping at least a portion of an upper surface of the main conductive layer, wherein
the signal wiring has a taper angle in a range of about 70° to about 90°,
a thickness of the capping layer is in a range of about 100| to about 300 Å, and
a thickness of the main conductive lay is in a range of about 1,000 Å to about 20,000 Å, wherein
the main conductive layer includes a first portion and a second portion, the first portion and the second portion having different taper angles from each other and consisting of a same material.

7. The display device of claim 6 , wherein
the first portion is disposed on the second portion, and
a first taper angle of the first portion is larger than a second taper angle of the second portion.

8. The display device of claim 1 , wherein the signal wiring includes:
a data line electrically connected to a source electrode of the thin film transistor, or
a gate line electrically connected to a gate electrode of the thin film transistor.

9. The display device of claim 1 , wherein a taper angle of the main conductive layer is different from a taper angle of the capping layer.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Seon-Il
• Cho Sung Won
• Kim Sang Gab
• Bae Su Bin
• Jeong Yu-Gwang
• Choi Dae Won

Classifications

• G02F1/1368 Primary

  in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)} · CPC title

• H10D86/441

  Interconnections, e.g. scanning lines · CPC title

• G02F1/13629 Primary

  Multilayer wirings · CPC title

• G02F1/136286 Primary

  Wiring, e.g. gate line, drain line · CPC title

• H10K50/8426

  Peripheral sealing arrangements, e.g. adhesives, sealants · CPC title