Resonator coil having an asymmetrical profile

Patent metadata

Field	Value
Publication number	US-11710617-B2
Application number	US-202117378327-A
Country	US
Kind code	B2
Filing date	Jul 16, 2021
Priority date	Jan 6, 2020
Publication date	Jul 25, 2023
Grant date	Jul 25, 2023

Abstract

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

First claim

What is claimed is:

1. A resonator, comprising:
a conductive hollow tube, comprising:
a first end coupled to a first electrode, the first electrode operable to accelerate ions;
a central section connected to the first end, wherein the central section extends about a central axis, wherein an inner side of the central section has a flattened surface, and wherein an outer side of the central section has a curved surface; and
a second end connected to the central section.

2. The resonator of claim 1 , wherein the central section extends helically about the central axis.

3. The resonator of claim 1 , wherein the central section comprises:
a first axial end and a second axial end; and
a plurality of loops extending between the first and second axial ends, wherein a first loop of the plurality of loops includes a first flattened surface defining a first plane, wherein a second loop of the plurality of loops includes a second flattened surface defined a second plane, and wherein a first angle, with respect to the central axis, of the first plane is different than a second angle of the second plane.

4. The resonator of claim 3 , wherein the first angle is greater than the second angle.

5. The resonator of claim 3 , wherein the first loop is positioned at the first axial end, and wherein the second loop is positioned at the second axial end.

6. The resonator of claim 1 , further comprising a second conductive hollow tube coupled to a second electrode, wherein an ion beam is operable to pass through the first and second electrodes, and wherein the second conductive hollow tube comprises plurality of loops extending helically about the central axis.

7. The resonator of claim 6 , wherein the conductive hollow tube is disposed within a housing, and wherein the second end of the conductive hollow tube is coupled to the housing.

8. The resonator of claim 7 , further comprising:
an exciter coil within the housing; and
an energy source connected with the exciter coil for providing radio frequency (RF) energy to the conductive hollow tube and to the second conductive hollow tube.

9. A resonator, comprising:
a coil disposed within a housing, the coil comprising:
a first end coupled to a first electrode, the first electrode operable to accelerate ions;
a central section connected to the first end, wherein the central section extends helically about a central axis, wherein an inner side of the central section has a flattened surface, and wherein an outer side of the central section has a curved surface; and
a second end connected to the central section, wherein an internal channel extending between the first and second ends is operable to transport a fluid.

10. The resonator of claim 9 , wherein the central section comprises:
a first axial end and a second axial end; and
a plurality of loops extending between the first and second axial ends, wherein the inner side of a first loop of the plurality of loops defines a first plane, wherein the inner side of a second loop of the plurality of loops defines a second plane, and wherein a first angle of the first plane, with respect to the central axis, is different than a second angle of the second plane, with respect to the central axis.

11. The resonator of claim 10 , wherein the first loop is positioned at the first axial end, wherein the second loop is positioned at the second axial end, and wherein the first angle is greater than the second angle.

12. The resonator of claim 9 , further comprising a second coil within the housing, wherein the second coil is coupled to a second electrode, and wherein an ion beam is operable to pass through the first and second electrodes.

13. The resonator of claim 12 , wherein the second end of the coil is coupled to the housing.

14. A resonator of an ion implanter, the resonator comprising:
a housing defining an internal cavity;
a hollow coil partially disposed within the internal cavity, the hollow coil comprising:
a first end coupled to a first electrode, the first electrode operable to accelerate ions;
a central section connected to the first end, wherein the central section extends helically about a central axis, wherein an inner side of the central section has a flattened surface, and wherein an outer side of the central section has a curved profile; and
a second end connected to the central section and to the housing.

15. The resonator of claim 14 , wherein the central section comprises:
a first axial end and a second axial end; and
a plurality of loops extending between the first and second axial ends, wherein the inner side of a first loop of the plurality of loops defines a first plane, wherein the inner side of a second loop of the plurality of loops defines a second plane, and wherein a first angle of the first plane, relative to the central axis, is different than a second angle of the second plane, relative to the central axis.

16. The resonator of claim 15 , wherein the first loop is positioned at the first axial end, wherein the second loop is positioned at the second axial end, and wherein the first angle is greater than the second angle.

17. The resonator of claim 14 , further comprising a second coil partially disposed within the internal cavity, wherein the second coil is coupled to a second electrode and to the housing, and wherein an ion beam is operable to pass through the first and second electrodes.

18. The resonator of claim 14 , wherein the flattened surface faces the central axis.

19. The resonator of claim 14 , wherein the hollow coil has a D-shaped profile.

Assignees

• Applied Materials Inc

Inventors

• Biloiu Costel
• Honan Michael
• Vopat Robert B
• Blahnik David
• Carlson Charles T
• Sinclair Frank
• Murphy Paul

Classifications

• H01J37/3007 Primary

  Electron or ion-optical systems · CPC title

• H01J23/18 Primary

  Resonators · CPC title

• H01J37/3171

  for ion implantation · CPC title

• H01J2237/0473

  accelerating · CPC title

• H01J23/20 Primary

  Cavity resonators; Adjustment or tuning thereof · CPC title