Solid-state shear stress sensors with high selectivity
US-10309845-B2 · Jun 4, 2019 · US
US11733114B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11733114-B2 |
| Application number | US-201917278634-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 18, 2019 |
| Priority date | Sep 20, 2018 |
| Publication date | Aug 22, 2023 |
| Grant date | Aug 22, 2023 |
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An electrostatic capacitance detection device is provided, which is provided with a first electrode, an insulating layer on the first electrode, and a second electrode on the insulating layer, the electrostatic capacitance detection device being configured to calculate a shear force applied from above an upper portion of the second electrode.
Opening claim text (preview).
The invention claimed is: 1. An electrostatic capacitance detection device formed with a first electrode, an insulating layer on the first electrode, and a second electrode on the insulating layer, the electrostatic capacitance detection device configured to calculate a shear force applied from above an upper portion of the second electrode, wherein the first electrode is formed of an island-shaped pattern, the island shaped patterns comprise rectangular shapes, rectangular shapes with rounded corners, parallelograms, parallelograms with rounded corners, or ovals, the second electrode is formed of two layers of an upper second electrode and a lower second electrode, an insulating film is interposed between the upper second electrode and the lower second electrode, and the upper second electrode and the lower second electrode are formed of a plurality of linear patterns intersecting in a plan view, a portion of the island-shaped pattern of the first electrode overlaps with a portion of the pattern of the upper second electrode and a portion of the pattern of the lower second electrode in a plan view, and the lower second electrode is located between the upper second electrode and the first electrode, a region where a portion of the island-shaped pattern of the first electrode overlaps with a portion of the pattern of the upper second electrode in a planer view is larger than a region where a portion of the island-shaped pattern of the first electrode overlaps with a portion of the pattern of the lower second electrode in a planer view. 2. The electrostatic capacitance detection device according to claim 1 , wherein the first electrode includes a plurality of electrodes, the electrostatic capacitance detection device further includes a plurality of AC drive circuits, each of the electrodes of the first electrode is connected to a processing unit via one AC drive circuit, the processing unit controls the AC drive circuits via a drive circuit, each of the AC drive circuits is a circuit that includes two or more inputs configured to receive signals from the drive circuit and one output configured to output an alternating signal to each of the electrodes of the first electrode and is configured to respectively apply the alternating signal to the each of the electrodes of the first electrode in accordance with an input signal pattern from the drive circuit, and the second electrode is connected via a signal conversion unit to the processing unit. 3. The electrostatic capacitance detection device according to claim 1 , wherein the insulating layer is formed of a plurality of layers sequentially stacked with each other, and the plurality of insulating layers are configured such that a layer having a low elastic modulus is stacked on a layer having a high elastic modulus. 4. The electrostatic capacitance detection device according to claim 1 , wherein the insulating layer is formed of a plurality of layers sequentially stacked with each other, and the plurality of insulating layers are formed of a plurality of foams having different bubble sizes. 5. The electrostatic capacitance detection device according to claim 1 , wherein the insulating layer is formed of a plurality of layers sequentially stacked with each other, and the plurality of insulating layers are formed of a plurality of electrorheological fluids having different viscoelasticity. 6. The electrostatic capacitance detection device according to claim 1 , wherein the insulating layer is formed of a plurality of layers sequentially stacked with each other, and a protecting layer is formed on the second electrode, and the protecting layer includes cut-in on its surface. 7. The electrostatic capacitance detection device according to claim 1 , wherein the insulating layer has a multi-layer structure made of foams of an identical material that are sequentially stacked with each other, and the insulating layer has gradation such that a hardness or elastic modulus of the material changes in a stepwise manner in a certain direction. 8. The electrostatic capacitance detection device according to claim 1 , wherein the insulating layer has gradation such that physical properties or chemical properties change in a stepwise manner in a certain direction, and the insulating layer is formed of a single layer. 9. The electrostatic capacitance detection device according to claim 8 , wherein the insulating layer is formed of a foam having gradation such that a bubble concentration or bubble size changes in a stepwise manner.
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