Lattice coat surface enhancement for chamber components

Patent metadata

Field	Value
Publication number	US-11739411-B2
Application number	US-201916673196-A
Country	US
Kind code	B2
Filing date	Nov 4, 2019
Priority date	Nov 4, 2019
Publication date	Aug 29, 2023
Grant date	Aug 29, 2023

Abstract

Disclosed are embodiments for an engineered feature formed as a part of or on a chamber component. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has an outer surface. An engineered complex surface is formed on the outer surface. The engineered complex surface has a first lattice framework formed from a plurality of first interconnected laths and a plurality of first openings are bounded by three or more laths of the plurality of laths.

First claim

What is claimed is:

1. A chamber component for a processing chamber, the chamber component comprising:
a component part body, the component part body having an outer surface; and
an engineered complex surface disposed on the outer surface, the engineered complex surface comprising:
a first lattice framework formed from a plurality of first interconnected laths, and wherein first openings are bounded by three or more laths of the plurality of first interconnected laths; and
a first spacer lath extending between the first lattice framework and the outer surface of the component part body, wherein the first spacer lath is in contact with the first lattice framework and the outer surface of the component part body wherein the first spacer lath creates a gap of space preventing the first lattice framework from touching the outer surface.

2. The chamber component of claim 1 , wherein the first lattice framework is a sleeve configured to slide over and fit on the component part body as an assembly and each lath of the plurality of first interconnected laths at an intersection of the plurality of first interconnected laths shares a single mass of material at the intersection.

3. The chamber component of claim 1 , wherein each lath of the plurality of first interconnected laths forms a continuous feature.

4. The chamber component of claim 1 , wherein the engineered complex surface further comprises:
a second lattice framework formed on the first lattice framework, wherein the second lattice framework is formed from a plurality of interconnected second laths, and wherein second openings are bounded by three or more second laths of the plurality of second interconnected laths.

5. The chamber component of claim 4 , wherein the engineered complex surface further comprises:
a second spacer lath formed between the first lattice framework and the second lattice framework, wherein the second spacer lath creates a gap preventing the first lattice framework from touching the second lattice framework.

6. The chamber component of claim 4 , wherein a first shape of the first openings in the first lattice framework is dissimilar from a second shape of the second openings in the second lattice framework.

7. The chamber component of claim 4 , wherein the first openings do not align with the second openings.

8. The chamber component of claim 4 , wherein one of the first openings is larger than a respective one of the second openings.

9. The chamber component of claim 4 , wherein the first lattice framework is substantially similar in shape to the second lattice framework and wherein the first lattice framework shifted to misalign the first lattice framework from the second lattice framework.

10. The chamber component of claim 4 , wherein the plurality of first interconnected laths of the first lattice framework do not touch the plurality of second interconnected laths of the second lattice framework.

11. The chamber component of claim 1 , wherein one or more of the first openings have a different number of individual laths in the plurality of first interconnected laths.

12. The chamber component of claim 1 , wherein the first lattice framework is formed in a sleeve without a backing and slides onto the outer surface.

13. The chamber component of claim 1 , wherein each lath of the plurality of first interconnected laths at an intersection of the plurality of first interconnected laths shares a single mass of material at the intersection.

14. The chamber component of claim 1 , wherein the chamber component is one of a deposition ring, a cover ring or a cups coil spacer.

Assignees

• Applied Materials Inc

Inventors

• Lam Lit Ping
• Thirunavukarasu Sriskantharajah
• Ong Ian

Classifications

• C23C14/0068 Primary

  characterised by means for confinement of gases or sputtered material, e.g. screens, baffles · CPC title

• B22F10/00

  Additive manufacturing of workpieces or articles from metallic powder (apparatus or devices therefor B22F12/00) · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title

• B81C1/00373

  Selective deposition, e.g. printing or microcontact printing · CPC title

• C23C16/4404

  Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title