Probe pin inspection mechanism and inspection apparatus

Patent metadata

Field	Value
Publication number	US-11733268-B2
Application number	US-201817414224-A
Country	US
Kind code	B2
Filing date	Dec 17, 2018
Priority date	Dec 17, 2018
Publication date	Aug 22, 2023
Grant date	Aug 22, 2023

Abstract

A probe pin inspection mechanism a includes a base, a pair of movable bodies, a pair of movable-body elastic bodies, and a conductor. The movable bodies are supported by the base to be movable in a first direction from a first position with respect to the base, and respectively include ends and terminals electrically connected to the respective ends. The movable-body elastic bodies elastically press the movable bodies in a second direction. The conductor is supported by the base and electrically connects the terminals of the movable bodies by making contact with the terminals. The state between the terminals and the conductor is switched, according to the position of the movable bodies, between a conductive state in which the terminals and the conductor are in contact with each other and a non-conductive state in which the terminals and the conductor are separated from each other.

First claim

The invention claimed is:

1. A probe pin inspection mechanism, comprising:
a base;
a pair of movable bodies respectively including ends and terminals, each of the pair of movable bodies being supported by the base to be movable in a first direction from a first position with respect to the base, the ends being located in a second direction opposite to the first direction, the terminals being electrically connected to the respective ends, and the pair of movable bodies being arranged in a direction intersecting the first direction;
a pair of movable-body elastic bodies provided for the respective movable bodies and interposed between the respective movable bodies and the base, the pair of movable-body elastic bodies elastically pressing the respective movable bodies in the second direction; and
a conductor supported by the base, the conductor electrically connecting the terminals of the pair of movable bodies by making contact with the terminals, wherein
the ends of the pair of movable bodies are capable of making contact with respective probe pins, and
a state between the terminals and the conductor is switched, according to a position of the movable bodies, between a conductive state in which the terminals and the conductor are in contact with each other and a non-conductive state in which the terminals and the conductor are separated from each other.

2. The probe pin inspection mechanism according to claim 1 , wherein
the probe pins respectively include: support bodies; pins supported by the respective support bodies to be movable in the second direction and protruding in the first direction from the respective support bodies to be capable of making contact with the respective ends; and pin elastic bodies pressing the respective pins in the first direction, and
force exerted by the movable-body elastic bodies pressing the movable bodies located in the first position in the second direction is greater than force exerted by the pin elastic bodies of the normal probe pins pressing the pins in the first direction.

3. The probe pin inspection mechanism according to claim 1 , wherein
when the movable bodies are located in the first position, the terminals and the conductor are in the conductive state, and
when the movable bodies are located in a second position further in the first direction than the first position, the terminals and the conductor are in the non-conductive state.

4. An inspection apparatus, comprising:
the probe pin inspection mechanism according to claim 1 ; and
a detection unit configured to detect an abnormality of the probe pins based on the state between the terminals and the conductor.

5. The inspection apparatus according to claim 4 , further comprising:
a probe pin module including a plurality of the probe pins;
a support tool including, as supportable support objects, a secondary battery and the probe pin inspection mechanism; and
a movement mechanism that moves the probe pin module and the support tool relative to each other along the first direction to bring the probe pins and the support objects supported by the support tool into contact with each other.

6. The inspection apparatus according to claim 5 , wherein the support tool is capable of selectively supporting a plurality of the secondary batteries and a plurality of the probe pin inspection mechanisms.

7. The inspection apparatus according to claim 5 , further comprising:
a plurality of the probe pin modules;
a plurality of the support tools provided for the respective probe pin modules; and
a plurality of the movement mechanisms provided for the respective probe pin modules, wherein
the detection unit is configured to perform detection processing to detect an abnormality of the probe pins for each of the probe pin modules.

8. The inspection apparatus according to claim 5 , wherein, when the support tool supporting the probe pin inspection mechanism is supplied to the movement mechanism, the detection unit is configured to perform detection processing to detect an abnormality of the probe pins of the probe pin module corresponding to the movement mechanism.

Assignees

• Toshiba Kk

Inventors

• Sato Shingo
• Takahashi Akihiro

Classifications

• G01R1/07314 Primary

  the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735) · CPC title

• G01R1/06722

  Spring-loaded · CPC title

• G01R31/36

  Arrangements for testing, measuring or monitoring the electrical condition of accumulators or electric batteries, e.g. capacity or state of charge [SoC] · CPC title

• G01R1/06794 Primary

  Devices for sensing when probes are in contact, or in position to contact, with measured object · CPC title

• G01R35/00

  Testing or calibrating of apparatus covered by the other groups of this subclass · CPC title