Charged Particle Beam Device and Sample Holder
US-2019122853-A1 · Apr 25, 2019 · US
US11719923B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11719923-B2 |
| Application number | US-202016901620-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 15, 2020 |
| Priority date | Jun 15, 2020 |
| Publication date | Aug 8, 2023 |
| Grant date | Aug 8, 2023 |
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A mounting device for holding a sample mounted to a sample holder for use in an inverted microscope. The mounting device includes a platen; a mounting located on a sample side of the platen; a sample holder removably coupled to the mounting so the sample is along an optical axis of the inverted microscope; and a spacer shaped as a hollow prism or a hollow cylinder having a height and defining a through hole. The platen is disposed on the spacer with the sample side facing toward the spacer and the sample holder positioned within the through hole. The height of the spacer arranges the sample within a focal plane of the inverted microscope.
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What is claimed: 1. A mounting device for holding a sample mounted to a sample holder for use in an inverted microscope, the mounting device comprising: a platen; a mounting disposed on a sample side of the platen; and a spacer shaped as a hollow prism or a hollow cylinder having a height and defining a through hole, wherein the platen is disposed on the spacer with the sample side facing toward the spacer and the sample holder positioned within the through hole, wherein the height of the spacer arranges the sample within a focal plane of the inverted microscope, wherein the sample holder is removably coupled to the mounting so the sample is along an optical axis of the inverted microscope; wherein the mounting is integrally formed with the platen; wherein a window in at least one of the platen and the spacer, and a window cover for temporarily covering the window. 2. The mounting device according to claim 1 , wherein a position of the sample holder relative to the mounting is adjustable. 3. The mounting device according to claim 1 , wherein the spacer and the platen are formed as an integral component. 4. The mounting device according to claim 1 , further comprising: a leveler for leveling the sample. 5. The mounting device according to claim 4 , wherein the leveler comprises: at least two screws inserted through the platen via at least two screw holes near a peripheral edge of the platen, and wherein an end of each of the at least two screws extends from the sample side of the platen and contacts an edge of the spacer when the platen is disposed on the spacer. 6. The mounting device according to claim 5 , wherein the spacer further comprises at least two blind holes on an edge of the spacer, and wherein, when the platen is disposed on the spacer, each of the blind holes receive one of the screws to removably connect and rotationally orient the platen to the spacer. 7. The mounting device according to claim 1 , wherein the platen further comprises at least two pins located near a peripheral edge of the platen and that extend from the sample side, wherein the spacer further comprises at least two blind holes on an edge of the spacer, and wherein, when the platen is disposed on the spacer, each of the blind holes receive one of the pins to removably connect and rotationally orient the platen to the spacer. 8. The mounting device according to claim 1 , wherein the sample holder is a scanning electron microscope (SEM) blade having at least one protrusion, and wherein the mounting further comprises: at least one indentation disposed on a sample-attachment side of the mounting that accommodates the at least one protrusion of the SEM blade; a backplate to orient and stabilize the SEM blade; and at least one fastener that removably holds the SEM blade in the mounting and against the backplate. 9. The mounting device according to claim 1 , further comprising: at least one fastener to removably hold the sample holder in the mounting. 10. A method for assembling a mounting device for use in an inverted microscope, the method comprising: removably coupling a sample holder on a sample-attachment side of a mounting; disposing a platen side of the mounting on a sample side of a platen that is integrally formed with the mounting; placing a spacer on the inverted microscope such that an optical axis of the inverted microscope passes through a designated through hole through the spacer; disposing the platen on the spacer with the sample side of the platen facing toward the spacer such that the sample holder is positioned within the through hole and a sample is along the optical axis and within a focal plane; and closing a window cover over a window in at least one of the platen and the spacer to limit ambient illumination of the sample. 11. The method for assembling the mounting device according to claim 10 , the method further comprising: leveling the sample using a leveler. 12. The method of assembling the mounting device according to claim 10 , wherein removably mounting the sample holder on the sample-attachment side of the mounting comprises: inserting at least one protrusion of the sample holder into an indentation in the mounting; and fastening the sample holder to the mounting using at least one fastener. 13. A method for assembling a mounting device for use in microscopes, the method comprising: removably mounting a sample holder on a sample-attachment side of a mounting; disposing a platen side of the mounting on a sample side of a platen that is integrally formed with the mounting; placing the platen on an upright microscope with the sample side of the platen facing toward an objective lens; removing the platen from the upright microscope and inverting the platen together with the mounting; disposing the inverted platen on a spacer with the sample side of the platen facing toward the spacer; placing the spacer and the inverted platen on an inverted microscope such that an optical axis of the inverted microscope passes through a through hole defined by the spacer; and removably mounting the sample holder on the sample-attachment side of the mounting comprises: inserting at least one protrusion of the sample holder into an indentation in the mounting; and fastening the sample holder to the mounting using at least one fastener. 14. The method for assembling the mounting device according to claim 13 , the method further comprising: leveling a sample disposed in the sample holder using a leveler.
Microscope slides, e.g. mounting specimens on microscope slides · CPC title
Stages; Adjusting means therefor · CPC title
Holding mechanisms · CPC title
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title
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