Method for manufacturing a micromechanical device and micromechanical valve
US-2022082181-A1 · Mar 17, 2022 · US
US11725749B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11725749-B2 |
| Application number | US-202117515792-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 1, 2021 |
| Priority date | Nov 2, 2020 |
| Publication date | Aug 15, 2023 |
| Grant date | Aug 15, 2023 |
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A passive microfluidic valve includes a first manifold portion having a first chamber; a first inlet fluidly coupled to the first chamber; and a second inlet. The valve also includes a second manifold portion in fluid communication with the first chamber via a channel. The second manifold portion includes a second chamber fluidly coupled to the first chamber and the second inlet. The valve further includes a flexible membrane disposed between the first manifold portion and the second manifold portion and separating the first chamber and the second chamber, the flexible membrane configured to modulate a flow rate of a media flowing between the first inlet and the second inlet in either direction in response to pressure of the media flow.
Opening claim text (preview).
What is claimed is: 1. A passive microfluidic valve comprising: a first manifold portion including: a first chamber; a first inlet fluidly coupled to the first chamber; and a second inlet; a second manifold portion in fluid communication with the first chamber via a channel, the second manifold portion including a second chamber fluidly coupled to the first chamber and the second inlet; and a flexible membrane disposed between the first manifold portion and the second manifold portion and separating the first chamber and the second chamber, the flexible membrane configured to modulate a flow rate of a media flowing between the first inlet and the second inlet in either direction in response to pressure of the media flow. 2. The passive microfluidic valve according to claim 1 , wherein the flexible membrane includes a deflection portion separating the first chamber and the second chamber. 3. The passive microfluidic valve according to claim 2 , wherein the deflection portion is configured to limit the flow rate of the media in a first direction, in which the media flows from the first inlet to the second inlet, in response to pressure of the media flow. 4. The passive microfluidic valve according to claim 3 , wherein the deflection portion is further configured to deflect toward an inner surface of the second chamber while the media flow is in the first direction and partially occluding the second chamber. 5. The passive microfluidic valve according to claim 3 , wherein the deflection portion is further configured to at least one of limit the flow rate of the media flow or block flow of the media in a second direction, in which the media flows from the second inlet to the first inlet, in response to pressure of the media flow. 6. The passive microfluidic valve according to claim 5 , wherein the deflection portion is further configured to deflect toward an inner surface of the first chamber while the media flow is in the second direction and at least one of partially occluding the second chamber or blocking the first inlet. 7. The passive microfluidic valve according to claim 1 , wherein each of the first manifold portion, the second manifold portion, and the flexible membrane is formed from an elastomer. 8. The passive microfluidic valve according to claim 7 , wherein each of the first manifold portion, the second manifold portion, and the flexible membrane is formed from polydimethylsiloxane. 9. The passive microfluidic valve according to claim 1 , wherein each of the first chamber and the second chamber has a substantially cylindrical shape having a diameter from about 3 mm to about 10 mm. 10. The passive microfluidic valve according to claim 1 , wherein each of the first inlet and the second inlet has a circular cross-section having a diameter from about 0.5 mm to about 2 mm. 11. A passive microfluidic valve comprising: a first manifold portion including: a first chamber; a first inlet fluidly coupled to the first chamber; and a second inlet; a second manifold portion in fluid communication with the first chamber via a channel, the second manifold portion including a second chamber fluidly coupled to the first chamber and the second inlet; and a flexible membrane disposed between the first manifold portion and the second manifold portion and separating the first chamber and the second chamber, the flexible membrane configured to: limit a flow rate of a media flow in a first direction, in which media flows from the first inlet to the second inlet, in response to pressure of the media flow; and at least one of limit the flow rate of the media or block flow of the media in a second direction, in which the media flows from the second inlet to the first inlet, in response to pressure of the media flow. 12. The passive microfluidic valve according to claim 11 , wherein the flexible membrane includes a deflection portion separating the first chamber and the second chamber. 13. The passive microfluidic valve according to claim 12 , wherein the deflection portion is configured to deflect toward an inner surface of the second chamber while the media flow is in the first direction and partially occluding the second chamber. 14. The passive microfluidic valve according to claim 13 , wherein the deflection portion is further configured to deflect toward an inner surface of the first chamber while the media flow is in the second direction and at least one of partially occluding the second chamber or blocking the first inlet. 15. The passive microfluidic valve according to claim 11 , wherein each of the first manifold portion, the second manifold portion, and the flexible membrane is formed from an elastomer. 16. The passive microfluidic valve according to claim 15 , wherein each of the first manifold portion, the second manifold portion, and the flexible membrane is formed from polydimethylsiloxane. 17. The passive microfluidic valve according to claim 11 , wherein each of the first chamber and the second chamber has a substantially cylindrical shape having a diameter from about 3 mm to about 10 mm. 18. The passive microfluidic valve according to claim 11 , wherein each of the first inlet and the second inlet has a circular cross-section having a diameter from about 0.5 mm to about 2 mm. 19. A micro-engine configured to combust fuel coupled to the passive microfluidic valve according to claim 11 , wherein the passive microfluidic valve is configured to pass air in the first direction to the micro-engine and to pass exhaust in the second direction from the micro-engine.
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