Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US11719595B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11719595-B2 |
| Application number | US-202117537448-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 29, 2021 |
| Priority date | Nov 30, 2020 |
| Publication date | Aug 8, 2023 |
| Grant date | Aug 8, 2023 |
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The disclosure discloses a testing device and a testing system for testing high-pressure and large-scale gap dynamic sealing performance of a plunger sleeve. The testing device includes two cylinders, first and second plunger rods and a piston rod. A first chamber is formed between an end of the first plunger rod and a first cylinder, and a second chamber is formed between an end of the second plunger rod and a second cylinder. The first chamber and the second chamber are provided with high-pressure liquid, and the two chambers communicate with each other. When being driven by a driving device, the piston rod drives the first and second plunger rods to reciprocate left and right. The plunger sleeve and a locking plunger sleeve are disposed outside each of the first and second plunger rods. The locking plunger sleeve has a leakage port. When the first and second plunger rods reciprocate, the high-pressure liquid in the chambers leaks from the leakage port.
Opening claim text (preview).
What is claimed is: 1. A testing device for testing high-pressure and large-scale gap dynamic sealing performance of a plunger sleeve, the testing device comprising two cylinders, a first plunger rod, a second plunger rod and a piston rod, wherein the first plunger rod and the second plunger rod are symmetrically distributed on both sides of the piston rod, a first chamber is formed between an end of the first plunger rod and a first cylinder, a second chamber is formed between an end of the second plunger rod and a second cylinder, high-pressure liquid is provided in the first chamber and the second chamber, and the first chamber communicates with the second chamber through a through-flow pipeline, the piston rod is connected to the first plunger rod and the second plunger rod, the piston rod drives the first plunger rod and the second plunger rod to reciprocate when being driven by a driving device, the plunger sleeve and a locking plunger sleeve are disposed outside each of the first plunger rod and the second plunger rod, the locking plunger sleeve is provided with a leakage port, and when the first plunger rod and the second plunger rod reciprocate, the high-pressure liquid in the first chamber and the second chamber flows into the leakage port respectively through a gap between the first plunger rod and the plunger sleeve and through a gap between the second plunger rod and the plunger sleeve, and an amount of the high-pressure liquid leaking from the leakage port is measured to test sealing performance of the plunger sleeve. 2. The testing device according to claim 1 , wherein central axes of the first plunger rod, the piston rod, the second plunger rod, the first chamber and the second chamber are on a same horizontal line, such that a force exerted by the high-pressure liquid in the first chamber on the first plunger rod is equal to a force exerted by the high-pressure liquid in the second chamber on the second plunger rod. 3. The testing device according to claim 1 , wherein each of the first plunger rod and the second plunger rod is provided with a displacement sensor configured to measure actual reciprocating displacement of the first plunger rod and the second plunger rod to simulate an actual movement stroke of a reciprocating radial plunger pump. 4. The testing device according to claim 1 , wherein the high-pressure liquid leaking from the leakage port is measured by a flow meter. 5. The testing device according to claim 1 , wherein a front end of the leakage port is further provided with a Turcon Stepseal configured to block the high-pressure liquid and make the high-pressure liquid flow back into the leakage port. 6. The testing device according to claim 1 , wherein a pressure range in the high-pressure liquid is ≥40 MPa, and a diameter of a plunger is ≥80 mm. 7. A testing system, applying the testing device according to claim 1 , the testing system comprising a hydraulic driving device and a water-pressure driving device, wherein the hydraulic driving device is configured to drive the piston rod to reciprocate left and right, and the water-pressure driving device provides high-pressure liquid in the first chamber and the second chamber to compensate for the leaked high-pressure liquid.
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