Inertial sensor sampling with combined sense axes

Patent metadata

Field	Value
Publication number	US-11726107-B2
Application number	US-202017027948-A
Country	US
Kind code	B2
Filing date	Sep 22, 2020
Priority date	Oct 29, 2019
Publication date	Aug 15, 2023
Grant date	Aug 15, 2023

Abstract

A sensor system includes a transducer for sensing a physical stimulus along at least two orthogonal axes and an excitation circuit. The transducer includes a movable mass configured to react to the physical stimulus and multiple differential electrode pairs of electrodes. Each of the electrode pairs is configured to detect displacement of the movable mass along one of the orthogonal axes. The excitation circuit is connectable to the electrodes in various electrode connection configurations, with different polarity schemes, that enable excitation and sampling of each of the orthogonal axes during every sensing period. For each sensing period, a composite output signal is produced that includes the combined information sensed along each of the orthogonal axes. The individual sense signals for each orthogonal axis may be extracted from the composite output signals.

First claim

The invention claimed is:

1. A sensor system comprising:
a transducer configured to sense a physical stimulus along a first axis and a second axis, the second axis being orthogonal to the first axis, the transducer including:
a movable mass configured to react to the physical stimulus;
first and second electrodes that are immovable relative to the movable mass, the first and second electrodes being configured as a first differential electrode pair for detecting a first displacement of the movable mass along the first axis in response to the physical stimulus; and
third and fourth electrodes that are immovable relative to the movable mass, the third and fourth electrodes being configured as a second differential electrode pair for detecting a second displacement of the movable mass along the second axis in response to the physical stimulus; and
an excitation circuit selectively connectable to the first, second, third, and fourth electrodes and configured to provide an excitation voltage, wherein:
during a first sensing period, a first terminal of the excitation circuit is coupled to the first and third electrodes and a second terminal of the excitation circuit is coupled to the second and fourth electrodes in a first connection configuration; and
during a second sensing period, the first terminal of the excitation circuit is coupled to the first and fourth electrodes and the second terminal of the excitation circuit is coupled to the second and third electrodes in a second connection configuration;

wherein the transducer is configured to produce a first composite output signal, the first composite output signal representing the first displacement of the movable mass along the first axis combined with the second displacement of the movable mass along the second axis during the first sensing period;
wherein the transducer is configured to produce a second composite output signal representing the first displacement of the movable mass along the first axis combined with the second displacement of the movable mass along the second axis during the second sensing period;
wherein the sensor system further comprises a measuring circuit electrically coupled with the transducer for measuring the first composite output signal from the transducer responsive to the excitation voltage during the first sensing period and for measuring the second composite output signal from the transducer responsive to the excitation voltage during the second sensing period;
wherein the measuring circuit comprises an extraction circuit configured to concurrently utilize the first and second composite output signals to extract a first sense signal indicative of the first displacement of the movable mass along the first axis and to extract a second sense signal indicative of the second displacement of the movable mass along the second axis;
wherein the transducer is further configured to sense the physical stimulus along a third axis, the third axis being orthogonal to each of the first and second axes:
wherein the transducer further includes:
fifth and sixth electrodes that are immovable relative to the movable mass, the fifth and sixth electrodes being configured as a third differential electrode pair for detecting a third displacement of the movable mass along the third axis in response to the physical stimulus;

wherein the excitation circuit is further selectively connectable to the fifth and sixth electrodes to provide the excitation voltage, wherein:
during the first sensing period, the first terminal is additionally coupled to the fifth electrode and the second terminal is additionally coupled to the sixth electrode in the first connection configuration;
during the second sensing period, the first terminal is additionally coupled to the fifth electrode and the second terminal is additionally coupled to the sixth electrode in the second connection configuration;
during a third sensing period, the first terminal is coupled to the first, third, and sixth electrodes, and the second terminal is coupled to the second, fourth, and fifth electrodes in a third connection configuration; and
during a fourth sensing period, the first terminal is coupled to the first, fourth, and sixth electrodes, and the second terminal is coupled to second, third, and fifth electrodes in a fourth connection configuration;

wherein the transducer is configured to produce a corresponding one of the first composite output signal, the second composite output signal, a third composite output signal, and a fourth composite output signal, each of which represents the first displacement of the movable mass along the first axis, combined with the second displacement of the movable mass along the second axis, and combined with the third displacement of the movable mass along the third axis during each of the first, second, third, and fourth sensing periods; and
wherein the extraction circuit is further configured to concurrently utilize the first, second, third, and fourth composite output signals to extract the first and second sense signals, and to further extract a third sense signal indicative of the third displacement of the movable mass along the third axis.

2. The sensor system of claim 1 wherein:
the transducer is configured to produce a first signal component between the movable mass and the first electrode, a second signal component between the movable mass and the second electrode, a third signal component between the movable mass and the third electrode, and a fourth signal component between the movable mass and the fourth electrode, wherein:
the first composite output signal is proportional to a summation of the first and third signal components subtracted by a summation of the second and fourth signal components during the first sensing period; and
the second composite output signal is proportional to a summation of the first and fourth signal components subtracted by a summation of the second and third signal components during the second sensing period.

3. The sensor system of claim 1 wherein the measuring circuit further comprises an analog-to-digital converter (ADC) circuit configured to receive the first composite output signal and provide a first digital signal representative of the first composite output signal, and the ADC circuit being further configured to receive the second composite output signal and provide a second digital signal representative of the second composite output signal, and wherein the extraction circuit is configured to utilize the first and second digital signals to extract the first and second sense signals.

4. The sensor system of claim 3 wherein the measuring circuit further comprises a gain circuit interconnected between the transducer and the ADC circuit, the gain circuit being configured to apply a gain value to each of the first and second composite output signals, the gain value corresponding to a full scale input range of the ADC circuit.

5. The sensor system of claim 3 wherein the extraction circuit is configured to receive the first and second digital signals from the ADC circuit, extract the first sense signal by summation of the first and second digital signals, and extract the second sense signal by subtraction of the second digital signal from the first digital signal.

6. The sensor system of claim 1 wherein:
the excitation circuit is selectively connectable to the first, second, third, and fourth electrodes during a plurality of sensing periods, wherein:
during first instances of the plurality of sensing periods, the first terminal of the excitation circuit is coupled to the first and third electrodes and the second terminal of the excitation circuit is coupled to the second and fourth electrodes in the first connection configuration;
during second instances of the plurality of

Assignees

• Nxp Usa Inc

Inventors

• Mcneil Andrew C
• Enjalbert Jerome Romain
• Beckwith Joel Cameron
• Tang Jun

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• B81B3/0027

  Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation · CPC title

• B81B2201/0228

  Inertial sensors · CPC title

• G01P15/18 Primary

  in two or more dimensions · CPC title

• G01P2015/082

  for two degrees of freedom of movement of a single mass · CPC title