System and method for supplying chemical solution

Patent metadata

Field	Value
Publication number	US-11721561-B2
Application number	US-202016932649-A
Country	US
Kind code	B2
Filing date	Jul 17, 2020
Priority date	Jul 17, 2020
Publication date	Aug 8, 2023
Grant date	Aug 8, 2023

Abstract

A system includes a chemical storage tank, a pipeline, a pump, a first electrostatic probe, and a control unit. The pipeline is connected to the chemical storage tank. The pump is connected to the pipeline and configured to pump a chemical solution from the chemical storage tank into the pipeline. The first electrostatic probe is coupled to the pump and configured to measure an electrostatic voltage of the pump. The control unit is coupled to the first electrostatic probe and configured to obtain a measurement of an electrostatic voltage from the first electrostatic probe.

First claim

What is claimed is:

1. A method for supplying chemical solutions, comprising:
providing a first electrostatic probe to a chemical supply system, wherein the chemical supply system comprises a chemical storage tank, a pipeline, a pump connected to the chemical storage tank and the pipeline, a first electrostatic probe coupled to the pump, and a control unit coupled to the first electrostatic probe;
pumping a chemical solution from the chemical storage tank into the pipeline by the pump;
providing a measurement of an electrostatic voltage of the pump by the first electrostatic probe to the control unit during the pumping of the chemical solution; and
adjusting a parameter of the pump by the control unit according to the measurement of the electrostatic voltage of the pump.

2. The method of claim 1 , wherein the adjusting of the parameter of the pump is performed when the electrostatic voltage of the pump is greater than 5 KV.

3. The method of claim 1 , wherein the parameter of the pump comprises one of a fluid horsepower, a pump operation speed and a frequency.

4. The method of claim 1 , further comprising:
providing a second electrostatic probe to an inside of the pipeline;
providing a measurement of an electrostatic voltage of the inside of the pipeline to the control unit by the second electrostatic probe during the pumping of the chemical solution; and
adjusting the parameter of the pump by the control unit according to the measurements of the electrostatic voltage of the pump and the electrostatic voltage of the inside of the pipeline.

5. The method of claim 4 , further comprising:
providing a third electrostatic probe to an outside of the pipeline;
providing a measurement of an electrostatic voltage of the outside of the pipeline to the control unit by the third electrostatic probe during the pumping of the chemical solution; and
adjusting the parameter of the pump by the control unit according to the measurements of the electrostatic voltage of the pump, the electrostatic voltage of the inside of the pipeline, and the electrostatic voltage of the outside of the pipeline.

6. A method of supplying a chemical solution, comprising:
providing a chemical supply system coupled to a processing tool, wherein the chemical supply system comprises a pipeline, a pump connected to the pipeline, and a control unit;
providing a first electrostatic probe to the pump;
providing a chemical solution to the processing tool via the pipeline by the pump;
providing a measurement of an electrostatic voltage of the pump by the first electrostatic probe to the control unit during the providing of the chemical solution to the processing tool; and
adjusting a parameter of the pump by the control unit according to the measurement of the electrostatic voltage of the pump.

7. The method of claim 6 , wherein the adjusting of the parameter of the pump is performed when the electrostatic voltage of the pump is greater than 5 KV.

8. The method of claim 6 , wherein the parameter of the pump comprises one of a fluid horsepower, a pump operation speed and a frequency.

9. The method of claim 6 , wherein the processing tool comprises an etcher, a wet cleaner, and a photolithography system.

10. The method of claim 6 , further comprising:
providing a second electrostatic probe to an inside of the pipeline;
providing a measurement of an electrostatic voltage of the inside of the pipeline to the control unit by the second electrostatic probe during the providing of the chemical solution to the processing tool; and
adjusting the parameter of the pump by the control unit according to the measurements of the electrostatic voltage of the pump and the electrostatic voltage of the inside of the pipeline.

11. The method of claim 10 , further comprising:
providing a third electrostatic probe to an outside of the pipeline;
providing a measurement of an electrostatic voltage of the outside of the pipeline to the control unit by the third electrostatic probe during the providing of the chemical solution to the processing tool; and
adjusting the parameter of the pump by the control unit according to the measurements of the electrostatic voltage of the pump, the electrostatic voltage of the inside of the pipeline and the electrostatic voltage of the outside of the pipeline.

12. A method of supplying a chemical solution, comprising:
providing a chemical supply system coupled to a processing tool, wherein the chemical supply system comprises a pipeline, a pump connected to the pipeline, and a control unit;
providing a first electrostatic probe to the pump;
providing a second electrostatic probe to an inside of the pipeline;
providing a third electrostatic probe to an outside of the pipeline;
providing a chemical solution to the processing tool via the pipeline by the pump;
providing a first measurement of an electrostatic voltage of the pump by the first electrostatic probe to the control unit during the providing of the chemical solution to the processing tool; and
adjusting a parameter of the pump by the control unit according to the first measurement of the electrostatic voltage of the pump.

13. The method of claim 12 , wherein the adjusting of the parameter of the pump is performed when the electrostatic voltage of the pump is greater than 5 KV.

14. The method of claim 12 , wherein the parameter of the pump comprises one of a fluid horsepower, a pump operation speed and a frequency.

15. The method of claim 12 , wherein the processing tool comprises an etcher, a wet cleaner, and a photolithography system.

16. The method of claim 12 , further comprising:
providing a second measurement of an electrostatic voltage of the inside of the pipeline to the control unit by the second electrostatic probe during the providing of the chemical solution to the processing tool; and
adjusting the parameter of the pump by the control unit according to the first measurement of the electrostatic voltage of the pump and the second measurement of the electrostatic voltage of the inside of the pipeline.

17. The method of claim 12 , further comprising:
providing a third measurement of an electrostatic voltage of an outside of the pipeline to the control unit by the third electrostatic probe during the providing of the chemical solution to the processing tool; and
adjusting the parameter of the pump by the control unit according to the first measurement of the electrostatic voltage of the pump, the second measurement of the electrostatic voltage of the inside of the pipeline and the third measurement of the electrostatic voltage of the outside of the pipeline.

18. The method of claim 12 , wherein the third electrostatic probe is separated from an outer surface of the pipeline.

19. The method of claim 18 , wherein a distance between the third electrostatic probe and the outer surface of the pipeline is between 5 mm and 10 mm.

20. The method of claim 12 , wherein the chemical supply system further comprises a pre-amplifier.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Tseng Chih-Chiang
• Lee Ming-Lee
• Chen Chiang Jen

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• F04B49/00 Primary

  Control {, e.g. of pump delivery, or pump pressure} of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 · CPC title

• H01L21/67017 Primary

  Electricity · mapped topic

• G01R29/12

  Measuring electrostatic fields {or voltage-potential} · CPC title

• F04B2203/00

  Motor parameters · CPC title