Selector devices for a memory cell

Patent metadata

Field	Value
Publication number	US-11737286-B2
Application number	US-201916579136-A
Country	US
Kind code	B2
Filing date	Sep 23, 2019
Priority date	Nov 21, 2018
Publication date	Aug 22, 2023
Grant date	Aug 22, 2023

Abstract

A selector device includes a first electrode composed of a first metal having a first work function. A second electrode is composed of a second metal having a second work function. A selector layer is disposed between the first and second electrodes and is composed of a dielectric material having a conduction band and a valence band defining a band gap of at least 5 electron volts. Dopant atoms are disposed in the selector layer to form a sub-conduction band that is below the conduction band and above the work functions. When a threshold voltage is applied across the first and second electrodes, and a magnitude of the threshold voltage exceeds an energy difference between the sub-conduction band and the work functions, but does not exceed an energy difference between the conduction band and the work functions, an on-current will conduct through the selector layer.

First claim

What is claimed is:

1. A selector device comprising:
a first electrode composed of a first metal having a first work function;
a second electrode composed of a second metal having a second work function;
a selector layer disposed between the first and second electrodes, the selector layer being composed of a dielectric material having a conduction band and a valence band defining a band gap of at least 5 electron volts and below 9.2 electron volts; and
dopant atoms disposed in the selector layer to form a sub-conduction band that is below the conduction band and above the first and second work functions;
wherein when a threshold voltage is applied across the first and second electrodes, and a magnitude of the threshold voltage exceeds an energy difference between the sub-conduction band and at least one of the work functions, but does not exceed an energy difference between the conduction band and the at least one of the work functions, an on-current will conduct through the selector layer.

2. The selector device of claim 1 wherein when a half-threshold voltage that is half the threshold voltage or less is applied across the first and second electrodes, an off-current will conduct through the selector layer, a ratio of the on-current to off-current being 1000 or more.

3. The selector device of claim 2 wherein the ratio of on-current to off-current is 10,000 or more.

4. The selector device of claim 1 wherein the on-current will conduct through the selector layer as electrons pass from one dopant atom to another dopant atom by one of a trap-assisted tunneling mechanism, a hopping conduction mechanism, a Fowler Nordheim conduction mechanism and a sub-band drift transport mechanism.

5. The selector device of claim 1 wherein the selector layer is composed of at least one of aluminum oxide and magnesium oxide, wherein the at least one of aluminum oxide and magnesium oxide are optionally combined with silicon oxide.

6. The selector device of claim 1 wherein the dopant atoms are at least one of magnesium and vanadium, wherein the at least one of magnesium and vanadium are optionally combined with titanium.

7. The selector device of claim 1 wherein the sub-conduction band is in a range of 0.2 to 1.5 eV above the electrode work functions.

8. The selector device of claim 1 wherein the first metal of the first electrode and the second metal of the second electrode are each selected from at least one of tungsten, iridium, platinum, titanium nitride, tantalum nitride.

9. The selector device of claim 1 wherein the selector layer has a thickness that is within a range of 2 to 20 nanometers.

10. The selector device of claim 1 wherein the first and second electrodes have a thickness that are within a range of 5 to 200 nanometers.

11. The selector device of claim 1 wherein:
when the threshold voltage is applied across the first and second electrodes such that the first electrode voltage is negative relative to the second threshold voltage; and
when the threshold voltage exceeds an energy difference between the sub-conduction band and the first work function, but does not exceed an energy difference between the conduction band and the first work function; the on-current will conduct through the selector layer.

12. A memory cell comprising:
a two terminal resistive switching device comprising:
a switching layer having a first sidewall and a second sidewall;
a bottom electrode having a first sidewall, a second sidewall, a bottom surface, and a top surface in contact with the switching layer, wherein the switching layer overhangs the first sidewall of the bottom electrode by an overhang distance and the switching layer overhangs the second sidewall of the bottom electrode by an overhang distance; and
a top electrode disposed over the switching layer;

a selector device disposed on the two terminal resistive switching device, the selector device comprising:
a first electrode composed of a first metal having a first work function;
a second electrode composed of a second metal having a second work function;
a selector layer disposed between the first and second electrodes, the selector layer being composed of a dielectric material having a conduction band and a valence band defining a band gap of at least 5 electron volts (eV); and
dopant atoms disposed in the selector layer to form a sub-conduction band that is below the conduction band and above the first and second work functions.

13. The memory cell of claim 12 wherein the top electrode of the two terminal resistive switching device is the second electrode of the selector device.

14. The memory cell of claim 12 wherein the two terminal resistive switching device comprises:
one or more liners disposed over a first sidewall, a second sidewall, and a bottom surface of the bottom electrode, the one or more liners having first and second distal ends that are in contact with a bottom surface of the switching layer.

15. The memory cell of claim 12 wherein when a half-threshold voltage that is half threshold voltage or less is applied across the first and second electrodes, an off-current will conduct through the selector layer, the ratio of on-current to off-current being 1000 or more.

16. The memory cell of claim 12 wherein a on-current will conduct through the sub-conduction band of the selector layer as electrons pass from one dopant atom to another dopant atom by one of a trap-assisted tunneling mechanism, a hopping conduction mechanism, a Fowler Nordheim conduction mechanism and a sub-band drift transport mechanism.

17. The memory cell of claim 12 wherein:
the selector layer is composed of at least one of aluminum oxide and magnesium oxide, wherein the at least one of aluminum oxide and magnesium oxide are optionally combined with silicon oxide; and
the dopant atoms are at least one of magnesium and vanadium, wherein the at least one of magnesium and vanadium are optionally combined with titanium.

18. The memory cell of claim 12 wherein:
a threshold voltage of the selector device is less than an operating voltage of the two terminal resistive switching device; and
half the threshold voltage of the selector device is more than a third of the operating voltage of the two terminal resistive switching device.

19. The memory cell of claim 12 , wherein the bottom electrode is a trapezoidal structure.

Assignees

• Univ New York State Res Found

Inventors

• Beckmann Karsten
• Cady Nathaniel

Classifications

• H10B63/22 Primary

  of the metal-insulator-metal type · CPC title

• H10N70/041

  Modification of switching materials after formation, e.g. doping (shaping H10N70/061) · CPC title

• H10N70/841

  Electrodes · CPC title

• H10N70/8833

  Binary metal oxides, e.g. TaOx · CPC title

• H10B63/80

  Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays · CPC title