Method for making a thermally stable connection between a glass element and a support element, method for producing an optical device, and optical device

Patent metadata

Field	Value
Publication number	US-11712753-B2
Application number	US-202117917805-A
Country	US
Kind code	B2
Filing date	Apr 6, 2021
Priority date	Apr 9, 2020
Publication date	Aug 1, 2023
Grant date	Aug 1, 2023

Abstract

The invention relates to a method for thermally stable joining of a glass element to a support element, wherein the glass element has a first coefficient of expansion and the support element has a second coefficient of expansion differing from the first coefficient of expansion. The method thus comprises a step of attaching an intermediate glass material to the support element, wherein the intermediate glass material has a third coefficient of expansion which substantially corresponds to the second coefficient of expansion. In addition, the method comprises a step of local heating of the intermediate glass material in order to join the glass element to the support element via the intermediate glass material.

First claim

What is claimed is:

1. Method for thermally stable joining of a glass element to a support element, wherein the glass element has a first coefficient of expansion and the support element has a second coefficient of expansion differing from the first coefficient of expansion and wherein the method comprises the following steps:
attaching an intermediate glass material to the support element, wherein the intermediate glass material has a third coefficient of expansion which substantially corresponds to the second coefficient of expansion; and
local heating of the intermediate glass material in order to join the glass element to the support element via the intermediate glass material.

2. Method according to claim 1 , wherein in the step of attaching, the intermediate glass material is fixed directly to the support element without using an intermediate layer.

3. Method according to claim 1 , wherein in the step of attaching, the intermediate glass material is shaped like a disc.

4. Method according to claim 1 , having a step of reducing a thickness of the intermediate glass material before the step of local heating.

5. Method according to claim 1 , wherein in the step of attaching, the intermediate glass material is heated in order to join the intermediate glass material to the support element, wherein the step of attaching is carried out before the step of local heating.

6. Method according to claim 1 , having a step of adding a solder to the support element in order to attach the intermediate glass material to the support element by means of the solder.

7. Method according to claim 1 , wherein in the step of local heating, the glass element and the intermediate glass material is heated using a pulsed laser beam.

8. Method according to claim 7 , wherein in the step of local heating, the laser beam is provided with short pulses in the range of nanoseconds or picoseconds or femtoseconds.

9. Method according to claim 1 , wherein in the step of attaching, the intermediate glass material is attached like a ring around a recess of the support element.

10. Method for producing an optical device, wherein the method comprises the following steps:
provision of a support element and of a glass element, wherein the glass element has a first coefficient of expansion and the support element has a second coefficient of expansion differing from the first coefficient of expansion; and
joining the glass element to the support element while carrying out the steps of the method for thermally stable joining of a glass element to a support element according to claim 1 .

11. Method according to claim 10 , wherein the support element is shaped from ceramic and/or metal.

12. Method according to claim 10 , wherein the first coefficient of expansion of the glass element is less than 0.5×10 −6 K −1 and/or the third coefficient of expansion of the intermediate glass material lies in the range from 2×10 −6 K −1 to 4×10 −6 K −1 .

13. Method according to claim 10 , wherein the support element is shaped with a recess, wherein the recess is covered by the glass element in the step of joining.

14. Optical device having a support element and a glass element, wherein the glass element has a first coefficient of expansion and the support element has a second coefficient of expansion differing from the first coefficient of expansion, wherein the support element is shaped with a recess which is covered or can be covered by the glass element, and wherein the support element and the glass element are joined by an intermediate glass material arranged on the recess, wherein the intermediate glass material has a third coefficient of expansion which substantially corresponds to the second coefficient of expansion.

Assignees

• Jenoptik Optical Sys Gmbh

Inventors

• Hergenhan Guido

Classifications

• B23K26/324 Primary

  involving non-metallic parts · CPC title

• B23K1/0008

  specially adapted for particular articles or work · CPC title

• B23K1/19

  taking account of the properties of the materials to be soldered · CPC title

• B23K26/0624

  using ultrashort pulses, i.e. pulses of 1 ns or less · CPC title

• B23K26/22

  Spot welding · CPC title