Stocker system for wafer cassette

Patent metadata

Field	Value
Publication number	US-11735451-B2
Application number	US-202016808166-A
Country	US
Kind code	B2
Filing date	Mar 3, 2020
Priority date	Sep 27, 2019
Publication date	Aug 22, 2023
Grant date	Aug 22, 2023

Abstract

A support member system is described for association with an overhead transport system. The support member system provides a safety feature to the overhead transport system by which the overhead transport system is able to avoid damage to wafers that are contained within a wafer cassette that is unintentionally released by the overhead transport system. The support member system is able to prevent such released cassettes from impacting the ground or tools located under the overhead transport system. The support member system targets wafer cassettes that have dimensions which are different than the dimensions of wafer cassettes for which the overhead transport system was originally designed to transport. Stocker systems for receiving, storing and delivering different types of wafer cassettes are also described.

First claim

The invention claimed is:

1. A support member system, comprising:
an overhead transport vehicle mounting bracket including a first pivot point located at a first end of the bracket, a second pivot point located at a second end of the bracket and at least one connection point;
a first support arm with a third pivot point located on a third end of the first support arm;
a second support arm with a fourth pivot point located on a fourth end of the second support arm;
an axle extending through the first pivot point, the second pivot point, the third pivot point, and the fourth pivot point; and
a support member coupled to an end of the first support arm opposite the third end and an end of the second support arm opposite the fourth end, and
wherein the first support arm and the second support arm are configured to, in operation, rotate about the third pivot point, the fourth pivot point, and the axle to move the first support arm, the second support arm, and the support member between a release position and a support position.

2. The support member system according to claim 1 , wherein when the overhead transport vehicle mounting bracket is associated with an overhead transport vehicle, the at least one connection point is attached to a side of the overhead transport vehicle.

3. The support member system according to the claim 1 , wherein the at least one connection point is two or more connection points.

4. The support member system according to claim 1 , wherein the support member includes:
a sidewall member coupled to the end of the first support arm opposite the third end of the first support arm and is coupled to the end of the second support arm opposite the fourth end of the second support arm; and
a plate connected to an edge of the sidewall member, the plate oriented substantially perpendicular to a portion of the sidewall member.

5. The support member system according to claim 1 , further comprising:
a first overhead transport vehicle interface member, which when the overhead transport vehicle mounting bracket is associated with an overhead transport vehicle, is connected to a first support member of the overhead transport vehicle;
a second overhead transport vehicle interface member, which when the overhead transport vehicle mounting bracket is associated with the overhead transport vehicle, is connected to a second support member of the overhead transport vehicle;
a joint bar extending between and connected to the first overhead transport vehicle interface member and the second overhead transport vehicle interface member; and
a transfer member connected to one of or both of the first overhead transport vehicle interface member and the second overhead transport vehicle interface member.

6. The support member system to claim 5 , wherein the transfer member includes a roller.

7. The support member system according to claim 5 , further comprising a stabilizer associated with one of or both of the first overhead transport vehicle interface member and the second overhead transport vehicle interface member.

8. The support member system according to claim 7 , wherein the stabilizer includes a damper.

9. A wafer cassette stocker system comprising:
an overhead transport vehicle including a support member system that includes:
an overhead transport vehicle mounting bracket including a first pivot point located at a first end of the bracket, a second pivot point located at a second end of the bracket and at least one connection point;
a first support arm with a third pivot point located on a third end of the first support arm;
a second support arm with a fourth pivot point located on a fourth end of the second support arm;
an axle extending through the first pivot point, the second pivot point, the third pivot point, and the fourth pivot point; and
a support member coupled to an end of the first support arm opposite the third end and an end of the second support arm opposite the fourth end, and
wherein when the overhead transport vehicle mounting bracket is associated with the overhead transport vehicle, the at least one connection point is attached to a side of the overhead transport vehicle;

a multi-cassette stocker system including:
a rack;
a first guide arm attached to the rack; and
a second guide arm attached to the rack, the second guide arm parallel to the first guide arm, and
wherein the first guide arm and the second guide arm are spaced apart from each other to accommodate at least two types of wafer cassette.

10. The wafer cassette stocker system according to claim 9 , wherein the first guide arm includes:
a first front guide block; and
a first rear guide block, the first front guide block disposed at a front end of the first guide arm and the first rear guide block disposed at a rear end of the first guide arm
wherein the second guide arm includes:
a second front guide block; and
a second rear guide block, the second front guide block disposed at a front end of the second guide arm and the second rear guide block disposed at a rear end of the second guide arm.

11. The wafer cassette stocker system according to claim 10 , wherein the first guide arm includes:
a first front upper guide body disposed on the first front guide block; and
a first rear upper guide body disposed on the first rear guide block,
wherein the second guide arm includes:
a second front upper guide body disposed on the second front guide block; and
a second rear upper guide body disposed on the second rear guide block.

12. The wafer cassette stocker system according to claim 11 , wherein at least one of the first front upper guide body, the first rear upper guide body, the second front upper guide body, and the second rear upper guide body includes an inclined surface.

13. The wafer cassette stocker system according to claim 11 , wherein:
the first front upper guide body includes a first inclined surface;
the second front upper guide body includes a second inclined surface that faces the first inclined surface;
the first rear upper guide body includes a third inclined surface; and
the second rear upper guide body includes a fourth inclined surface that faces the third inclined surface.

14. The wafer cassette stocker system according to claim 9 , further comprising at least one Overhead Hoist Transport (OHT) port.

15. The wafer cassette stocker system according to claim 10 , wherein top surfaces of the first front guide block, the first rear guide block, the second front guide block, and the second rear guide block are arranged to support an A type wafer cassette.

16. The wafer cassette stocker system according to claim 15 , wherein the first front guide block and the first rear guide block are arranged to have a first space for a first bottom center part of a B type wafer cassette between the first front guide block and the first rear guide block, and
wherein the second front guide block and the second rear guide block are arranged to have a second space for a second bottom center part of the B type wafer cassette between the second front guide block and the second rear guide block.

17. The wafer cassette stocker system according to claim 9 , further comprising a wafer cassette sorter having at least one wafer cassette detection sensor, wherein the wafer cassette detection sensor is used to determine whether a wafer cassette is an A type wafer cassette or a B type wafer cassette.

18. A support member system, comprising:
an overhead transport vehicle mounting bracket including a first pivot point located at a first end of the

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Li Guancyun
• Chang Ching-Jung
• Tung Chi-Feng
• Shen Hsiang Yin

Classifications

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• H10P72/3214

  by means of a cart or a vehicle · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/0611

  Sorting devices · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title