Flexible pressure sensor array and method for fabricating the same

Patent metadata

Field	Value
Publication number	US-11740143-B2
Application number	US-202117302983-A
Country	US
Kind code	B2
Filing date	May 18, 2021
Priority date	May 28, 2020
Publication date	Aug 29, 2023
Grant date	Aug 29, 2023

Abstract

The present disclosure provides a flexible pressure sensor array and method for fabricating the same. The pressure sensor array comprises a pressure-sensing substrate, top electrodes and bottom electrodes. The pressure-sensing substrate comprises a piezoresistive material, a fabric and pressure-sensing columns. The top electrodes and the bottom electrodes are attached to the pressure-sensing columns. The pressure sensor array is ultra-flexible and conforms to 3-dimensional surface for pressure monitoring.

First claim

What is claimed is:

1. A pressure sensor array comprising:
a pressure-sensing substrate comprising:
a piezoresistive material;
a fabric divided into a plurality of filling portions and a non-filling portion, the plurality of filling portions of the fabric being separated with each other by the non-filling portion of the fabric, the non-filling portion of the fabric being not filled with the piezoresistive material;
a plurality of pressure-sensing columns electrically separated with each other by the non-filling portion of the fabric, each pressure-sensing column comprising a respective filling portion of the fabric and the piezoresistive material, the respective filling portion of the fabric being filled with the piezoresistive material, each pressure-sensing column having a top column surface and a bottom column surface;
a plurality of top electrodes aligned on the pressure-sensing substrate in rows from a planar surface view of the pressure-sensing substrate, each top electrode electrically connecting to one or more respective top column surfaces of the pressure-sensing columns and stitched to the pressure-sensing substrate to be periodically attached to a respective top column surface of the pressure-sensing column and a bottom surface of the non-filling portion of the fabric; and
a plurality of bottom electrodes aligned on the pressure-sensing substrate in columns from the planar surface view of the pressure-sensing substrate, each bottom electrode electrically connecting to one or more respective bottom column surfaces of the pressure-sensing columns and stitched to the pressure-sensing substrate to be periodically attached to a respective bottom column surface of the pressure-sensing column and a top surface of the non-filling portion of the fabric,
the plurality of top electrodes and the plurality of bottom electrodes being stitched in a way that each cross point between the top electrodes and the bottom electrodes does not incur short circuit but only defines pixel point from the planar surface view of the pressure-sensing substrate.

2. The pressure sensor array of claim 1 further comprising a top adhesive tape and a bottom adhesive tape, wherein each top electrode is attached to the one or more respective top column surfaces, the top adhesive tape adheres to each top electrode and a top surface of the non-filling portion of the fabric; and each bottom electrode is attached to the one or more respective bottom column suffices, the bottom adhesive tape adheres to each bottom electrode and a bottom surface of the non-filling portion of the fabric.

3. The pressure sensor array of claim 1 , wherein each top electrode is fixed to a top surface of the non-filling portion of the fabric by, glue; and each bottom electrode is fixed to a bottom surface of the non-filling portion of the fabric by glue.

4. The pressure sensor array of claim 1 further comprising a plurality of top plastic covers and a plurality of bottom plastic covers, wherein each top plastic cover is located above a respective top column surface and a respective top electrode, a top surface of the non-filling, portion of the fabric and the plastic cover being stuck together by glue; and each bottom plastic cover is located below a respective bottom column surface and a respective bottom electrode, a bottom surface of the non-filling portion of the fabric and the bottom plastic cover being stuck together by glue.

5. The pressure sensor array of claim 1 , wherein each top electrode is a first metal-coated yarn; and each bottom electrode is a second metal-coated yarn.

6. The pressure sensor array of claim 5 , wherein each of the first metal-coated yarn and the second metal-coated yarn is a silver-coated yarn, stainless steel-coated yarn, or a copper-coated yarn.

7. The pressure sensor array of claim 1 , wherein
each of the top electrodes is stitched to the pressure-sensing substrate to be periodically attached to a top column surface of a first pressure-sensing column and a bottom column surface of a second pressure-sensing column in the same row from the planar surface view of the pressure-sensing substrate; and
each of the bottom electrodes is stitched to the pressure-sensing substrate to be periodically attached to a top column surface of a first pressure-sensing column and a bottom column surface of a second pressure-sensing column in the same column from the planar surface view of the pressure-sensing substrate.

8. The pressure sensor array of claim 1 , wherein the fabric is a cotton fabric or a blended fabric.

9. The pressure sensor array of claim 1 , wherein each pressure sensing column from the planar surface view of the pressure-sensing substrate has a cross section being circular, square or rectangular, and a width between 1 mm and 10 mm.

10. The pressure sensor array of claim 1 , wherein the piezoresistive material comprises a conductive material and a polymer, the polymer binding the conductive material to fibers of the fabric.

11. The pressure sensor array of claim 10 , wherein the conductive material is metal particles or a conductive carbon material.

12. The pressure sensor array of claim 11 , wherein the metal particles are made of silver or copper; and the conductive carbon material is carbon black, carbon nanotubes, grapheme, graphite, or a combination thereof.

13. The pressure sensor array of claim 10 , wherein the polymer is thermoplastic polyurethane (TPU), polyurethane (PU), phenoxy resin, polyacid, polyacrylic acid, polyacrylate, N,N-dimethylol-4,5-dihydroxyethylene urea (DMDHEU) resin, poly(vinyl alcohol) (PVA), or polyethylene glycol (PEG).

14. A pressure mapping system comprising:
a pressure sensor array of claim 1 ;
an electrical resistance meter for measuring electrical resistance of each pressure sensor of the pressure sensor array; and
a computer for imaging a pressure distribution profile based on the measured electrical resistance of each pressure senor.

15. A method for fabricating the pressure sensor array according to claim 7 , the method comprising:
a) providing a fabric divided into a plurality of filling portions and a non-filling portion;
b) placing a mold having a plurality of holes on a first surface of the fabric such that the plurality of filling portions of the fabric is exposed to the plurality of holes;
c) spraying a piezoresistive ink into the plurality of holes such that the plurality of filling portions of the fabric is soaked with the piezoresistive ink via the first surface thereby forming a partially piezoresistive ink-soaked fabric;
d) optionally, placing the mold on a second surface of the fabric and spraying the piezoresistive ink into the plurality of holes such that the plurality of filling portions of the fabric is soaked with the piezoresistive ink via the second surface thereby forming the partially piezoresistive ink-soaked fabric;
e) curing the piezoresistive ink in the partially piezoresistive ink-soaked fabric such that each filling portion of the fabric is filled with a piezoresistive material formed from the piezoresistive ink thereby forming a pressure-sensing substrate comprising a plurality of pressure-sensing columns electrically separated with each other by the non-filling portion of the fabric, each pressure-sensing column having a top column surface and a bottom column surface;
f) connecting each top electrode of a plurality of top electrodes to one or more respective top column surfaces of the pressure-sensing columns by stitching to periodically attach each of the top electrodes on a top column surface of a pressure-sensing column, pass through the non-filling portion, a

Assignees

• Nano & Advanced Materials Inst Ltd

Inventors

• Fu Li
• Xu Tao
• Chong Yam

Classifications

• G01L1/18 Primary

  using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material · CPC title

• D06P5/30

  Ink jet printing · CPC title

• D10B2401/18

  including electronic components · CPC title

• G01L1/205

  using distributed sensing elements · CPC title

• D06M11/83

  with metals; with metal-generating compounds, e.g. metal carbonyls; Reduction of metal compounds on textiles · CPC title