A method for characterizing a manufacturing process of semiconductor devices
US-2022100098-A1 · Mar 31, 2022 · US
US11727171B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11727171-B2 |
| Application number | US-202017037226-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 29, 2020 |
| Priority date | Sep 29, 2020 |
| Publication date | Aug 15, 2023 |
| Grant date | Aug 15, 2023 |
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In some embodiments, techniques for creating a fabricable segmented design for a physical device are provided. A computing system receives a design specification. The computing system generates a proposed segmented design based on the design specification. The computing system determines one or more fabricable segmented designs based on the proposed segmented design. The computing system determines an overall fabrication loss value based on the one or more fabricable segmented designs. The computing system backpropagates a gradient of the overall fabrication loss value to create an updated design specification.
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What is claimed is: 1. A non-transitory computer-readable medium having logic stored thereon that, in response to execution by one or more processors of a computing system, causes the computing system to perform actions for creating a fabricable segmented design for a physical device, the actions comprising: receiving, by the computing system, a design specification; generating, by the computing system, a proposed segmented design based on the design specification; determining, by the computing system, one or more fabricable segmented designs based on the proposed segmented design; for each fabricable segmented design of the one or more fabricable segmented designs, generating a fabrication loss matrix that represents differences between the fabricable segmented design and the proposed segmented design by: comparing segments of the fabricable segmented design to corresponding segments of the proposed segmented design; and in response to detecting a difference between a material indicated by a segment of the fabricable segmented design and a material indicated by a corresponding segment of the proposed segmented design, adding a value that represents the difference between the material indicated by the segment of the fabricable segmented design and the material indicated by the corresponding segment of the proposed segmented design to the fabrication loss matrix: determining, by the computing system, an overall fabrication loss value based on the fabrication loss matrices; and backpropagating, by the computing system, a gradient of the overall fabrication loss value to create an updated design specification. 2. The non-transitory computer-readable medium of claim 1 , wherein determining the overall fabrication loss value based on the one or more fabrication loss matrices further includes reducing each separate fabrication loss matrix to a scalar value. 3. The non-transitory computer-readable medium of claim 2 , wherein reducing each separate fabrication loss matrix to the scalar value includes at least one of: determining a sum of values in the fabrication loss matrix; determining a sum of squares of values in the fabrication loss matrix; and determining an average of values in the fabrication loss matrix. 4. The non-transitory computer-readable medium of claim 2 , wherein determining the overall fabrication loss value based on the one or more fabricable segmented designs further includes reducing the scalar values to an overall scalar value. 5. The non-transitory computer-readable medium of claim 4 , wherein reducing the scalar values to the overall scalar value includes at least one of: determining a minimum value of the scalar values; and multiplying the scalar values. 6. The non-transitory computer-readable medium of claim 1 , wherein the actions further comprise: generating a new proposed segmented design based on the updated design specification. 7. The non-transitory computer-readable medium of claim 6 , wherein the actions further comprise: in response to determining that a fabrication loss of the new proposed segmented design fails to meet a fabricability threshold: determining one or more new fabricable segmented designs based on the new proposed segmented design; determining a new overall fabrication loss value based on the one or more new fabricable segmented designs; and backpropagating a gradient of the new overall fabrication loss value to create a second updated design specification. 8. The non-transitory computer-readable medium of claim 7 , wherein determining the new overall fabrication loss value based on the one or more new fabricable segmented designs includes determining the new overall fabrication loss value based on the one or more new fabricable segmented designs and the one or more fabricable segmented designs. 9. The non-transitory computer-readable medium of claim 6 , wherein the actions further comprise: in response to determining that a fabrication loss of the new proposed segmented design meets a fabricability threshold, providing the new proposed segmented design to a fabrication system to manufacture the physical device. 10. A method of creating a fabricable segmented design for a physical device, the method comprising: receiving, by a computing system, a design specification; generating, by the computing system, a proposed segmented design based on the design specification; determining, by the computing system, one or more fabricable segmented designs based on the proposed segmented design; for each fabricable segmented design of the one or more fabricated segmented designs, generating a fabrication loss matrix that represents differences between the fabricable segmented design and the proposed segmented design by: comparing segments of the fabricable segmented design to corresponding segments of the proposed segmented design; and in response to detecting a difference between a material indicated by a segment of the fabricable segmented design and a material indicated by a corresponding segment of the proposed segmented design, adding a value that represents the difference between the material indicated by the segment of the fabricable segmented design and the material indicated by the corresponding segment of the proposed segmented design to the fabrication loss matrix; determining, by the computing system, an overall fabrication loss value based on the fabrication loss matrices; and backpropagating, by the computing system, a gradient of the overall fabrication loss value to create an updated design specification. 11. The method of claim 10 , wherein determining the overall fabrication loss value based on the one or more fabrication loss matrices further includes reducing each separate fabrication loss matrix to a scalar value. 12. The method of claim 11 , wherein reducing each separate fabrication loss matrix to the scalar value includes at least one of: determining a sum of values in the fabrication loss matrix; determining a sum of squares of values in the fabrication loss matrix; and determining an average of values in the fabrication loss matrix. 13. The method of claim 11 , wherein determining the overall fabrication loss value based on the one or more fabricable segmented designs further includes reducing the scalar values to an overall scalar value. 14. The method of claim 13 , wherein reducing the scalar values to the overall scalar value includes at least one of: determining a minimum value of the scalar values; and multiplying the scalar values. 15. The method of claim 10 , further comprising: generating a new proposed segmented design based on the updated design specification. 16. The method of claim 15 , further comprising: in response to determining that a fabrication loss of the new proposed segmented design fails to meet a fabricability threshold: determining one or more new fabricable segmented designs based on the new proposed segmented design; determining a new overall fabrication loss value based on the one or more new fabricable segmented designs; and backpropagating a gradient of the new overall fabrication loss value to create a second updated design specification. 17. The method of claim 16 , wherein determining the new overall fabrication loss value based on the one or more new fabricable segmented designs includes determining the new overall fabrication loss value based on the one or more new fabricable segmented designs and the one or more fabricable segmented designs. 18. The method of claim 15 , further comprising: in response to det
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