Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use

Patent metadata

Field	Value
Publication number	US-11733224-B2
Application number	US-202217583712-A
Country	US
Kind code	B2
Filing date	Jan 25, 2022
Priority date	Dec 1, 2017
Publication date	Aug 22, 2023
Grant date	Aug 22, 2023

Abstract

The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the compound stream flowing within the sampling tube based on the measured temperature change of the sampling tube.

First claim

What is claimed is:

1. A method of measuring the concentration of radicals in a gas stream, comprising:
flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber;
providing at least one sampling reaction module having at least one sampling tube therein;
establishing a reference temperature of the at least one sampling tube with at least one thermal control module;
diverting a portion of the radical gas steam from the at least one radical gas generator into the at least one sampling tube;
reacting at least one reagent with at least one radical gas within a defined volume of the at least one radical gas stream thereby forming at least one chemical species within at least one compound stream, the at least one compound stream flowing within the at least one sampling tube;
measuring a change of temperature of the at least one sampling tube due to interaction of the at least one chemical species within the at least one compound stream and the sampling tube with at least one sensor module; and
calculating a concentration of the at least one chemical species within the at least one compound stream flowing within the at least on sampling tube based on the measured temperature change of the at least one sampling tube.

2. The method of claim 1 wherein the at least one reagent comprises carbon-based materials.

3. The method of claim 1 wherein the at least one reagent comprises at least one material selected from the group consisting of graphite, silica, carbon fiber, silicon dioxide, and silicon carbide.

4. The method of claim 1 further comprising flowing at least one fluid over the at least one sampling tube to establish the reference temperature of the at least one sampling tube.

5. The method of claim 1 further comprising flowing water over the at least one sampling tube to establish the reference temperature of the at least one sampling tube.

6. The method of claim 1 further comprising flowing at least one gas over the at least one sampling tube to establish the reference temperature of the at least one sampling tube.

7. The method of claim 1 further comprising:
coupling at least one flow measurement module in fluid communication with the at least one sampling reaction module; and
measuring a volume of the at least one of the at least one radical gas stream and at least one compound stream with the at least one flow measurement module.

8. The method of claim 7 further comprising measuring a volume of the at least one of the at least one radical gas stream and at least one compound stream with the at least one mass flow verifier wherein at least one mass flow verifier constitutes the at least one flow measurement module.

9. The method of claim 7 controllably adjusting to generation of at least one radical gas stream emitted from the at least one radical gas generator with at least one processor based on data received from at least one of, the at least one sampling module, the at least one sensor module, and the at least one flow measurement module.

10. The method of claim 1 further comprising exhausting the at least one radical gas stream from the at least one sampling module via at least one exhaust conduit.

Assignees

• Mks Instr Inc

Inventors

• Chiu Johannes
• Chen Xing
• Tai Chiu-Ying
• Harris Michael
• Aupta Atul

Classifications

• G01N21/3504

  for analysing gases, e.g. multi-gas analysis · CPC title

• G01N21/75

  Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated (systems in which material is burnt in a flame or plasma G01N21/72, G01N21/73) · CPC title

• G01N2021/3595

  using FTIR · CPC title

• G01N33/0031 Primary

  comprising two or more sensors, e.g. a sensor array · CPC title

• G01K17/06

  Measuring quantity of heat conveyed by flowing media, e.g. in heating systems (G01K17/02, G01K17/04 take precedence){e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device} · CPC title