Mitigating pyrophoric deposits during SiC CVI/CVD processes by introducing a mitigation agent into an exhaust conduit downstream of a reaction chamber

Patent metadata

Field	Value
Publication number	US-11713281-B2
Application number	US-202117557902-A
Country	US
Kind code	B2
Filing date	Dec 21, 2021
Priority date	Dec 22, 2017
Publication date	Aug 1, 2023
Grant date	Aug 1, 2023

Abstract

Systems for and methods of manufacturing a ceramic matrix composite include introducing a gaseous precursor into an inlet portion of a reaction furnace having a chamber comprising the inlet portion and an outlet portion that is downstream of the inlet portion, and delivering a mitigation agent, such as water vapor or ammonia, into an exhaust conduit in fluid communication with and downstream of the outlet portion of the reaction chamber so as to control chemical reactions occurring with the exhaust chamber. Introducing the gaseous precursor densifies a porous preform, and introducing the mitigation agent shifts the reaction equilibrium to disfavor the formation of harmful and/or pyrophoric byproduct deposits within the exhaust conduit.

First claim

What is claimed is:

1. A method for manufacturing a ceramic matrix composite component, comprising:
introducing a gaseous precursor into an inlet portion of a reaction chamber, the reaction chamber having an outlet portion that is downstream of the inlet portion; and
delivering a mitigation agent into an exhaust conduit in fluid communication with and downstream of the outlet portion of the reaction chamber;
wherein the outlet portion comprises a porous gas mixing substrate disposed downstream from the inlet portion, and
the porous gas mixing substrate comprises at least one of a volcanic rock and a graphite.

2. The method of claim 1 , wherein delivering the mitigation agent into the exhaust conduit comprises controlling chemical reactions within the exhaust conduit.

3. The method of claim 2 , wherein controlling the chemical reactions within the exhaust conduit comprises controlling an intermediate chemical species within the exhaust conduit.

4. The method of claim 3 , wherein controlling the intermediate species within the exhaust conduit comprises decreasing a flammability of polychlorosilane within the exhaust conduit.

5. The method of claim 1 , wherein delivering the mitigation agent into the exhaust conduit comprises controlling at least one of an amount, pressure, temperature, and timing of the mitigation agent delivered to the exhaust conduit.

6. The method of claim 1 , wherein delivering the mitigation agent into the exhaust conduit comprises delivering water vapor into the exhaust conduit.

7. The method of claim 1 , wherein delivering the mitigation agent into the exhaust conduit comprises delivering ammonia into the exhaust conduit.

8. The method of claim 1 , wherein the supply conduit is configured to deliver the mitigation agent to the exhaust conduit upstream from a vacuum pump.

9. The method of claim 1 , wherein the reaction chamber has a gas distributor configured to facilitate the mixing and distribution of the gaseous precursor flowing through the porous preform.

10. The method of claim 9 , wherein the gas distributor divides the inlet portion into at least a first sub-compartment and a second sub-compartment.

11. A method of mitigating harmful byproducts in exhaust piping during ceramic matrix composite manufacturing, comprising:
delivering a mitigation agent into an exhaust conduit downstream of a furnace having a chamber comprising an inlet portion configured to receive a porous preform and an outlet portion configured to define a gas mixing space, wherein the outlet portion comprises a porous gas mixing substrate disposed downstream from the inlet portion, the porous gas mixing substrate comprises at least one of a volcanic rock and a graphite; and
controlling the mitigation agent to control chemical reactions within the exhaust conduit.

12. The method of claim 11 , wherein delivering the mitigation agent into the exhaust conduit comprises delivering water vapor into the exhaust conduit.

13. The method of claim 11 , wherein delivering the mitigation agent into the exhaust conduit comprises delivering ammonia into the exhaust conduit.

14. The method of claim 11 , wherein controlling the mitigation agent comprises controlling at least one of an amount, pressure, temperature, and timing of the mitigation agent delivered to the exhaust conduit.

Assignees

• Goodrich Corp

Inventors

• She Ying
• Menon Naveen
• Richards Gavin Charles
• Dardas Zissis A
• Filburn Thomas P

Classifications

• C04B35/80 Primary

  Fibres, filaments, whiskers, platelets, or the like · CPC title

• C04B35/565

  based on silicon carbide · CPC title

• C23C16/045

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• C23C16/325

  Silicon carbide · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title