Chemical mechanical polishing apparatus for polishing workpiece
US-2017312880-A1 · Nov 2, 2017 · US
US11719906B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11719906-B2 |
| Application number | US-202016803580-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 27, 2020 |
| Priority date | Aug 28, 2017 |
| Publication date | Aug 8, 2023 |
| Grant date | Aug 8, 2023 |
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A driving apparatus includes a movable portion, a fixed portion configured to hold the movable portion, and a controller configured to control a position of the movable portion relative to the fixed portion. At least part of the outer surface of the movable portion is a spherical surface. The fixed portion includes a plurality of vibrators configured to press and contact the spherical surface of the movable portion and to rotate the movable portion, and a pressure receiver configured to hold pressure contact states of the plurality of vibrators against the movable portion. The movable portion is held by the plurality of vibrators and the pressure receiver, and a spherical center of the spherical surface of the movable portion is located between a plane passing through the plurality of vibrators and the pressure receiver.
Opening claim text (preview).
What is claimed is: 1. A driving apparatus comprising: a movable portion; a fixed portion configured to hold the movable portion; a controller configured to control a position of the movable portion relative to the fixed portion; and a position detector including an image sensor, and configured to detect a position of the movable portion, wherein the image sensor acquires different luminance information depending on the position of the movable portion based on surface information of the movable portion, wherein the movable portion includes an outer part, a first inner part, and a second inner part provided inside the outer part, wherein the first inner part has a first reflectance, and the second inner part has a second reflectance higher than the first reflectance, and wherein the image sensor obtains a first luminance value as the luminance information by imaging the first inner part, and obtains a second luminance value as the luminance information by imaging the second inner part. 2. The driving apparatus according to claim 1 , wherein the surface information includes information on a reflectance of a surface of the movable portion. 3. The driving apparatus according to claim 1 , wherein the controller changes a driving condition of the movable portion according to the luminance information acquired by the image sensor. 4. The driving apparatus according to claim 3 , wherein the controller changes a maximum driving speed of the movable portion according to the luminance information. 5. The driving apparatus according to claim 1 , wherein at least part of an outer surface of the movable portion is spherical. 6. The driving apparatus according to claim 1 , wherein a boundary between the first inner part and the second inner part has a third reflectance that varies between the first reflectance and the second reflectance. 7. The driving apparatus according to claim 1 , wherein the image sensor acquires the first luminance value corresponding to the first inner part when at least part of the driving apparatus is captured in an imaging unit of the movable portion. 8. The driving apparatus according to claim 1 , wherein the controller sets a maximum drive speed of the movable portion to 0 when the image sensor acquires the first luminance value.
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